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    Anti-reflection coating, and optical element and optical system with anti-reflection coating
    1.
    发明申请
    Anti-reflection coating, and optical element and optical system with anti-reflection coating 有权
    防反射涂层，光学元件和防反射涂层光学系统

    公开(公告)号：US20050225878A1

    公开(公告)日：2005-10-13

    申请号：US11091410

    申请日：2005-03-29

    申请人： Issei Tanaka ,  Tsuyoshi Murata

    发明人： Issei Tanaka ,  Tsuyoshi Murata

    IPC分类号： G02B1/11 ,  G02B27/00 ,  G03H1/10 ,  G02B3/00 ,  G02B13/00

    CPC分类号： G02B1/115 ,  G02B1/116 ,  G02B27/0018

    摘要： An anti-reflection coating is formed on an optical surface of an optical member 2 for reducing the amount of light rays reflected from the optical surface. For light rays in a wavelength range from 400 nm to 700 nm, the anti-reflection coating has a reflectance of 0.5% or less if the light rays are incident on the optical surface at angles within a range from 0 to 25 degrees, and it has a reflectance of 3.5% or less if the light rays are incident at angles within a range from 0 to 60 degrees.

    摘要翻译： 在光学构件2的光学表面上形成防反射涂层，用于减少从光学表面反射的光线的量。 对于400nm〜700nm波长范围的光线，如果光线以0〜25度的角度入射到光学面上，则防反射膜的反射率为0.5％以下， 如果光线以0至60度的范围内的角度入射，则其反射率为3.5％以下。

    Optical element with multilayer thin film and exposure apparatus with the element
    2.
    发明授权
    Optical element with multilayer thin film and exposure apparatus with the element 失效
    具有多层薄膜的光学元件和具有该元件的曝光装置

    公开(公告)号：US06574039B1

    公开(公告)日：2003-06-03

    申请号：US09856971

    申请日：2001-05-30

    申请人： Tsuyoshi Murata ,  Hitoshi Ishizawa

    发明人： Tsuyoshi Murata ,  Hitoshi Ishizawa

    IPC分类号： G02B508

    CPC分类号： G02B1/115 ,  B82Y10/00 ,  G02B1/10 ,  G02B5/283 ,  G03F7/70958 ,  G03F7/70983 ,  G21K1/062 ,  G21K2201/067

    摘要： An optical element (1) of the present invention is provided with an optical substrate (10) and a multilayered optical thin film (11-16) formed on the optical substrate (10). An MgF2 layer (12, 16) of the multilayered optical thin film has a refractive index of 1.10 to 1.35, especially 1.15 to 1.25 with respect to a vacuum ultraviolet light beam having a wavelength of not more than 250 nm. Therefore, when the optical element (1) is used together with an excimer laser light beam having a wavelength of, for example, 248 nm (KrF), 193 nm (ArF), or 157 nm (F2), excellent optical characteristics are exhibited concerning, for example, the reflectance (anti-reflection), the polarization characteristics, and the dependency on the angle of incidence. The MgF2 layer (12, 16) can be produced in accordance with the sol-gel method. The optical element is preferably used for a projection lens of an exposure apparatus which uses the excimer laser light beam as a light source.

    摘要翻译： 本发明的光学元件（1）设置有形成在光学基板（10）上的光学基板（10）和多层光学薄膜（11-16）。 多层光学薄膜的MgF 2层（12,16）相对于波长不大于250nm的真空紫外光束的折射率为1.10〜1.35，特别是1.15〜1.25。 因此，当光学元件（1）与具有例如248nm（KrF），193nm（ArF）或157nm（F2）的波长的准分子激光束一起使用时，表现出优异的光学特性 涉及例如反射（抗反射），偏振特性以及对入射角的依赖性。 MgF2层（12,16）可以根据溶胶 - 凝胶法制备。 光学元件优选用于使用准分子激光束作为光源的曝光装置的投影透镜。

    Mixing faucet assembly
    3.
    发明授权
    Mixing faucet assembly 有权
    水龙头组合

    公开(公告)号：US07556061B2

    公开(公告)日：2009-07-07

    申请号：US11564106

    申请日：2006-11-28

    申请人： Kazunori Morita ,  Tsuyoshi Murata

    发明人： Kazunori Morita ,  Tsuyoshi Murata

    IPC分类号： F16K11/06

    CPC分类号： F16K11/0782 ,  E03C1/04 ,  Y10T137/86549 ,  Y10T137/86815

    摘要： Disclosed is a mixing faucet assembly (1), which comprises: a mixing valve unit (8) having at least two valve inlet ports (32b), a operating rod (24) and a valve outlet port (28); a faucet body (2) having at least two water-feed passages (2b), and a valve unit-receiving recess (2a) containing the mixing valve unit in such a manner as to receive mixture of hot and cold water discharged from the valve outlet port; a spout portion (6) formed to extend from an upper end of the faucet body in an approximately horizontal direction and have a spout-portion water passage (6a) for receiving the mixture discharged from the valve unit-receiving recess, and a spout port (4); and a load-supporting portion (2d) formed to protrude inwardly toward the inside of the valve unit-receiving recess in such a manner as to come into contact with an upper region of a lateral surface of the mixing valve unit on at least one side corresponding to a location of the spout portion to support the mixing valve unit. The present invention allows the mixing faucet assembly to be reduced in overall height dimension.

    摘要翻译： 公开了一种混合龙头组件（1），其包括：混合阀单元（8），其具有至少两个阀入口（32b），操作杆（24）和阀出口（28）; 具有至少两个供水通道（2b）的水龙头本体（2）和容纳所述混合阀单元的阀单元容纳凹部（2a），以接收从所述阀排出的热水和冷水的混合物 出口口 形成为从水龙头本体的上端沿大致水平方向延伸的出口部分（6），并且具有用于接收从阀单元容纳凹部排出的混合物的喷口部水通道（6a），以及吐出口 （4）; 以及负载支撑部（2d），其形成为朝向所述阀单元容纳凹部的内侧向内突出，以便在至少一个侧面与所述混合阀单元的侧表面的上部区域接触 对应于喷嘴部分的位置以支撑混合阀单元。 本发明允许混合龙头组件的整体高度尺寸减小。

    Anti-reflection coating, and optical element and optical system with anti-reflection coating
    4.
    发明授权
    Anti-reflection coating, and optical element and optical system with anti-reflection coating 有权
    防反射涂层，光学元件和防反射涂层光学系统

    公开(公告)号：US07256948B2

    公开(公告)日：2007-08-14

    申请号：US11091410

    申请日：2005-03-29

    申请人： Issei Tanaka ,  Tsuyoshi Murata

    发明人： Issei Tanaka ,  Tsuyoshi Murata

    IPC分类号： G02B1/10

    CPC分类号： G02B1/115 ,  G02B1/116 ,  G02B27/0018

    摘要： An anti-reflection coating is formed on an optical surface of an optical member for reducing the amount of light rays reflected from the optical surface. For light rays in a wavelength range from 400 nm to 700 nm, the anti-reflection coating has a reflectance of 0.5% or less if the light rays are incident on the optical surface at angles within a range from 0 to 25 degrees, and it has a reflectance of 3.5% or less if the light rays are incident at angles within a range from above 25 degrees to 60 degrees.

    摘要翻译： 在光学构件的光学表面上形成防反射涂层，以减少从光学表面反射的光线的量。 对于400nm〜700nm波长范围的光线，如果光线以0〜25度的角度入射到光学面上，则防反射膜的反射率为0.5％以下， 如果光线以从25度到60度的范围内的角度入射，则反射率为3.5％以下。

    Device for cleaning adhering material off of sand
    7.
    发明授权
    Device for cleaning adhering material off of sand 失效
    用于清洁沙子附着物的装置

    公开(公告)号：US5507715A

    公开(公告)日：1996-04-16

    申请号：US310492

    申请日：1994-09-22

    申请人： Osamu Masuno ,  Iwao Tomita ,  Kazuharu Matsui ,  Akio Isono ,  Takehiko Matsumoto ,  Tsuyoshi Murata ,  Yukinori Aoki

    发明人： Osamu Masuno ,  Iwao Tomita ,  Kazuharu Matsui ,  Akio Isono ,  Takehiko Matsumoto ,  Tsuyoshi Murata ,  Yukinori Aoki

    IPC分类号： B02C15/04 ,  B02C15/06 ,  B22C5/04 ,  B04B13/00

    CPC分类号： B02C15/045 ,  B02C15/06 ,  B22C5/0409 ,  B22C5/0413 ,  B22C5/0454 ,  B22C5/049

    摘要： A device for removing foreign material from sand is disclosed. The device includes a rotary box which is driven such that sand is centrifuged therein. The box includes a circular bottom plate, a circumferential and inclined wall extending from the circular end of the bottom place, upwardly and outwardly, and ring portion which extends inwardly from the top of the inclined wall. A plurality of rollers are disposed in the box, each roller having a movable surface substantially parallel to and spaced apart from the circumferential and inclined wall of the box. Sand in the rotary box is centrifuged and circumferentially deposited on the inclined wall to form a sand layer which becomes progressively thicker and then contact the movable surface, subjecting the sand to shearing and compressive forces. Processed sand then overflows from the ring portion of the rotary box.

    摘要翻译： 公开了一种用于从沙子中除去异物的装置。 该装置包括一个被驱动使得沙子在其中离心的旋转箱。 该箱包括圆形底板，从底部的圆形端部向上和向外延伸的周向和倾斜壁以及从倾斜壁的顶部向内延伸的环形部分。 多个辊子设置在盒子中，每个辊子具有基本上平行于并且与盒子的周向和倾斜壁隔开的可移动表面。 旋转箱中的沙子被离心并沿周向沉积在倾斜壁上以形成逐渐变厚的砂层，然后接触活动表面，使砂受到剪切和压缩力。 然后，处理后的砂从旋转箱的环部溢出。

    MIXING FAUCET ASSEMBLY
    9.
    发明申请
    MIXING FAUCET ASSEMBLY 有权
    混合龙头总成

    公开(公告)号：US20070119507A1

    公开(公告)日：2007-05-31

    申请号：US11564106

    申请日：2006-11-28

    申请人： Kazunori Morita ,  Tsuyoshi Murata

    发明人： Kazunori Morita ,  Tsuyoshi Murata

    IPC分类号： F16K11/078

    CPC分类号： F16K11/0782 ,  E03C1/04 ,  Y10T137/86549 ,  Y10T137/86815

    摘要： Disclosed is a mixing faucet assembly (1), which comprises: a mixing valve unit (8) having at least two valve inlet ports (32b), a operating rod (24) and a valve outlet port (28); a faucet body (2) having at least two water-feed passages (2b), and a valve unit-receiving recess (2a) containing the mixing valve unit in such a manner as to receive mixture of hot and cold water discharged from the valve outlet port; a spout portion (6) formed to extend from an upper end of the faucet body in an approximately horizontal direction and have a spout-portion water passage (6a) for receiving the mixture discharged from the valve unit-receiving recess, and a spout port (4); and a load-supporting portion (2d) formed to protrude inwardly toward the inside of the valve unit-receiving recess in such a manner as to come into contact with an upper region of a lateral surface of the mixing valve unit on at least one side corresponding to a location of the spout portion to support the mixing valve unit. The present invention allows the mixing faucet assembly to be reduced in overall height dimension.

    摘要翻译： 公开了一种混合龙头组件（1），其包括：混合阀单元（8），其具有至少两个阀入口（32b），操作杆（24）和阀出口（28）; 具有至少两个给水通道（2b）的水龙头体（2）和容纳所述混合阀单元的阀单元容纳凹部（2a），以便接收从 阀出口; 形成为从水龙头本体的上端沿大致水平方向延伸的出口部分（6），并且具有用于接收从阀单元容纳凹部排出的混合物的喷口部水通道（6a） 港（4）; 以及负载支撑部（2d），其形成为朝向所述阀单元容纳凹部的内部向内突出，以便在所述混合阀单元的侧表面的上部区域中至少一个 一侧对应于喷口部分的位置以支撑混合阀单元。 本发明允许混合龙头组件的整体高度尺寸减小。

    Method for forming optical thin film and optical element provided with optical thin film
    10.
    发明授权
    Method for forming optical thin film and optical element provided with optical thin film 有权
    形成光学薄膜的方法和配有光学薄膜的光学元件

    公开(公告)号：US06870602B2

    公开(公告)日：2005-03-22

    申请号：US10208874

    申请日：2002-08-01

    申请人： Hitoshi Ishizawa ,  Tsuyoshi Murata

    发明人： Hitoshi Ishizawa ,  Tsuyoshi Murata

    IPC分类号： G02B1/11 ,  C03C17/00 ,  C03C17/34 ,  G02B1/111 ,  G03F7/20 ,  G03B27/54 ,  B28B1/38

    CPC分类号： G02B1/115 ,  C03C17/007 ,  C03C17/3411 ,  C03C2217/213 ,  C03C2217/285 ,  C03C2217/425 ,  C03C2218/113 ,  C03C2218/365 ,  G02B1/10 ,  G03F7/70958

    摘要： A method for forming an optical thin film on a substrate comprises the steps of preparing a sol solution containing minute particles for an optical element dispersed in a dispersion medium, putting the prepared sol solution in a tightly closable vessel to heat and pressurize the sol solution, and then applying the heated and pressurized sol solution onto an optical substrate. The obtained thin film has a refractive index of 1.16 with respect to a light beam having a wavelength of 193 nm, in which the transmission loss is not more than 0.5%. An optical lens including the optical thin film formed on the surface, and an exposure apparatus including the lens provided for a projection optical system or an illumination system are provided.

    摘要翻译： 在基板上形成光学薄膜的方法包括以下步骤：制备包含分散在分散介质中的光学元件的微小颗粒的溶胶溶液，将制备的溶胶溶液置于紧密封闭的容器中，以加热和加压溶胶溶液， 然后将加热和加压的溶胶溶液施加到光学基底上。 所获得的薄膜相对于波长为193nm的光束的折射率为1.16，其中透射损失不大于0.5％。 提供了包括形成在表面上的光学薄膜的光学透镜，以及包括用于投影光学系统或照明系统的透镜的曝光装置。