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    GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
    2.
    发明申请
    GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE 有权
    具有夹紧单片水平电极定位特征的垫圈

    公开(公告)号：US20100261354A1

    公开(公告)日：2010-10-14

    申请号：US12421845

    申请日：2009-04-10

    Applicant: GREGORY R. BETTENCOURT ,  Gautam Bhattacharyya ,  Simon Gosselin Eng ,  Sandy Chao

    Inventor： GREGORY R. BETTENCOURT ,  Gautam Bhattacharyya ,  Simon Gosselin Eng ,  Sandy Chao

    IPC: H01L21/3065 ,  C23C16/44 ,  H01L21/306 ,  B23P6/00

    CPC classification number: H01L21/67069 ,  H01J37/16 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/32605 ,  H01J2237/166

    Abstract: An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A thermally and electrically conductive gasket with projections thereon is compressed between the showerhead electrode and the backing plate at a location three to four inches from the center of the showerhead electrode. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.

    Abstract translation: 用于等离子体反应室的电极组件，用于半导体衬底处理。 该组件包括上部喷头电极，其通过一系列间隔开的凸轮锁定机械地附接到背板。 在其上具有突起的导电和导电垫片在喷头电极和背板之间在距离喷头电极的中心三至四英寸的位置处被压缩。 保护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从电极的上表面延伸的锁定销。

    GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
    3.
    发明申请
    GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE 有权
    具有夹紧单片水平电极定位特征的垫圈

    公开(公告)号：US20130034967A1

    公开(公告)日：2013-02-07

    申请号：US13591039

    申请日：2012-08-21

    Applicant: Gregory R. Bettencourt ,  Gautam Bhattacharyya ,  Simon Gosselin Eng. ,  Sandy Chao

    Inventor： Gregory R. Bettencourt ,  Gautam Bhattacharyya ,  Simon Gosselin Eng. ,  Sandy Chao

    IPC: H01L21/3065 ,  B23P6/00

    CPC classification number: H01L21/67069 ,  H01J37/16 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/32605 ,  H01J2237/166

    Abstract: An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A thermally and electrically conductive gasket with projections thereon is compressed between the showerhead electrode and the backing plate at a location three to four inches from the center of the showerhead electrode. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.

    Abstract translation: 用于等离子体反应室的电极组件，用于半导体衬底处理。 该组件包括上部喷头电极，其通过一系列间隔开的凸轮锁定机械地附接到背板。 在其上具有突起的导电和导电垫片在喷头电极和背板之间在距离喷头电极的中心三至四英寸的位置处被压缩。 保护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从电极的上表面延伸的锁定销。

    Gasket with positioning feature for clamped monolithic showerhead electrode
    4.
    发明授权
    Gasket with positioning feature for clamped monolithic showerhead electrode 有权
    垫片具有夹紧单片喷头电极的定位功能

    公开(公告)号：US08272346B2

    公开(公告)日：2012-09-25

    申请号：US12421845

    申请日：2009-04-10

    Applicant: Gregory R. Bettencourt ,  Gautam Bhattacharyya ,  Simon Gosselin Eng ,  Sandy Chao

    Inventor： Gregory R. Bettencourt ,  Gautam Bhattacharyya ,  Simon Gosselin Eng ,  Sandy Chao

    IPC: C23C16/50 ,  C23C16/503 ,  C23C16/509 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

    CPC classification number: H01L21/67069 ,  H01J37/16 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/32605 ,  H01J2237/166

    Abstract: An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A thermally and electrically conductive gasket with projections thereon is compressed between the showerhead electrode and the backing plate at a location three to four inches from the center of the showerhead electrode. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.

    Abstract translation: 用于等离子体反应室的电极组件，用于半导体衬底处理。 该组件包括上部喷头电极，其通过一系列间隔开的凸轮锁定机械地附接到背板。 在其上具有突起的导电和导电垫片在喷头电极和背板之间在距离喷头电极的中心三至四英寸的位置处被压缩。 保护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从电极的上表面延伸的锁定销。

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