摘要:
According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.
摘要:
A semiconductor device controls an electrostatic actuator having first and second electrodes. A voltage generation unit generates different types of voltages applied to the first and second electrodes. A control unit controls voltages generated by the voltage generation unit to be applied to the first and second electrodes. A capacitance detection unit detects a voltage of the first or second electrode to detect a capacitance between the first and second electrodes. The control unit applies a first voltage between the first and second electrodes and then a second voltage smaller than the first voltage between the first and second electrodes. Thereafter, the control unit switches one of the first electrode or the second electrode to a high impedance state and then changes a voltage applied to the other. The capacitance detection unit detects the amount of change in voltage of the first or second electrode to detect a capacitance between the first and second electrodes.
摘要:
A powder valve is propose which is simple in structure and small in size, which can prevent powder from getting stuck in the valve, and can withstand high feed pressure. The valve includes a valve casing 21, a valve shaft 25, and a valve body 22 mounted in the valve casing 21 and supported by the valve shaft 25. The valve body 22 has a spherical outer surface 27 configured to be brought into contact with a valve seat 23 of the valve casing 21 to close the valve. The valve body 22 is formed with a communication hole 26 extending in a direction perpendicular to the valve shaft 25 so that when the valve body 22 is rotated about the valve shaft 25 in either of two opposite directions from the closed position, the valve is configured to open through the communication hole 26. The communication hole 26 is open on the back side of the valve body 22 over the entire length thereof. With this arrangement, it is possible to ensure the advantages of a ball valve, i.e. full-bore properties and high rigidity. Since the pressure of powder flowing through the communication hole 26 acts on the inner periphery of the valve casing 21, the flow of powder blows off and removes any powder which could otherwise get stuck on the inner periphery of the valve casing 21. By rotating the valve body 22 in both directions, powder can be removed on both sides of the valve shaft 25.
摘要:
A semiconductor memory device comprises a memory cell array including a plurality of word lines, a plurality of bit lines intersecting the plurality of word lines, and a plurality of binary-data holding memory cells arranged at the intersections of the word lines and the bit lines; and a control unit operative to change in the storage capacity of the memory cell array and change in the address space required for access to the memory cell based on a control signal.
摘要:
Semiconductor integrated circuit has a control circuit. The control circuit causes the clock signal generating circuit to control the first clock signal and the second clock signal to make a logic of data held by the first data holding terminal and a logic of data held by the second data holding terminal equal to each other, and switches on the switch circuit, and the error detection circuit senses a logic of the first data holding terminal and a logic of the second data holding terminal after switching on the switching circuit.
摘要:
A semiconductor integrated circuit includes a first circuit block which operates at a first internal voltage, a second circuit block which operates at a second internal voltage, is connected to an output stage of the first circuit block, and receives a signal from the first circuit block, and a voltage controller which supplies the first internal voltage to the first circuit block by using a first high-potential power, supplies the second internal voltage to the second circuit block by using a second high-potential power, and performs control such that the second internal voltage does not exceed the first internal voltage.
摘要:
A method of correcting the aberration of an electron beam due to astigmatism and field curvature of focus by feeding a correction current through stigmator coils and a focus correction coil. The correction currents are determined by measuring a sharpness P of the electron beam. The sharpness P is defined as a product of p.sub.x, a sharpness measured when the electron beam is deflected in X direction, and p.sub.y, a sharpness measured when the electron beam is deflected in Y direction: P=p.sub.x .times.p.sub.y. The use of the sharpness P provides good convergence of the measurements and it becomes possible to calibrate the electron beam for many points in the scanning field. Thus, it is possible to attain maximum resolution over an entire scanning field. Optimum correction currents are determined from data obtained by varying each correction current while keeping the other correction currents constant to obtain several values of P and then using a least square approximation of the measured values of P with a quadrature curve.
摘要:
A semiconductor device includes a first static actuator having a first drive electrode and a second drive electrode, the first drive electrode and the second drive electrode being capable of coming close to each other upon shifting from an open state to a close state due to an electrostatic attractive force against an elastic force thereof; a detection circuit configured to detect a temperature of the first static actuator; and a drive circuit configured to apply a first voltage between the first drive electrode and the second drive electrode to maintain the first static actuator in the closed state between the first drive electrode and the second drive electrode, and to switch a polarity of the first voltage every first time period. The drive circuit varies a length of the first time period based on a detection result of the detection circuit.
摘要:
A housing for an electronic device unit includes a first case and a second case that are formed in a shape of a box with one of respective surfaces thereof being opened and are formed to be a box body. The housing includes an insulating plate that extends from the opening part of the first case to a side of the second case and overlaps with a wall surface of the second case. An engaging convex part is formed on a surface where the insulating plate is overlapped and an engaging hole that engages with the engaging convex part to regulate separation of the first case and the second case is formed. The insulating plate is in a shape in which an edge of the insulating plate spreads with a predetermined width from an opening edge where the first case and the second case are butted and the engaging hole.
摘要:
A semiconductor integrated circuit having a flip-flop with improve soft error resistance, including a controller which controls a clock signal generating circuit to output a first clock signal and a second clock signal with a timing so that logic of data retained in a first data retaining terminal becomes identical to logic of data retained in a third data retaining terminal, and then turns on a first switching circuit to connect between the first data retaining terminal and the first data retaining terminal.