公开(公告)号：US20110289744A1

公开(公告)日：2011-12-01

申请号：US13115442

申请日：2011-05-25

申请人： Takao Ohnishi ,  Hideki Shimizu ,  Takashi Ebigase

发明人： Takao Ohnishi ,  Hideki Shimizu ,  Takashi Ebigase

IPC分类号： H01L41/22

CPC分类号： H01L41/33 ,  C04B35/493 ,  C04B2235/3206 ,  C04B2235/3255 ,  C04B2235/3279 ,  C04B2235/6025 ,  C04B2235/768 ,  H01L41/29 ,  H01L41/43 ,  Y10T29/42

摘要： There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.

摘要翻译： 公开了一种制造压电元件的方法，包括以下步骤：通过使用压电材料制备包括成为烧结压电体的部分的生片A. 在生坯片A的至少一个表面上接合具有开口的生坯片B，其后面部分成为烧结压电体的部分，然后进行烧制，以获得具有加强层的烧结压电体 安装由于生坯B的烧制而形成的加强板的板; 以及在设置有加强板的烧结压电体中通过焙烧生片A而获得的部分中形成膜状电极的步骤。

公开(公告)号：US20100242242A1

公开(公告)日：2010-09-30

申请号：US12729532

申请日：2010-03-23

申请人： Hideki SHIMIZU ,  Takao Ohnishi ,  Takashi Ebigase ,  Naoki Goto

发明人： Hideki SHIMIZU ,  Takao Ohnishi ,  Takashi Ebigase ,  Naoki Goto

IPC分类号： H04R17/00

CPC分类号： H01L41/094 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.

摘要翻译： 提供一种制造压电致动器的方法，其中通过使位于两个或更多个压电体层中的一个外表面上的压电体层进行极化处理来调节压电体层的残留极化，从而调整平面形状 。 压电致动器用作压电驱动型可变电容器的驱动部分。 可变电容器长时间具有高机械强度和优异的可靠性。 压电致动器的位移量与电容器的容量之间的关系是稳定的，并且可变容量很宽。

公开(公告)号：US09240544B2

公开(公告)日：2016-01-19

申请号：US13115442

申请日：2011-05-25

申请人： Takao Ohnishi ,  Hideki Shimizu ,  Takashi Ebigase

发明人： Takao Ohnishi ,  Hideki Shimizu ,  Takashi Ebigase

IPC分类号： H04R17/00 ,  H01L41/33 ,  C04B35/493 ,  H01L41/29 ,  H01L41/43

CPC分类号： H01L41/33 ,  C04B35/493 ,  C04B2235/3206 ,  C04B2235/3255 ,  C04B2235/3279 ,  C04B2235/6025 ,  C04B2235/768 ,  H01L41/29 ,  H01L41/43 ,  Y10T29/42

摘要： A method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.

摘要翻译： 一种制造压电元件的方法，包括以下步骤：通过使用压电材料制备包括成为烧结压电体的部分的生片A. 在生坯片A的至少一个表面上接合具有开口的生坯片B，其后面部分成为烧结压电体的部分，然后进行烧制，以获得具有加强层的烧结压电体 安装由于生坯B的烧制而形成的加强板的板; 以及在设置有加强板的烧结压电体中通过焙烧生片A而获得的部分中形成膜状电极的步骤。

公开(公告)号：US08375538B2

公开(公告)日：2013-02-19

申请号：US12729532

申请日：2010-03-23

申请人： Hideki Shimizu ,  Takao Ohnishi ,  Takashi Ebigase ,  Naoki Goto

发明人： Hideki Shimizu ,  Takao Ohnishi ,  Takashi Ebigase ,  Naoki Goto

IPC分类号： H04R17/10 ,  H01L41/22

CPC分类号： H01L41/094 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.

摘要翻译： 提供一种制造压电致动器的方法，其中通过使位于两个或更多个压电体层中的一个外表面上的压电体层进行极化处理来调节压电体层的残留极化，从而调整平面形状 。 压电致动器用作压电驱动型可变电容器的驱动部分。 可变电容器长时间具有高机械强度和优异的可靠性。 压电致动器的位移量与电容器的容量之间的关系是稳定的，并且可变容量很宽。

公开(公告)号：US20090072667A1

公开(公告)日：2009-03-19

申请号：US12241455

申请日：2008-09-30

申请人： Takao Ohnishi ,  Hideki Shimizu ,  Katsuyuki Tsuneoka

发明人： Takao Ohnishi ,  Hideki Shimizu ,  Katsuyuki Tsuneoka

IPC分类号： H01L41/047

CPC分类号： H01L41/0475 ,  G01N29/022 ,  G01N29/245 ,  G01P15/0922 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive film element 10 includes a substrate 11, a lower electrode 12, a piezoelectric/electrostrictive film 15, and an upper electrode 16. The substrate 11 has a thin-walled diaphragm portion 11a, and a thick portion 11b formed around the thin-walled diaphragm portion 11a. The lower electrode 12 is formed on the substrate 11 in such a manner as to extend over the thin-walled diaphragm portion 11a and the thick portion 11b. The piezoelectric/electrostrictive film 15 is formed on the lower electrode 12. The upper electrode 16 is provided on the piezoelectric/electrostrictive film 15 in such a manner as to face the thin-walled diaphragm portion 11a. The upper electrode 16 includes an upper-electrode body portion 16a and a connection portion 16b. The upper-electrode body portion 16a has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion 11a.

摘要翻译： 压电/电致伸缩膜元件10包括基板11，下电极12，压电/电致伸缩膜15和上电极16.基板11具有薄壁隔膜部分11a和形成在其上的厚壁部分11b 薄壁隔膜部分11a。 下电极12形成在基板11上，以便在薄壁隔膜部分11a和厚部分11b上延伸。 压电/电致伸缩膜15形成在下电极12上。上电极16以与薄壁隔膜部分11a相对的方式设置在压电/电致伸缩膜15上。 上电极16包括上电极体部16a和连接部16b。 上部电极体部16a具有与薄壁隔膜部11a的平面形状大致相似的平面形状。

公开(公告)号：US07812506B2

公开(公告)日：2010-10-12

申请号：US12331694

申请日：2008-12-10

申请人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

发明人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

IPC分类号： H01L41/08

CPC分类号： G01N29/2462 ,  G01N11/16 ,  G01N29/022 ,  G01N33/0042 ,  G01N33/2835 ,  G01N2291/014 ,  G01N2291/02809 ,  G01N2291/02818 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/257 ,  H01L41/314 ,  Y10T29/42

摘要： A piezoelectric/electrostrictive membrane type sensor is provided with a ceramic base body and a piezoelectric/electrostrictive element. The ceramic base body includes a thin diaphragm portion, a thick portion and a cavity formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body and also includes a piezoelectric/electrostrictive body, and an upper electrode and a lower electrode sandwiching the piezoelectric/electrostrictive body. Further, the piezoelectric/electrostrictive body contains an alkaline metal or an alkaline earth metal, with the upper electrode and the lower electrode containing gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents the continuation of a low-quality measurement.

摘要翻译： 压电/电致伸缩膜型传感器设置有陶瓷基体和压电/电致伸缩元件。 陶瓷基体包括薄膜部分，厚部分和由这些部分形成的空腔。 压电/电致伸缩元件设置在陶瓷基体上，还包括压电/电致伸缩体，以及夹着压电/电致伸缩体的上电极和下电极。 此外，压电/电致伸缩体包含碱金属或碱土金属，上电极和下电极含有金或铂。 当在使用传感器的地方存在气氛变化时，传感器处理这种变化，并且至少防止继续进行低质量的测量。

公开(公告)号：US07755253B2

公开(公告)日：2010-07-13

申请号：US12241455

申请日：2008-09-30

申请人： Takao Ohnishi ,  Hideki Shimizu ,  Katsuyuki Tsuneoka

发明人： Takao Ohnishi ,  Hideki Shimizu ,  Katsuyuki Tsuneoka

IPC分类号： H01L41/08

CPC分类号： H01L41/0475 ,  G01N29/022 ,  G01N29/245 ,  G01P15/0922 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive film element includes a substrate, a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. The substrate has a thin-walled diaphragm portion, and a thick portion formed around the thin-walled diaphragm portion. The lower electrode is formed on the substrate in such a manner as to extend over the thin-walled diaphragm portion and the thick portion. The piezoelectric/electrostrictive film is formed on the lower electrode. The upper electrode is provided on the piezoelectric/electrostrictive film in such a manner as to face the thin-walled diaphragm portion. The upper electrode includes an upper-electrode body portion and a connection portion. The upper-electrode body portion has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion.

摘要翻译： 压电/电致伸缩膜元件包括基板，下电极，压电/电致伸缩膜和上电极。 基板具有薄壁的隔膜部分和形成在薄壁​​隔膜部分周围的厚部分。 下电极以在薄壁隔膜部分和厚部分上方延伸的方式形成在基板上。 压电/电致伸缩膜形成在下电极上。 上电极以面对薄壁隔膜部分的方式设置在压电/电致伸缩膜上。 上电极包括上电极主体部分和连接部分。 上部电极体部具有与薄壁隔膜部的平面形状大致相似的平面形状。

公开(公告)号：US07714480B2

公开(公告)日：2010-05-11

申请号：US12316745

申请日：2008-12-16

申请人： Takao Ohnishi ,  Hideki Shimizu ,  Takaaki Koizumi

发明人： Takao Ohnishi ,  Hideki Shimizu ,  Takaaki Koizumi

IPC分类号： H01L41/047 ,  H01L41/08

CPC分类号： G01N29/32 ,  G01N11/16 ,  G01N29/022 ,  G01N29/2462 ,  G01N2291/014 ,  G01N2291/02809 ,  G01N2291/02818 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/314

摘要： A piezoelectric/electrostrictive membrane sensor is provided, wherein a piezoelectric/electrostrictive body contains an alkali metal or an alkaline earth metal, and a sulfide and the main component of terminal electrodes are contained near the surface of the piezoelectric/electrostrictive body. A voltage equal to or higher than a withstand voltage is hardly applied to the piezoelectric/electrostrictive body, and consequently, the sensor is prevented from dielectric breakdown. In addition, the sensor is hardly electrostatically charged, and thus prevented from electrostatic discharge damage and attraction of dust, dirt or the like.

摘要翻译： 提供一种压电/电致伸缩膜传感器，其中压电/电致伸缩体包含碱金属或碱土金属，硫化物和端电极的主要成分被包含在压电/电致伸缩体的表面附近。 压电/电致伸缩体几乎不施加等于或高于耐电压的电压，因此防止了传感器的绝缘击穿。 此外，传感器几乎不被静电充电，因此防止了静电放电损坏和吸引灰尘，污垢等。

公开(公告)号：US07876023B2

公开(公告)日：2011-01-25

申请号：US12317785

申请日：2008-12-30

申请人： Takao Ohnishi ,  Hideki Shimizu ,  Takaaki Koizumi

发明人： Takao Ohnishi ,  Hideki Shimizu ,  Takaaki Koizumi

IPC分类号： H01L41/04 ,  H01L41/08

CPC分类号： G01N29/2462 ,  G01N11/16 ,  G01N29/245 ,  G01N29/32 ,  H01L41/0973 ,  H01L41/319

摘要： Disclosed is a piezoelectric/electrostrictive membrane sensor wherein the main component of terminal electrodes is contained in the vicinity of the surface of a piezoelectric/electrostrictive body. The membrane sensor is hardly electrostatically charged and thus prevented from electrostatic discharge damage and/or the attraction of dust, dirt or the like.

摘要翻译： 公开了一种压电/电致伸缩膜传感器，其中端子电极的主要部件包含在压电/电致伸缩体的表面附近。 膜传感器几乎不被静电充电，因此防止了静电放电损坏和/或灰尘，污垢等的吸引。

公开(公告)号：US20090095072A1

公开(公告)日：2009-04-16

申请号：US12331694

申请日：2008-12-10

申请人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

发明人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

IPC分类号： G01N9/00 ,  H01L41/04 ,  H01L41/22

CPC分类号： G01N29/2462 ,  G01N11/16 ,  G01N29/022 ,  G01N33/0042 ,  G01N33/2835 ,  G01N2291/014 ,  G01N2291/02809 ,  G01N2291/02818 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/257 ,  H01L41/314 ,  Y10T29/42

摘要： Disclosed is a piezoelectric/electrostrictive membrane type sensor 20 provided with a ceramic base body 1 and a piezoelectric/electrostrictive element 12. The ceramic base body is provided with a thin diaphragm portion 3, a thick portion 2 and a cavity 10 formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body 1 and includes a piezoelectric/electrostrictive body 5, and an upper electrode 6 and a lower electrode 4 sandwiching the piezoelectric/electrostrictive body 5. In the piezoelectric/electrostrictive membrane type sensor 20, the piezoelectric/electrostrictive body 5 contains an alkaline metal or an alkaline earth metal, and the upper electrode 6 and the lower electrode 4 contain gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents continuation of low-quality measurement.

摘要翻译： 公开了一种设置有陶瓷基体1和压电/电致伸缩元件12的压电/电致伸缩膜型传感器20.陶瓷基体设置有薄膜部分3，厚部分2和由部分形成的空腔10 。 压电/电致伸缩元件设置在陶瓷基体1上，并且包括压电/电致伸缩体5和夹持压电/电致伸缩体5的上电极6和下电极4.在压电/电致伸缩膜型传感器20中， 压电/电致伸缩体5含有碱金属或碱土金属，上电极6和下电极4含有金或铂。 当在使用传感器的地方存在气氛变化时，传感器处理这种变化，并且至少防止继续进行低质量的测量。