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157 条记录 (耗时 0.032 秒)

    Stage device
    1.
    发明授权
    Stage device 失效
    舞台装置

    公开(公告)号：US07257902B2

    公开(公告)日：2007-08-21

    申请号：US11522400

    申请日：2006-09-18

    申请人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Makoto Tano

    发明人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Makoto Tano

    IPC分类号： G01D21/00

    CPC分类号： G03F7/70775 ,  G03F7/70716

    摘要： This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.

    摘要翻译： 本发明涉及一种使用平面电机在X-Y方向和旋转方向上高精度地移动的平台装置。 本发明的目的在于减小舞台装置的尺寸并且准确地测量舞台到底座的位置。 舞台装置包括在基座的整个平面上具有刻度部分的刻度单元，以及设置在可移动台部的底面上的三个二维角度传感器。 刻度单元和二维角度传感器形成表面编码。 可动平台部分的位置由表面编码器测量。

    Stage device
    2.
    发明申请
    Stage device 失效

    公开(公告)号：US20070035267A1

    公开(公告)日：2007-02-15

    申请号：US11522400

    申请日：2006-09-18

    申请人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Makoto Tano

    发明人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Makoto Tano

    IPC分类号： B64C17/06

    CPC分类号： G03F7/70775 ,  G03F7/70716

    摘要： This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.

    Sensor device and stage device
    3.
    发明授权
    Sensor device and stage device 有权
    传感器装置和舞台装置

    公开(公告)号：US07502127B2

    公开(公告)日：2009-03-10

    申请号：US11588271

    申请日：2006-10-27

    申请人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Toru Hirata ,  Yoji Watanabe ,  Kennichi Makino

    发明人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Toru Hirata ,  Yoji Watanabe ,  Kennichi Makino

    IPC分类号： G01B11/14 ,  G01B11/02 ,  G01B11/26 ,  G01C1/00 ,  G01D5/36 ,  G01N21/86 ,  G01V8/00

    CPC分类号： G03F7/70758 ,  G01D5/28 ,  G01D5/38 ,  G03F7/70775

    摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.

    摘要翻译： 根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。 传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。 光源向参考光栅发射光。 光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。 检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。 检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。

    Sensor device and stage device
    4.
    发明申请
    Sensor device and stage device 有权
    传感器装置和舞台装置

    公开(公告)号：US20070041024A1

    公开(公告)日：2007-02-22

    申请号：US11588271

    申请日：2006-10-27

    申请人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Toru Hirata ,  Yoji Watanabe ,  Kennichi Makino

    发明人： Wei Gao ,  Satoshi Kiyono ,  Yoshiyuki Tomita ,  Toru Hirata ,  Yoji Watanabe ,  Kennichi Makino

    IPC分类号： G01B11/14

    CPC分类号： G03F7/70758 ,  G01D5/28 ,  G01D5/38 ,  G03F7/70775

    摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.

    摘要翻译： 根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。 传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。 光源向参考光栅发射光。 光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。 检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。 检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。

    Eyewear retainer
    5.
    外观设计
    Eyewear retainer 有权

    公开(公告)号：USD1000509S1

    公开(公告)日：2023-10-03

    申请号：US29856333

    申请日：2022-10-13

    申请人： Wei Gao

    设计人： Wei Gao

    摘要： FIG. 1 is a front perspective view of an eyewear retainer, showing my new design;
    FIG. 2 is a rear perspective view thereof;
    FIG. 3 is a front elevation view thereof;
    FIG. 4 is a rear elevation view thereof;
    FIG. 5 is a top plan view thereof; and,
    FIG. 6 is a bottom plan view thereof.
    The broken lines in the figures are for the purposes of illustrating portions of the eyewear retainer, which form no part of the claimed design.
    The article is shown with a symbolic break in its length. The appearance of any portion of the article between the break lines forms no part of the claimed design.