公开(公告)号：US08173525B2

公开(公告)日：2012-05-08

申请号：US11454334

申请日：2006-06-16

Applicant: Samuel Graham, Jr. ,  William P. King ,  Ching-ping Wong

Inventor： Samuel Graham, Jr. ,  William P. King ,  Ching-ping Wong

IPC: H01L21/00 ,  H01L21/20

CPC classification number: G03F7/0002 ,  B81C1/00031 ,  B81C2201/0185 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  Y10S977/707 ,  Y10S977/887

Abstract: Systems and methods of nanomaterial transfer are described. A method of nanomaterial transfer involving fabricating a template and synthesizing nanomaterials on the template. Subsequently, the nanomaterials are transferred to a substrate by pressing the template onto the substrate. In some embodiments, the step of transferring the nanomaterials involves pressing the template onto the substrate such that the nanomaterials are embedded below a surface layer of the substrate. In some embodiments, the temperature of the plurality of nanomaterials is raised to assist the transfer of the nanomaterials to the substrate.

Abstract translation: 描述纳米材料转移的系统和方法。 纳米材料转移的方法涉及制作模板并在模板上合成纳米材料。 随后，通过将模板压在衬底上，将纳米材料转移到衬底。 在一些实施方案中，转移纳米材料的步骤包括将模板压在衬底上，使得纳米材料嵌入在衬底的表面层下面。 在一些实施方案中，提高多个纳米材料的温度以辅助将纳米材料转移到基底。

公开(公告)号：US07147722B2

公开(公告)日：2006-12-12

申请号：US10852545

申请日：2004-05-24

Applicant: Leonard E. Klebanoff ,  Philip Grunow ,  Samuel Graham, Jr.

Inventor： Leonard E. Klebanoff ,  Philip Grunow ,  Samuel Graham, Jr.

IPC: B08B3/12 ,  B08B6/00

CPC classification number: G03F7/70925 ,  B08B7/0035 ,  H01J2237/3151 ,  Y10S134/902

Abstract: Activated gaseous species generated adjacent a carbon contaminated surface affords in-situ cleaning. A device for removing carbon contamination from a surface of the substrate includes (a) a housing defining a vacuum chamber in which the substrate is located; (b) a source of gaseous species; and (c) a source of electrons that are emitted to activate the gaseous species into activated gaseous species. The source of electrons preferably includes (i) a filament made of a material that generates thermionic electron emissions; (ii) a source of energy that is connected to the filament; and (iii) an electrode to which the emitted electrons are attracted. The device is particularly suited for photolithography systems with optic surfaces, e.g., mirrors, that are otherwise inaccessible unless the system is dismantled. A method of removing carbon contaminants from a substrate surface that is housed within a vacuum chamber is also disclosed. The method employs activated gaseous species that react with the carbon contaminants to form carbon containing gaseous byproducts.

Abstract translation: 在碳污染表面附近产生的活性气体物质可提供原位清洗。 用于从基板的表面去除碳污染的装置包括：（a）限定真空室的壳体，其中所述基板位于其中; （b）气态物质来源; 和（c）发射的电子源以将气态物质活化成活化的气态物质。 电子源优选包括（i）由产生热离子电子发射的材料制成的灯丝; （ii）连接到灯丝的能量源; 和（iii）发射的电子被吸引到的电极。 该装置特别适用于具有光学表面（例如镜子）的光刻系统，除非系统被拆除，否则不能进入。 还公开了一种从容纳在真空室内的衬底表面除去碳污染物的方法。 该方法使用与碳污染物反应形成含碳气体副产物的活性气体物质。

公开(公告)号：US20100132762A1

公开(公告)日：2010-06-03

申请号：US12629009

申请日：2009-12-01

Applicant: SAMUEL GRAHAM, JR. ,  Bernard Kippelen ,  Namsu Kim ,  Benoit Domercq

Inventor： SAMUEL GRAHAM, JR. ,  Bernard Kippelen ,  Namsu Kim ,  Benoit Domercq

IPC: H01L31/042 ,  B32B9/04 ,  B32B27/32 ,  B32B27/38 ,  B32B27/30 ,  B32B27/00 ,  B32B27/40 ,  B32B5/00 ,  H01L31/04 ,  C23C16/44 ,  C23C16/513 ,  H01J1/62 ,  H01L51/50 ,  H01L51/56 ,  H01L51/05

CPC classification number: C23C16/45525 ,  C23C16/0272 ,  C23C16/403 ,  C23C16/56 ,  H01L51/5253 ,  Y10T428/26 ,  Y10T428/31504 ,  Y10T428/31511 ,  Y10T428/31551 ,  Y10T428/31663 ,  Y10T428/31721 ,  Y10T428/31935 ,  Y10T428/31938

Abstract: Improved environmental barrier coatings and improved organic semiconductor devices employing the improved environmental barrier coatings are disclosed herein. Methods of making and using the improved coatings and devices are also described. An improved environmental barrier coating generally includes a primary barrier layer, a secondary barrier layer disposed on the primary barrier layer, and a passivation layer disposed on the secondary barrier layer. The secondary barrier layer is formed using atomic layer deposition.

Abstract translation: 本文公开了改进的环境屏障涂层和使用改进的环境屏障涂层的改进的有机半导体器件。 还描述了制造和使用改进的涂层和装置的方法。 改进的环境阻挡涂层通常包括主阻挡层，设置在主阻挡层上的次级阻挡层和设置在次级阻挡层上的钝化层。 二次阻挡层使用原子层沉积形成。

公开(公告)号：US20080283269A1

公开(公告)日：2008-11-20

申请号：US11454334

申请日：2006-06-16

Applicant: Samuel Graham, JR. ,  William P. King ,  Ching-ping Wong

Inventor： Samuel Graham, JR. ,  William P. King ,  Ching-ping Wong

IPC: H05K1/09 ,  B29C65/70

CPC classification number: G03F7/0002 ,  B81C1/00031 ,  B81C2201/0185 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  Y10S977/707 ,  Y10S977/887

Abstract: Systems and methods of nanomaterial transfer are described. A method of nanomaterial transfer involving fabricating a template and synthesizing nanomaterials on the template. Subsequently, the nanomaterials are transferred to a substrate by pressing the template onto the substrate. In some embodiments, the step of transferring the nanomaterials involves pressing the template onto the substrate such that the nanomaterials are embedded below a surface layer of the substrate. In some embodiments, the temperature of the plurality of nanomaterials is raised to assist the transfer of the nanomaterials to the substrate.

Abstract translation: 描述纳米材料转移的系统和方法。 纳米材料转移的方法涉及制作模板并在模板上合成纳米材料。 随后，通过将模板压在衬底上，将纳米材料转移到衬底。 在一些实施方案中，转移纳米材料的步骤包括将模板压在衬底上，使得纳米材料嵌入在衬底的表面层下面。 在一些实施方案中，提高多个纳米材料的温度以辅助将纳米材料转移到基底。

公开(公告)号：US20090246507A1

公开(公告)日：2009-10-01

申请号：US12354223

申请日：2009-01-15

Applicant: SAMUEL GRAHAM, JR. ,  Robert Cross

Inventor： SAMUEL GRAHAM, JR. ,  Robert Cross

IPC: B32B5/16 ,  B32B37/00 ,  D01F9/12 ,  B44C1/22

CPC classification number: B82Y40/00 ,  B82Y30/00 ,  C01B32/162 ,  C01B32/168 ,  C01B2202/08 ,  C01P2004/133 ,  Y10T156/1089 ,  Y10T428/25

Abstract: Systems and methods for fabrication, delivery, and transfer of carbon nanotubes are provided. In accordance with some embodiments, carbon nanotubes can be grown and then transferred to a surface for carrying grown nanotubes. Grown nanotubes can be formed in a mat of nanotubes that are integrally held together on a film. Grown nanotube mats can be formed as a mat of freestanding carbon nanotubes bound to each other. A method to fabricate transferable carbon nanotubes can include providing a surface to carry carbon nanotubes, applying a removable adhesive on a surface, and locating carbon nanotubes on a surface having the removable adhesive located thereon. A device for holding carbon nanotubes can include a surface for carrying carbon nanotubes, at least one grouping of free standing carbon nanotubes, and a removable adhesive disposed generally between the surface and the at least one grouping of free standing carbon nanotubes. Other aspects, embodiments, and features are also claimed and described.

Abstract translation: 提供了用于制造，输送和转移碳纳米管的系统和方法。 根据一些实施方案，可以生长碳纳米管，然后转移到用于承载生长的纳米管的表面。 生长的纳米管可以形成在膜上整体地保持在一起的纳米管垫中。 生长的纳米管垫可以形成为彼此结合的独立碳纳米管的垫。 制造可转移碳纳米管的方法可以包括提供表面以携带碳纳米管，在表面上施加可去除的粘合剂，以及将碳纳米管定位在其上具有可去除的粘合剂的表面上。 用于保持碳纳米管的装置可以包括用于承载碳纳米管的表面，至少一组独立的碳纳米管和可移除的粘合剂，其通常设置在所述表面和所述至少一组独立的碳纳米管之间。 还要求和描述其它方面，实施例和特征。

公开(公告)号：US06772776B2

公开(公告)日：2004-08-10

申请号：US09956543

申请日：2001-09-18

Applicant: Leonard E. Klebanoff ,  Philip Grunow ,  Samuel Graham, Jr.

Inventor： Leonard E. Klebanoff ,  Philip Grunow ,  Samuel Graham, Jr.

IPC: B08B312

CPC classification number: G03F7/70925 ,  B08B7/0035 ,  H01J2237/3151 ,  Y10S134/902

Abstract: Activated gaseous species generated adjacent a carbon contaminated surface affords in-situ cleaning. A device for removing carbon contamination from a surface of the substrate includes (a) a housing defining a vacuum chamber in which the substrate is located; (b) a source of gaseous species; and (c) a source of electrons that are emitted to activate the gaseous species into activated gaseous species. The source of electrons preferably includes (i) a filament made of a material that generates thermionic electron emissions; (ii) a source of energy that is connected to the filament; and (iii) an electrode to which the emitted electrons are attracted. The device is particularly suited for photolithography systems with optic surfaces, e.g., mirrors, that are otherwise inaccessible unless the system is dismantled.

Abstract translation: 在碳污染表面附近产生的活性气体物质可提供原位清洗。 用于从基板的表面去除碳污染的装置包括：（a）限定真空室的壳体，其中所述基板位于其中; （b）气态物质来源; 和（c）发射的电子源以将气态物质活化成活化的气态物质。 电子源优选包括（i）由产生热离子电子发射的材料制成的灯丝; （ii）连接到灯丝的能量源; 和（iii）发射的电子被吸引到的电极。 该装置特别适用于具有光学表面（例如镜子）的光刻系统，除非系统被拆除，否则不能进入。