Method for suppressing metal contamination in high temperature treatment of materials
    10.
    发明申请
    Method for suppressing metal contamination in high temperature treatment of materials 有权
    抑制材料高温处理中金属污染的方法

    公开(公告)号:US20070056662A1

    公开(公告)日:2007-03-15

    申请号:US11357645

    申请日:2006-02-17

    CPC classification number: C03C21/00 C03C3/06

    Abstract: Disclosed is a method for treating glass and crystalline inorganic materials whereby metal contamination during such process is inhibited. Such process includes treating the material in the presence of a purifying atmosphere comprising a cleansing gas. The process is especially advantageous for treating high purity fused silica glass for use in advanced lithographic devices.

    Abstract translation: 公开了一种处理玻璃和结晶无机材料的方法,由此抑制了在此过程中的金属污染。 这种方法包括在包含清洁气体的净化气氛的存在下处理该材料。 该方法特别有利于处理用于先进光刻设备的高纯度熔融石英玻璃。

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