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1.发明授权公开(公告)号：US07705974B2
公开(公告)日：2010-04-27
申请号：US12381477
申请日：2009-03-11
IPC分类号： G01N21/00
CPC分类号： G01B11/0666 , G01N21/1702 , G01N21/211 , G01N2021/1725
摘要： An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.
摘要翻译： 光学系统包括通过相同的激光光源提供激光的微波宽带光谱椭偏仪和光声膜厚度测量系统。 其中一个系统进行测量，其结果用于调整另一个系统的参数; 例如 椭偏仪测量厚度，光声系统使用厚度结果来测量声速。 在一个版本中，椭偏仪将激光束转换成提供更高强度的广谱光束。
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2.发明申请公开(公告)号：US20070268478A1
公开(公告)日：2007-11-22
申请号：US11881079
申请日：2007-07-24
申请人： Robert Wolf , Christopher Morath , Robin Mair
发明人： Robert Wolf , Christopher Morath , Robin Mair
CPC分类号： G01B11/0666 , G01N21/1702 , G01N21/211 , G01N2021/1725
摘要： An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.
摘要翻译： 光学系统包括通过相同的激光光源提供激光的微波宽带光谱椭偏仪和光声膜厚度测量系统。 其中一个系统进行测量，其结果用于调整另一个系统的参数; 例如 椭偏仪测量厚度，光声系统使用厚度结果来测量声速。 在一个版本中，椭偏仪将激光束转换成提供更高强度的广谱光束。
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公开(公告)号：US07285031B2
公开(公告)日：2007-10-23
申请号：US10907879
申请日：2005-04-19
申请人： Robin Mair , Mitch Haynie
发明人： Robin Mair , Mitch Haynie
CPC分类号： B63B35/793 , B63B5/24 , B63B2231/40
摘要： FIG. 1 is an exploded view of the invention that consists of a reusable installation guide or router template, (13), which also doubles as a resin dam to secure receptacle, (9), into substrate (19)-(20). Insert (3) resides in receptacle, (9), and accommodates fin, (1), in angled slot (4). The insert, (3), and fin (1), are secured via grub screws, (10), tightened by Allen key (11). This design will accommodate a wide variety of proprietary fins available from numerous manufacturers who bundle their fin mounting systems to be used only with their fins. The fin can be removed, moved laterally within the slot, and canted by changing the insert. The fin is not part of the instant invention.
摘要翻译： “FIGREF IDREF =”Drawings“> 图1是本发明的分解图，其包括可重复使用的安装引导件或路由器模板（13），其还兼作用于将插座（9）固定到基板（19）的树脂坝（20） - （20） ）。 插入件（3）位于插座（9）中，并可容纳（1）成角度的插槽（4）。 插入件（3）和翅片（1）通过平头螺钉（10）固定，用内六角扳手（11）拧紧。 这种设计可以容纳许多制造商提供的各种专有散热片，将翅片安装系统捆绑在一起，仅用于散热片。 翅片可以移除，在槽内横向移动，并通过更换插入件进行倾斜。 翅片不是本发明的一部分。
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4.发明授权公开(公告)号：US07253887B2
公开(公告)日：2007-08-07
申请号：US11343717
申请日：2006-01-30
IPC分类号： G01N21/00
CPC分类号： G01B11/0666 , G01N21/1702 , G01N21/211 , G01N2021/1725
摘要： A photoacoustic system with ellipsometer, where the ellipsometer includes a laser light source for generating an incident beam, an element for focusing the incident beam on a sample, a unit for measuring the change in amplitude of the incident beam on reflection and a unit for measuring the phase difference of the incident beam on reflection. The system further includes an element to convert an input narrow spectrum beam generated by the laser light source to a broadband sample measurement beam that is focused onto the sample.
摘要翻译： 具有椭偏仪的光声系统，其中椭偏仪包括用于产生入射光束的激光光源，用于将入射光束聚焦在样本上的元件，用于测量反射时入射光束的振幅变化的单元和用于测量的单元 入射光束的反射相位差。 该系统还包括将由激光光源产生的输入窄光谱束转换成聚焦到样本上的宽带样品测量光束的元件。
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公开(公告)号：US09991176B2
公开(公告)日：2018-06-05
申请号：US15515126
申请日：2015-09-29
申请人： Manjusha Mehendale , Michael Kotelyanskii , Todd W. Murray , Robin Mair , Priya Mukundhan , Jacob D. Dove , Xueping Ru , Jonathan Cohen , Timothy Kryman
发明人： Manjusha Mehendale , Michael Kotelyanskii , Todd W. Murray , Robin Mair , Priya Mukundhan , Jacob D. Dove , Xueping Ru , Jonathan Cohen , Timothy Kryman
CPC分类号： H01L22/12 , G01N29/04 , G01N29/06 , G01N29/0681 , G01N29/069 , G01N29/07 , G01N29/2418 , G01N29/46 , G01N2291/0289 , H01L21/76898 , H01L22/20
摘要： Advanced interconnect technologies such as Through Silicon Vias (TSVs) have become an integral part of 3-D integration. Methods and systems and provided for laser-based acoustic techniques in which a short laser pulse generates broadband acoustic waves that propagate in the TSV structure. An optical interferometer detects the surface displacement caused by the acoustic waves reflecting within the structure as well as other acoustic waves traveling near the surface that has information about the structure dimensions and irregularities, such as voids. Features of voids, such as their location, are also identified based on the characteristics of the acoustic wave as it propagates through the via. Measurements typically take few seconds per site and can be easily adopted for in-line process monitoring.
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公开(公告)号：US20160043008A1
公开(公告)日：2016-02-11
申请号：US14776953
申请日：2014-02-05
CPC分类号： H01L22/20 , G01N21/00 , G01N21/1702 , G01N21/41 , G01N21/9501 , G01N29/04 , G01N29/2418 , G01N2021/8461 , G01N2201/06113 , G01N2291/011 , G01N2291/028 , G01N2291/0423 , G01N2291/0426 , H01L21/0231 , H01L21/78 , H01L22/00 , H01L22/10 , H01L22/12
摘要： A system and method for identifying one or more characteristics of a structure formed into a substrate is herein disclosed. Surface and bulk acoustic waves are induced in the substrate and travel past a structure of interest where the acoustic waves are sensed. Information concerning one or more characteristics of the structure is encoded in the wave. The encoded information is assessed to determine the characteristic of interest.
摘要翻译： 本文公开了一种用于识别形成衬底的结构的一个或多个特性的系统和方法。 表面和体声波在衬底中被感应并且经过感兴趣的结构并且传播到其中感测声波的结构。 关于结构的一个或多个特征的信息被编码在波中。 评估编码信息以确定感兴趣的特征。
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7.发明申请公开(公告)号：US20090201502A1
公开(公告)日：2009-08-13
申请号：US12381477
申请日：2009-03-11
CPC分类号： G01B11/0666 , G01N21/1702 , G01N21/211 , G01N2021/1725
摘要： An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.
摘要翻译： 光学系统包括通过相同的激光光源提供激光的微波宽带光谱椭偏仪和光声膜厚度测量系统。 其中一个系统进行测量，其结果用于调整另一个系统的参数; 例如 椭偏仪测量厚度，光声系统使用厚度结果来测量声速。 在一个版本中，椭偏仪将激光束转换成提供更高强度的广谱光束。
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公开(公告)号：US07522272B2
公开(公告)日：2009-04-21
申请号：US11881079
申请日：2007-07-24
IPC分类号： G01N21/00
CPC分类号： G01B11/0666 , G01N21/1702 , G01N21/211 , G01N2021/1725
摘要： An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.
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9.发明申请公开(公告)号：US20060126057A1
公开(公告)日：2006-06-15
申请号：US11343717
申请日：2006-01-30
申请人： Robert Wolf , Christopher Morath , Robin Mair
发明人： Robert Wolf , Christopher Morath , Robin Mair
CPC分类号： G01B11/0666 , G01N21/1702 , G01N21/211 , G01N2021/1725
摘要： A photoacoustic system with ellipsometer, where the ellipsometer includes a laser light source for generating an incident beam, an element for focusing the incident beam on a sample, a unit for measuring the change in amplitude of the incident beam on reflection and a unit for measuring the phase difference of the incident beam on reflection. The system further includes an element to convert an input narrow spectrum beam generated by the laser light source to a broadband sample measurement beam that is focused onto the sample.
摘要翻译： 具有椭偏仪的光声系统，其中椭偏仪包括用于产生入射光束的激光光源，用于将入射光束聚焦在样本上的元件，用于测量反射时入射光束的振幅变化的单元和用于测量的单元 入射光束的反射相位差。 该系统还包括将由激光光源产生的输入窄光谱束转换成聚焦到样本上的宽带样品测量光束的元件。
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公开(公告)号：US20120061090A1
公开(公告)日：2012-03-15
申请号：US13147370
申请日：2010-01-15
申请人： Andrew Richards , Robin Mair
发明人： Andrew Richards , Robin Mair
IPC分类号： E21B43/01
CPC分类号： E21B33/038 , E21B21/001 , E21B21/08 , E21B33/035 , E21B33/0355
摘要： A landing string assembly (10) comprises a first end (12) adapted to be coupled to a wellhead assembly (14), a second end (16) adapted to be located relative to a surface platform (18), and a pump (34) mounted intermediate the first and second ends (12, 16). In one disclosed embodiment the pump (34) is located adjacent the first end (12), and the string assembly (10) is configured for use in deepwater applications.
摘要翻译： 一种着陆绳组件（10）包括适于联接到井口组件（14）的第一端（12），适于相对于表面平台（18）定位的第二端（16）和泵（34） ）安装在第一和第二端（12,16）的中间。 在一个公开的实施例中，泵（34）位于第一端（12）附近，并且串组件（10）构造成用于深水应用中。
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