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    Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source
    1.
    发明授权
    Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source 有权
    用于具有共享RF源的多工位处理工具中的站的RF功率平衡的闭环控制系统

    公开(公告)号：US08282983B1

    公开(公告)日：2012-10-09

    申请号：US12241758

    申请日：2008-09-30

    申请人： Sunil Kapoor ,  Edward Augustyniak

    发明人： Sunil Kapoor ,  Edward Augustyniak

    IPC分类号： C23C16/52

    CPC分类号： H01J37/32174 ,  H01J37/32899

    摘要： Apparatus and methods to minimize wafer-to-wafer process variation in RF-based semiconductor processing reactors with shared RF source for multiple processing areas. RF sensors associated with each processing area sends signal to the RF balance controller. The controller modifies station impedance using power adjustment mechanisms. As a result, station to station distribution of a selected RF parameter (e.g., load power) may match the station set points. Closed loop control maintains balance despite changing conditions.

    摘要翻译： 在具有用于多个处理区域的共享RF源的基于RF的半导体处理反应器中最小化晶片到晶片工艺变化的装置和方法。 与每个处理区域相关联的RF传感器向RF平衡控制器发送信号。 控制器使用功率调节机构修改电台阻抗。 因此，所选择的RF参数（例如，负载功率）的站到站分配可以匹配站设定点。 尽管条件变化，闭环控制保持平衡。

    Variable-Density Plasma Processing of Semiconductor Substrates
    2.
    发明申请
    Variable-Density Plasma Processing of Semiconductor Substrates 审中-公开
    半导体基板的可变密度等离子体处理

    公开(公告)号：US20120164834A1

    公开(公告)日：2012-06-28

    申请号：US12976391

    申请日：2010-12-22

    申请人： Kevin Jennings ,  Mohamed Sabri ,  Edward Augustyniak ,  Sunil Kapoor ,  Douglas Keil

    发明人： Kevin Jennings ,  Mohamed Sabri ,  Edward Augustyniak ,  Sunil Kapoor ,  Douglas Keil

    IPC分类号： H01L21/311 ,  C23F1/08 ,  C23C16/50 ,  C23C16/52 ,  C23C16/455 ,  C23C16/458

    CPC分类号： H01L21/68792 ,  H01J37/32082 ,  H01J37/32532 ,  H01J37/32541 ,  H01J37/32568 ,  H01L21/67201

    摘要： Methods and hardware for generating variable-density plasmas are described. For example, in one embodiment, a process station comprises a showerhead including a showerhead electrode and a substrate holder including a mesa configured to support a substrate, wherein the substrate holder is disposed beneath the showerhead. The substrate holder includes an inner electrode disposed in an inner region of the substrate holder and an outer electrode being disposed in an outer region of the substrate holder. The process station further comprises a plasma generator configured to generate a plasma in a plasma region disposed between the showerhead and the substrate holder, and a controller configured to control the plasma generator, the inner electrode, the outer electrode, and the showerhead electrode to effect a greater plasma density in an outer portion of the plasma region than in an inner portion of the plasma region.

    摘要翻译： 描述了生成可变密度等离子体的方法和硬件。 例如，在一个实施例中，处理站包括喷头，其包括喷头电极和衬底保持器，所述衬垫保持器包括构造成支撑衬底的台面，其中衬底保持器设置在喷头下方。 衬底保持器包括设置在衬底保持器的内部区域中的内部电极和设置在衬底保持器的外部区域中的外部电极。 处理站还包括等离子体发生器，其被配置为在布置在喷头和衬底保持器之间的等离子体区域中产生等离子体，以及控制器，被配置为控制等离子体发生器，内部电极，外部电极和喷头电极，以实现 在等离子体区域的外部部分中比在等离子体区域的内部部分中的等离子体密度更大。

    Systems and methods for receiver upgrade
    4.
    发明授权
    Systems and methods for receiver upgrade 有权
    接收机升级的系统和方法

    公开(公告)号：US07395091B2

    公开(公告)日：2008-07-01

    申请号：US10946309

    申请日：2004-09-22

    申请人： Sunil Kapoor ,  Ashok Burton Tripathi ,  Gregory Lynton Hey-Shipton ,  Gena Marie Yates ,  Edward Robert Soares

    发明人： Sunil Kapoor ,  Ashok Burton Tripathi ,  Gregory Lynton Hey-Shipton ,  Gena Marie Yates ,  Edward Robert Soares

    IPC分类号： H04M1/00 ,  H04B1/38

    CPC分类号： H04B1/38

    摘要： Systems and methods for an upgradeable and/or reconfigurable receiver are provided. In general, the present invention is directed to providing systems and methods for designing an electronic communication system having easy and cost effective upgradeable receiver systems and components including, for example, an amplifier and/or a filter. For example, a receiver may include a receiver front end that is configured so that at least one of the original conventional system components may be used along with one or more new system components to provide greater receiver sensitivity and/or selectivity. In various embodiments, portions of an upgradeable receiver system may be made as modular components that allow easy replacement for the upgradeable components which may include a signal amplifier and/or a signal filter. In various embodiments the receiver may be upgraded by replacing a conventional low noise amplifier (LNA) with a high temperature superconductor (HTS) filter and/or a cryo-cooled LNA.

    摘要翻译： 提供了用于可升级和/或可重新配置的接收机的系统和方法。 通常，本发明旨在提供用于设计具有容易且成本有效的可升级的接收机系统和组件的电子通信系统的系统和方法，包括例如放大器和/或滤波器。 例如，接收机可以包括接收机前端，其被配置为使得可以将原始常规系统组件中的至少一个与一个或多个新系统组件一起使用以提供更大的接收机灵敏度和/或选择性。 在各种实施例中，可升级的接收机系统的部分可以被制成为允许容易地替换可升级部件的模块化部件，其可以包括信号放大器和/或信号滤波器。 在各种实施例中，可以通过用高温超导体（HTS）滤波器和/或低温冷却LNA代替传统的低噪声放大器（LNA）来升级接收器。

    Systems and methods for receiver upgrade
    6.
    发明申请
    Systems and methods for receiver upgrade 有权
    接收机升级的系统和方法

    公开(公告)号：US20050208912A1

    公开(公告)日：2005-09-22

    申请号：US10946309

    申请日：2004-09-22

    申请人： Sunil Kapoor ,  Ashok Tripathi ,  Gregory Hey-Shipton ,  Gena Yates ,  Edward Soares

    发明人： Sunil Kapoor ,  Ashok Tripathi ,  Gregory Hey-Shipton ,  Gena Yates ,  Edward Soares

    IPC分类号： H04B1/00 ,  H04B1/16 ,  H04B1/38 ,  H04M1/00

    CPC分类号： H04B1/38

    摘要： Systems and methods for an upgradeable and/or reconfigurable receiver are provided. In general, the present invention is directed to providing systems and methods for designing an electronic communication system having easy and cost effective upgradeable receiver systems and components including, for example, an amplifier and/or a filter. For example, a receiver may include a receiver front end that is configured so that at least one of the original conventional system components may be used along with one or more new system components to provide greater receiver sensitivity and/or selectivity. In various embodiments, portions of an upgradeable receiver system may be made as modular components that allow easy replacement for the upgradeable components which may include a signal amplifier and/or a signal filter. In various embodiments the receiver may be upgraded by replacing a conventional low noise amplifier (LNA) with a high temperature superconductor (HTS) filter and/or a cryo-cooled LNA.

    摘要翻译： 提供了用于可升级和/或可重新配置的接收机的系统和方法。 通常，本发明旨在提供用于设计具有容易且成本有效的可升级的接收机系统和组件的电子通信系统的系统和方法，包括例如放大器和/或滤波器。 例如，接收机可以包括接收机前端，其被配置为使得可以将原始常规系统组件中的至少一个与一个或多个新系统组件一起使用以提供更大的接收机灵敏度和/或选择性。 在各种实施例中，可升级的接收机系统的部分可以被制成为允许容易地替换可升级部件的模块化部件，其可以包括信号放大器和/或信号滤波器。 在各种实施例中，可以通过用高温超导体（HTS）滤波器和/或低温冷却LNA代替传统的低噪声放大器（LNA）来升级接收器。

    Easier to Wear Shoes and Associated Methods
    7.
    发明申请
    Easier to Wear Shoes and Associated Methods 审中-公开

    公开(公告)号：US20200260817A1

    公开(公告)日：2020-08-20

    申请号：US16280248

    申请日：2019-02-20

    申请人： SUNIL KAPOOR

    发明人： SUNIL KAPOOR

    IPC分类号： A43B11/00 ,  A43B3/10 ,  A43B23/26 ,  A43C11/12 ,  A43C11/14

    摘要： A shoe that contains two zippers or two series of hook and loop strips as well as two tongues is disclosed. The zippers or two series of hook and loop strips are positioned in the location where one would typically see the eyelets from shoes located. The two tongues are present both for comfort and for aesthetics.

    Systems and Methods for Receiver Upgrade
    8.
    发明申请
    Systems and Methods for Receiver Upgrade 审中-公开
    接收机升级的系统和方法

    公开(公告)号：US20080279120A1

    公开(公告)日：2008-11-13

    申请号：US12136755

    申请日：2008-06-10

    申请人： Sunil Kapoor ,  Ashok Burton Tripathi ,  Gregory Lynton Hey-Shipton ,  Gena Marie Yates ,  Edward Robert Soares

    发明人： Sunil Kapoor ,  Ashok Burton Tripathi ,  Gregory Lynton Hey-Shipton ,  Gena Marie Yates ,  Edward Robert Soares

    IPC分类号： H04L5/14 ,  H04B1/16

    CPC分类号： H04B1/38

    摘要： Systems and methods for an upgradeable and/or reconfigurable receiver are provided. In general, the present invention is directed to providing systems and methods for designing an electronic communication system having easy and cost effective upgradeable receiver systems and components including, for example, an amplifier and/or a filter. For example, a receiver may include a receiver front end that is configured so that at least one of the original conventional system components may be used along with one or more new system components to provide greater receiver sensitivity and/or selectivity. In various embodiments, portions of an upgradeable receiver system may be made as modular components that allow easy replacement for the upgradeable components which may include a signal amplifier and/or a signal filter. In various embodiments the receiver may be upgraded by replacing a conventional low noise amplifier (LNA) with a high temperature superconductor (HTS) filter and/or a cryo-cooled LNA.

    摘要翻译： 提供了用于可升级和/或可重新配置的接收机的系统和方法。 通常，本发明旨在提供用于设计具有容易且成本有效的可升级的接收机系统和组件的电子通信系统的系统和方法，包括例如放大器和/或滤波器。 例如，接收机可以包括接收机前端，其被配置为使得可以将原始常规系统组件中的至少一个与一个或多个新系统组件一起使用以提供更大的接收机灵敏度和/或选择性。 在各种实施例中，可升级的接收机系统的部分可以被制成为允许容易地替换可升级部件的模块化部件，其可以包括信号放大器和/或信号滤波器。 在各种实施例中，可以通过用高温超导体（HTS）滤波器和/或低温冷却LNA代替传统的低噪声放大器（LNA）来升级接收器。