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    Method of detaching article fixed through pressure sensitive adhesive double coated sheet
    1.
    发明授权
    Method of detaching article fixed through pressure sensitive adhesive double coated sheet 失效
    通过压敏双面涂层片固定的物品分离方法

    公开(公告)号：US06649017B1

    公开(公告)日：2003-11-18

    申请号：US09654819

    申请日：2000-09-05

    申请人： Shuji Kurokawa

    发明人： Shuji Kurokawa

    IPC分类号： B32B3500

    CPC分类号： H01L21/67092 ,  H01L21/6836 ,  H01L2221/68381 ,  H01L2221/68386 ,  Y10S438/976 ,  Y10T29/49819 ,  Y10T29/49822 ,  Y10T156/1153

    摘要： A method of detaching an article (B) from a laminate unit (C), the laminate unit (C) comprising a support plate (A) and, fixed thereto, the article (B), the fixing effected through a pressure sensitive adhesive double coated sheet (1) deformable by heating to thereby exert a peeling effect, which method comprises heating at least one outer part of the laminate unit so that at least part of an outer region of the laminate unit is initially heated up, with other regions heated up later, and detaching the article (B) from the pressure sensitive adhesive double coated sheet (1) in a direction from the outer region toward the other regions. Thus, there are provided a detaching method and a detacher apparatus which enable efficiently detaching an article, such as an extremely thin wafer, having been fixed through a heat shrinkable pressure sensitive adhesive double coated sheet without cracking of the article.

    摘要翻译： 一种从层压单元（C）分离物品（B）的方法，包括支撑板（A）的层压单元（C）和固定到其上的物品（B），通过压敏粘合剂双重固定 通过加热变形从而施加剥离效果的涂布片（1），该方法包括加热层压单元的至少一个外部部分，使得层压单元的外部区域的至少一部分最初被加热，其他区域被加热 并且在从外部区域朝向其他区域的方向上将物品（B）从压敏双面涂布纸（1）分离。 因此，提供了一种分离方法和分离装置，其能够有效地分离已经通过热收缩压敏粘合剂双重涂层固定的物品，例如极薄的晶片，而不会使产品开裂。

    MEASURING DEVICE
    4.
    发明申请
    MEASURING DEVICE 审中-公开
    测量工具

    公开(公告)号：US20090146786A1

    公开(公告)日：2009-06-11

    申请号：US12089540

    申请日：2006-10-04

    申请人： Akinori Toma ,  Shuji Kurokawa ,  Yoshiaki Sugishita

    发明人： Akinori Toma ,  Shuji Kurokawa ,  Yoshiaki Sugishita

    IPC分类号： H04Q5/22 ,  G01B11/26

    CPC分类号： H01L21/67294 ,  G01B11/14 ,  G01B11/272 ,  H01L21/67132

    摘要： [Problem to be Solved] To provide a measuring device preferable to enhance capability of pickup processing when picking up each chip of a plate-shaped member individually separated into a form of chips.[Solution] A semiconductor wafer 4 as a plate-shaped member supported by a support member H which is consisted of an adhesive sheet 3 and a ring frame 2, the adhesive sheet is stuck to an opening of the ring frame 2, and individually separated into a form of chips by cutting is set as a measurement target; an image processing unit 5 measures a chip interval G and a misalignment angle θ, and measurement data D of them is sent from the image processing unit 5 to a host computer 6, and stored in storage means 12 of the host computer 6; and based on the chip interval G and the misalignment angle θ stored in the storage means 12, position recognition processing at the time of confirming the position of a chip with a recognition unit of a pickup device, for example, a camera, and correction processing of aligning the position of a collet for pickup with the recognized position can be carried out in the next step.

    摘要翻译： [待解决的问题]提供一种测量装置，其优选地在拾取单独分离成芯片形式的板状构件的每个芯片时提高拾取处理能力。 [解决方案]作为由由粘合片3和环形框架2构成的支撑构件H支撑的板状构件的半导体晶片4，将粘合片粘贴到环形框架2的开口，并且分离 通过切割成芯片的形式被设定为测量对象; 图像处理单元5测量码片间隔G和不对准角度θ，并且它们的测量数据D从图像处理单元5发送到主计算机6，并存储在主计算机6的存储装置12中; 并且基于存储在存储装置12中的芯片间隔G和不对准角度θ，在用拾取装置的识别单元（例如相机）确认芯片的位置时的位置识别处理和校正处理 可以在下一步骤中执行用于拾取的夹头的位置与识别的位置的对准。

    Observation apparatus and method of controlling light emission thereof
    5.
    发明授权
    Observation apparatus and method of controlling light emission thereof 失效
    观察装置及其发光控制方法

    公开(公告)号：US06697116B1

    公开(公告)日：2004-02-24

    申请号：US09229468

    申请日：1999-01-13

    申请人： Shuji Kurokawa ,  Kenji Kobayashi

    发明人： Shuji Kurokawa ,  Kenji Kobayashi

    IPC分类号： H04N5222

    CPC分类号： H04N9/73

    摘要： An observation apparatus is equipped with a light-emitting portion for shining light onto an observation object, an image detector for receiving light reflected from or passing through the observation object, a light emission period establisher for establishing a light emission period for the light-emitting portion, and a light emission controller which activates the light-emitting portion to emit light synchronous with a vertical synchronizing signal of the image detector, and which terminates the emission of light from the light-emitting portion after the established light emission period has elapsed.

    摘要翻译： 观察装置配备有用于将光照射到观察对象上的发光部分，用于接收从观察对象反射或穿过观察对象的光的图像检测器，用于建立发光的发光周期的发光周期建立器 以及发光控制器，其激活发光部分以与图像检测器的垂直同步信号同步地发光，并且在经过建立的发光周期之后终止来自发光部分的光的发射。

    Observation apparatus
    6.
    发明授权
    Observation apparatus 失效
    观察装置

    公开(公告)号：US06400455B1

    公开(公告)日：2002-06-04

    申请号：US09209046

    申请日：1998-12-09

    申请人： Shuji Kurokawa ,  Kenji Kobayashi

    发明人： Shuji Kurokawa ,  Kenji Kobayashi

    IPC分类号： E01N2100

    CPC分类号： G01N21/8806 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

    摘要： An observation apparatus for observing an observation object is constructed from a light source portion for emitting illumination light, a converging lens for focusing illumination light from the light source portion onto the observation object and a light-receiving portion for receiving light reflected from the observation object, wherein the light source portion includes a first arrangement of at least one light-emitting body provided on the optical axis of the converging lens, a second arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which allows the light source image to completely cover the light-receiving portion (bright field illumination), a third arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which allows the light source image to cover a portion of the light-receiving portion, and a fourth arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which prevents the light source image from covering any of the light-receiving portion (dark field illumination), in which the light-emitting bodies are adapted for selective activation.

    摘要翻译： 用于观察观察对象的观察装置由用于发射照明光的光源部分构成，用于将来自光源部分的照明光聚焦到观察对象上的会聚透镜和用于接收从观察对象反射的光的光接收部分 其中，所述光源部分包括设置在会聚透镜的光轴上的至少一个发光体的第一布置，设置在所述光轴附近的至少一个发光体的第二布置，以将光照射到 以允许光源图像完全覆盖光接收部分的入射角的观察对象（亮场照明），设置在光轴附近的至少一个发光体的第三布置，以将光照射到 观察对象以允许光源图像覆盖光接收部分的一部分的入射角 以及设置在光轴附近的至少一个发光体的第四布置，以便以防止光源图像覆盖任何光接收部分（暗场照明）的入射角将光照射到观察对象上 ），其中发光体适于选择性激活。

    Lighting apparatus
    7.
    发明授权
    Lighting apparatus 失效
    照明设备

    公开(公告)号：US06286969B1

    公开(公告)日：2001-09-11

    申请号：US09352324

    申请日：1999-07-12

    申请人： Shuji Kurokawa ,  Kenji Kobayashi

    发明人： Shuji Kurokawa ,  Kenji Kobayashi

    IPC分类号： G03B1502

    CPC分类号： G01N21/8806

    摘要： A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle &thgr; with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11. By changing the position of the light-emitting portion 13 in this way, it is possible to change the illuminating angle and the illuminating angle distribution, and by adjusting the position of the light-emitting portion 13 in accordance with the optical characteristics of the object 3, it is possible to obtain a high contrast image. It is also possible for these adjustments to be carried out automatically by using an actuator, microcomputer or the like.

    摘要翻译： 照明装置1具有凸透镜11，其布置成使得其光轴相对于观察部分3a（例如，半导体衬底等）的法线成角度θ，其中照相机5布置在 反射光线。 当沿着透镜11的光轴布置发光部分13时，发生明场照明。 如果旋钮29转动，则发光部13沿着滚珠丝杠25移动，从而将照明从亮场照明改变为暗场照明。 当旋钮37转动时，如果发光部分13靠近透镜11移动，离开透镜11的光将发散，如果发光部分13远离透镜11移动则会聚，并且平行 如果发光部分13位于透镜11的焦点处。通过以这种方式改变发光部分13的位置，可以改变照明角度和照明角度分布，并且通过调节 根据物体3的光学特性的发光部分13的位置，可以获得高对比度图像。 这些调整也可以通过使用致动器，微型计算机等自动进行。

    Alignment apparatus
    8.
    发明授权
    Alignment apparatus 有权
    校准装置

    公开(公告)号：US07274452B2

    公开(公告)日：2007-09-25

    申请号：US10689525

    申请日：2003-10-21

    申请人： Shuji Kurokawa

    发明人： Shuji Kurokawa

    IPC分类号： G01B11/00

    CPC分类号： H01L21/681 ,  B23Q1/52 ,  B23Q3/183

    摘要： An alignment apparatus 10 comprises a table 11 which is provided rotatably in a plane, and equipped with a loading plane 12A capable of sucking a wafer W, a shift mechanism 30 that moves the table 11 in the X- and Y-axis directions, and a sensor 50 that detects the position of the peripheral edge of the wafer W. The loading plane 12A is provided so as to come to a position inside the periphery of the wafer W. On the other hand, outside the table 11, a receiving member 15, which is positioned on the generally same plane as the loading plane 12A, is provided, and the receiving member 15 is provided with a plane configuration larger than the wafer W.

    摘要翻译： 对准装置10包括：台面11，其可旋转地设置在平面内，并具有能够吸收晶片W的装载平面12A;移动机构30，其使工作台11沿X轴方向和Y轴方向移动; 以及检测晶片W的周缘的位置的传感器50.装载面12A设置成进入晶片W的周围的位置。另一方面，在台11的外侧， 接收构件15设置在与加载平面12A大致相同的平面上，并且接收构件15设置有比晶片W大的平面构造。

    Malfunction detector for rotation sensor
    9.
    发明申请
    Malfunction detector for rotation sensor 审中-公开
    旋转传感器故障检测器

    公开(公告)号：US20060069524A1

    公开(公告)日：2006-03-30

    申请号：US11238863

    申请日：2005-09-29

    申请人： Jun Hashimoto ,  Satoshi Takizawa ,  Atsushi Kobayashi ,  Shuji Kurokawa ,  Yasukazu Maekawa ,  Masatoshi Akanuma

    发明人： Jun Hashimoto ,  Satoshi Takizawa ,  Atsushi Kobayashi ,  Shuji Kurokawa ,  Yasukazu Maekawa ,  Masatoshi Akanuma

    IPC分类号： G06F19/00

    CPC分类号： F16H61/12 ,  F16H2061/1208 ,  F16H2061/1284

    摘要： While a voltage value of the battery detected by a battery voltage-detecting part is less than a predetermined threshold voltage value for determining a low voltage state, a rotation sensor malfunction-detecting part stops calculating a vehicle speed and uses the vehicle speed calculated at a time immediately before a time when a voltage value of a battery becomes less than the threshold voltage value for determining the low voltage state, for detecting malfunction in a rotation sensor. Thereby, even if noises due to a voltage fluctuation in the battery mix with the rotation signal from the rotation sensor, since the rotation sensor malfunction-detecting part does not calculate the vehicle speed during a period of time when the voltage value of the battery detected by a battery voltage-detecting part is less than the threshold voltage value for determining the low voltage state, the vehicle speed is not miscalculated based on the rotation signal including noises, and the malfunction in the rotation sensor can be precisely detected.

    摘要翻译： 当由电池电压检测部检测到的电池的电压值小于用于确定低电压状态的预定阈值电压值时，旋转传感器故障检测部分停止计算车速并使用在 在电池的电压值变得小于用于确定低电压状态的阈值电压值的时间之前，用于检测旋转传感器中的故障。 因此，即使由于电池中的电压波动引起的噪声与来自旋转传感器的旋转信号混合，由于旋转传感器故障检测部件在检测到电池的电压值的时间段内不计算车速 通过电池电压检测部分小于用于确定低电压状态的阈值电压值，基于包括噪声的旋转信号不会对车速进行计算，并且可以精确地检测旋转传感器的故障。