Apparatus for inspecting collimator
    1.
    发明授权
    Apparatus for inspecting collimator 失效
    用于检查准直仪的装置

    公开(公告)号:US06741339B2

    公开(公告)日:2004-05-25

    申请号:US10197820

    申请日:2002-07-19

    IPC分类号: G01B900

    CPC分类号: G01M11/00 G02B27/30

    摘要: An apparatus for inspecting a collimator including a pigtail formed with first and second fibers, a GRIN lens disposed coaxially relative to the pigtail, and a glass tube supporting the pigtail and the GRIN lens in a single unit, to inspect optical properties of the collimator, comprising an inspection table; a gripping part, which is provided on the inspection table, gripping the collimator subject to inspection; a light supplying part transmitting a predetermined optical signal to the first fiber; a light receiving part, which is connected to the second fiber, receiving an optical signal returned from the second fiber, entering the first fiber; a measuring part calculating a value of the predetermined optical signal, which entered the first fiber, and a value of the optical signal, which returned from the second fiber; and an image displaying part displaying the value obtained from the measuring part. With this configuration, the collimator can be inspected in part, thereby increasing the product reliability of the collimator.

    摘要翻译: 一种用于检查包括由第一和第二光纤形成的引出线的准直器的设备,相对于尾纤同轴设置的GRIN透镜以及在单个单元中支撑引线和GRIN透镜的玻璃管,以检查准直器的光学特性, 包括检查表; 夹持部,其设置在检查台上,夹持待检查的准直仪; 向所述第一光纤发送预定的光信号的光供给部; 光接收部分,连接到第二光纤,接收从第二光纤返回的光信号,进入第一光纤; 计算进入第一光纤的预定光信号的值的测量部分以及从第二光纤返回的光信号的值; 以及显示从测量部获得的值的图像显示部。 通过这种结构,可以部分检查准直器,从而提高准直仪的产品可靠性。

    Apparatus for inspecting collimator
    2.
    发明授权
    Apparatus for inspecting collimator 失效
    用于检查准直仪的装置

    公开(公告)号:US06646730B2

    公开(公告)日:2003-11-11

    申请号:US10217480

    申请日:2002-08-14

    IPC分类号: G01B900

    CPC分类号: G01M11/00 G02B27/30

    摘要: An apparatus for inspecting a collimator including a pigtail to which a fiber is connected to transmit an optical signal, a GRIN lens coaxially arranged with the pigtail, a glass tube accommodating and supporting the pigtail and the GRIN lens, and a metal sleeve protecting the glass tube, comprising an inspection table; a grip part provided on the inspection table, and gripping the collimator to be inspected; a first camera provided over the grip part having an axis perpendicular to a length of the collimator, and photographing the collimator along the length of the collimator; a second camera arranged coaxially with the collimator on the inspection table, and photographing the collimator perpendicular to an axis of the collimator; and a displaying part connected to the first and second camera, and displaying pictures transmitted from the first and second cameras. With this configuration, an apparatus for inspecting a collimator, which can effectively inspect the collimator, is provided, thereby increasing the reliability of the collimator.

    摘要翻译: 一种用于检查包括连接光纤的引出线的准直器以发射光信号的装置,与该引出线同轴布置的GRIN透镜,容纳并支撑引出线和GRIN透镜的玻璃管以及保护玻璃的金属套筒 管,包括检查台; 夹持部,设置在检查台上,夹持待检查的准直仪; 设置在握持部分上方的第一相机具有垂直于准直仪的长度的轴线,并沿准直仪的长度拍摄准直仪; 与检查台上的准直仪同轴地布置的第二相机,并且垂直于准直仪的轴线拍摄准直仪; 以及连接到第一和第二相机的显示部分,并显示从第一和第二相机发送的图像。 利用这种结构,提供了一种用于检查可以有效地检查准直仪的准直仪的装置,从而提高了准直仪的可靠性。

    Gas supplying apparatus
    4.
    发明授权
    Gas supplying apparatus 失效
    供气装置

    公开(公告)号:US07303141B2

    公开(公告)日:2007-12-04

    申请号:US10801852

    申请日:2004-03-17

    IPC分类号: B05B17/00

    CPC分类号: C23C16/4558

    摘要: A gas supplying apparatus for supplying deposition gas onto a substrate surface, the gas supplying apparatus comprising: a gas supplying ring with one or more gas supplying channels formed along the interior of the gas supplying ring and with a plurality of gas distribution channels directed toward a center of the gas supplying ring; and a plurality of adapters with gas nozzles connecting to the gas distribution channels, respectively, that detachably connect to the interior of the gas supplying ring, wherein the gas nozzles have a variety of injection configurations.

    摘要翻译: 一种用于将沉积气体供应到基板表面上的气体供应装置,所述气体供应装置包括:气体供给环,其具有沿着所述气体供应环的内部形成的一个或多个气体供应通道,以及多个朝向 供气环中心; 以及分别具有连接到气体分配通道的气体喷嘴的多个适配器,其可拆卸地连接到气体供应环的内部,其中气体喷嘴具有各种喷射构型。

    Reaction apparatus
    6.
    发明授权
    Reaction apparatus 有权
    反应装置

    公开(公告)号:US07101442B2

    公开(公告)日:2006-09-05

    申请号:US10802926

    申请日:2004-03-18

    摘要: A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.

    摘要翻译: 一种反应装置,包括:主体,具有其上开口的反应室,盖铰链和与盖铰链组合的盖,可旋转地打开和关闭上开口; 提升构件,其具有与所述盖的旋转轴线分离并与所述盖可旋转地组合的第一端部,以及可旋转地组合到所述主体的第二端部,其沿打开和关闭方向移动; 以及激活升降构件的驾驶员。 采用这种结构,本发明提供了一种反应装置,其具有容易打开和关闭的盖,并且其中盖平行地接触密封构件,从而容易地在反应室中产生真空。

    Apparatus for manufacturing collimator

    公开(公告)号:US07007733B2

    公开(公告)日:2006-03-07

    申请号:US10176581

    申请日:2002-06-24

    IPC分类号: B32B31/00 G02B6/36 B25B27/14

    摘要: An apparatus for manufacturing a collimator by attaching a glass tube assembly, which includes a pigtail having a fiber, and a GRIN lens, which is coaxially arranged with the pigtail, into a metal sleeve having a tube shape. The apparatus includes a supporting part, a sleeve grip part connected to the supporting part and having at least one holder for disposing the metal sleeve therein, a fiber chucking part provided above the sleeve grip part and chucking the fiber, and a lift unit lifting and lowering the fiber chucking part to control the glass tube assembly inserted in the metal sleeve to move up and down along a longitudinal direction of the metal sleeve. With this configuration, the glass tube assembly is conveniently fixedly fitted into the metal sleeve.