Semiconductor device and drive method of electrostatic actuator
    1.
    发明授权
    Semiconductor device and drive method of electrostatic actuator 失效
    静电执行器的半导体器件和驱动方法

    公开(公告)号:US08604725B2

    公开(公告)日:2013-12-10

    申请号:US13719924

    申请日:2012-12-19

    IPC分类号: H01L41/04

    CPC分类号: H02N1/006

    摘要: According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.

    摘要翻译: 根据一个实施例,半导体器件包括静电致动器,其包括第一和第二下部电极,上部电极和设置在上部电极与第一和第二下部电极之间的绝缘膜,第一下部电极和上部电极构成第一 可变电容元件,第二下电极和构成第二可变电容元件的上电极,连接到第一下电极的第一固定电容元件,连接到第二下电极的第二固定电容元件,以及连接到上电极的检测电路 电极,并且被配置为检测存储在绝缘膜中的电荷量。

    Semiconductor device and method of controlling electrostatic actuator
    2.
    发明授权
    Semiconductor device and method of controlling electrostatic actuator 有权
    控制静电执行机构的半导体装置及方法

    公开(公告)号:US08134370B2

    公开(公告)日:2012-03-13

    申请号:US12206169

    申请日:2008-09-08

    申请人: Takayuki Miyazaki

    发明人: Takayuki Miyazaki

    IPC分类号: G01R31/327 G01R27/26

    摘要: A semiconductor device controls an electrostatic actuator having first and second electrodes. A voltage generation unit generates different types of voltages applied to the first and second electrodes. A control unit controls voltages generated by the voltage generation unit to be applied to the first and second electrodes. A capacitance detection unit detects a voltage of the first or second electrode to detect a capacitance between the first and second electrodes. The control unit applies a first voltage between the first and second electrodes and then a second voltage smaller than the first voltage between the first and second electrodes. Thereafter, the control unit switches one of the first electrode or the second electrode to a high impedance state and then changes a voltage applied to the other. The capacitance detection unit detects the amount of change in voltage of the first or second electrode to detect a capacitance between the first and second electrodes.

    摘要翻译: 半导体器件控制具有第一和第二电极的静电致动器。 电压产生单元产生施加到第一和第二电极的不同类型的电压。 控制单元控制由施加到第一和第二电极的电压产生单元产生的电压。 电容检测单元检测第一或第二电极的电压以检测第一和第二电极之间的电容。 控制单元在第一和第二电极之间施加第一电压,然后施加小于第一和第二电极之间的第一电压的第二电压。 此后,控制单元将第一电极或第二电极中的一个切换到高阻抗状态,然后改变施加到另一个的电压。 电容检测单元检测第一或第二电极的电压变化量,以检测第一和第二电极之间的电容。

    VALVE FOR POWDER
    3.
    发明申请
    VALVE FOR POWDER 审中-公开
    粉饼阀

    公开(公告)号:US20120037833A1

    公开(公告)日:2012-02-16

    申请号:US13202778

    申请日:2009-03-26

    IPC分类号: F16K27/00

    摘要: A powder valve is propose which is simple in structure and small in size, which can prevent powder from getting stuck in the valve, and can withstand high feed pressure. The valve includes a valve casing 21, a valve shaft 25, and a valve body 22 mounted in the valve casing 21 and supported by the valve shaft 25. The valve body 22 has a spherical outer surface 27 configured to be brought into contact with a valve seat 23 of the valve casing 21 to close the valve. The valve body 22 is formed with a communication hole 26 extending in a direction perpendicular to the valve shaft 25 so that when the valve body 22 is rotated about the valve shaft 25 in either of two opposite directions from the closed position, the valve is configured to open through the communication hole 26. The communication hole 26 is open on the back side of the valve body 22 over the entire length thereof. With this arrangement, it is possible to ensure the advantages of a ball valve, i.e. full-bore properties and high rigidity. Since the pressure of powder flowing through the communication hole 26 acts on the inner periphery of the valve casing 21, the flow of powder blows off and removes any powder which could otherwise get stuck on the inner periphery of the valve casing 21. By rotating the valve body 22 in both directions, powder can be removed on both sides of the valve shaft 25.

    摘要翻译: 提出一种结构简单,体积小的粉末阀,可以防止粉末卡在阀中,并能承受高的进料压力。 阀包括阀壳体21,阀轴25和安装在阀壳体21中并由阀轴25支撑的阀体22.阀体22具有球形外表面27,其被构造成与 阀壳21的阀座23关闭阀。 阀体22形成有沿垂直于阀轴25的方向延伸的连通孔26,使得当阀体22在关闭位置的两个相反方向中的任一个中使阀体22围绕阀轴25旋转时,阀被配置 通过连通孔26打开。连通孔26在阀体22的整个长度的后侧开口。 通过这种布置,可以确保球阀的优点,即全孔特性和高刚性。 由于流过连通孔26的粉末的压力作用在阀壳体21的内周上,所以粉末的流动吹出并除去否则会粘附在阀壳体21的内周上的任何粉末。通过旋转 阀体22在两个方向上可以在阀轴25的两侧去除粉末。

    SEMICONDUCTOR INTEGRATED CIRCUIT
    5.
    发明申请
    SEMICONDUCTOR INTEGRATED CIRCUIT 有权
    半导体集成电路

    公开(公告)号:US20100039135A1

    公开(公告)日:2010-02-18

    申请号:US12540032

    申请日:2009-08-12

    申请人: Takayuki MIYAZAKI

    发明人: Takayuki MIYAZAKI

    IPC分类号: H03K19/003 H03K19/173

    CPC分类号: H03K3/0375

    摘要: Semiconductor integrated circuit has a control circuit. The control circuit causes the clock signal generating circuit to control the first clock signal and the second clock signal to make a logic of data held by the first data holding terminal and a logic of data held by the second data holding terminal equal to each other, and switches on the switch circuit, and the error detection circuit senses a logic of the first data holding terminal and a logic of the second data holding terminal after switching on the switching circuit.

    摘要翻译: 半导体集成电路具有控制电路。 所述控制电路使所述时钟信号发生电路控制所述第一时钟信号和所述第二时钟信号,以使由所述第一数据保持终端保持的数据的逻辑和由所述第二数据保持终端保持的数据的逻辑相等, 并且接通开关电路,并且在接通开关电路之后,误差检测电路感测第一数据保持端子的逻辑和第二数据保持端子的逻辑。

    Semiconductor integrated circuit including circuit blocks and voltage controller
    6.
    发明授权
    Semiconductor integrated circuit including circuit blocks and voltage controller 失效
    半导体集成电路包括电路块和电压控制器

    公开(公告)号:US07639065B2

    公开(公告)日:2009-12-29

    申请号:US11743433

    申请日:2007-05-02

    申请人: Takayuki Miyazaki

    发明人: Takayuki Miyazaki

    IPC分类号: G11C5/14

    CPC分类号: G05F1/465

    摘要: A semiconductor integrated circuit includes a first circuit block which operates at a first internal voltage, a second circuit block which operates at a second internal voltage, is connected to an output stage of the first circuit block, and receives a signal from the first circuit block, and a voltage controller which supplies the first internal voltage to the first circuit block by using a first high-potential power, supplies the second internal voltage to the second circuit block by using a second high-potential power, and performs control such that the second internal voltage does not exceed the first internal voltage.

    摘要翻译: 半导体集成电路包括在第一内部电压下操作的第一电路块,在第二内部电压下操作的第二电路块连接到第一电路块的输出级,并且从第一电路块接收信号 以及通过使用第一高电位电力将第一内部电压提供给第一电路块的电压控制器,通过使用第二高电位电力将第二内部电压提供给第二电路块,并且执行控制,使得 第二内部电压不超过第一内部电压。

    Calibration method for electron beam exposer
    7.
    发明授权
    Calibration method for electron beam exposer 失效
    电子束曝光仪的校正方法

    公开(公告)号:US4763004A

    公开(公告)日:1988-08-09

    申请号:US689010

    申请日:1985-01-04

    摘要: A method of correcting the aberration of an electron beam due to astigmatism and field curvature of focus by feeding a correction current through stigmator coils and a focus correction coil. The correction currents are determined by measuring a sharpness P of the electron beam. The sharpness P is defined as a product of p.sub.x, a sharpness measured when the electron beam is deflected in X direction, and p.sub.y, a sharpness measured when the electron beam is deflected in Y direction: P=p.sub.x .times.p.sub.y. The use of the sharpness P provides good convergence of the measurements and it becomes possible to calibrate the electron beam for many points in the scanning field. Thus, it is possible to attain maximum resolution over an entire scanning field. Optimum correction currents are determined from data obtained by varying each correction current while keeping the other correction currents constant to obtain several values of P and then using a least square approximation of the measured values of P with a quadrature curve.

    摘要翻译: 通过将校正电流馈送通过标示线圈和聚焦校正线圈来校正由于散光和场弯曲的电子束的像差的方法。 通过测量电子束的清晰度P来确定校正电流。 锐度P被定义为px的乘积,当电子束在X方向上偏转时测得的清晰度,以及py,当电子束在Y方向偏转时测得的清晰度:P = pxxpy。 锐度P的使用提供了良好的测量收敛性,并且可以在扫描场中的许多点校准电子束。 因此,可以在整个扫描场上获得最大分辨率。 通过改变每个校正电流而获得的数据确定最佳校正电流,同时保持其他校正电流恒定以获得多个P值,然后使用正交曲线的P的测量值的最小二乘近似。

    Semiconductor device
    8.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US08971011B2

    公开(公告)日:2015-03-03

    申请号:US12554245

    申请日:2009-09-04

    申请人: Takayuki Miyazaki

    发明人: Takayuki Miyazaki

    IPC分类号: H01G5/00 H01H59/00

    CPC分类号: H01H59/0009 H01H2059/0018

    摘要: A semiconductor device includes a first static actuator having a first drive electrode and a second drive electrode, the first drive electrode and the second drive electrode being capable of coming close to each other upon shifting from an open state to a close state due to an electrostatic attractive force against an elastic force thereof; a detection circuit configured to detect a temperature of the first static actuator; and a drive circuit configured to apply a first voltage between the first drive electrode and the second drive electrode to maintain the first static actuator in the closed state between the first drive electrode and the second drive electrode, and to switch a polarity of the first voltage every first time period. The drive circuit varies a length of the first time period based on a detection result of the detection circuit.

    摘要翻译: 半导体器件包括具有第一驱动电极和第二驱动电极的第一静电致动器,第一驱动电极和第二驱动电极能够由于静电而从打开状态转移到闭合状态,从而彼此接近 抵抗其弹力的吸引力; 检测电路,被配置为检测第一静电致动器的温度; 以及驱动电路,被配置为在所述第一驱动电极和所述第二驱动电极之间施加第一电压,以将所述第一静电致动器保持在所述第一驱动电极和所述第二驱动电极之间的关闭状态,并且将所述第一电压 每第一个时期 驱动电路基于检测电路的检测结果来改变第一时间段的长度。

    HOUSING FOR ELECTRONIC DEVICE UNIT
    9.
    发明申请
    HOUSING FOR ELECTRONIC DEVICE UNIT 有权
    电子设备单元住宅

    公开(公告)号:US20130113349A1

    公开(公告)日:2013-05-09

    申请号:US13810069

    申请日:2010-07-30

    IPC分类号: H05K5/02

    CPC分类号: H05K5/0247 H05K9/0079

    摘要: A housing for an electronic device unit includes a first case and a second case that are formed in a shape of a box with one of respective surfaces thereof being opened and are formed to be a box body. The housing includes an insulating plate that extends from the opening part of the first case to a side of the second case and overlaps with a wall surface of the second case. An engaging convex part is formed on a surface where the insulating plate is overlapped and an engaging hole that engages with the engaging convex part to regulate separation of the first case and the second case is formed. The insulating plate is in a shape in which an edge of the insulating plate spreads with a predetermined width from an opening edge where the first case and the second case are butted and the engaging hole.

    摘要翻译: 一种用于电子设备单元的壳体包括形成为箱体形状的第一壳体和第二壳体,其中一个相应的表面被打开并形成为盒体。 壳体包括从第一壳体的开口部分延伸到第二壳体的一侧并与第二壳体的壁表面重叠的绝缘板。 在绝缘板重叠的表面上形成有接合凸部,并且形成与接合凸部接合以调节第一壳体和第二壳体的分离的接合孔。 绝缘板是从第一壳体和第二壳体对接的开口边缘和接合孔以绝缘板的边缘以预定宽度扩展的形状。

    Semiconductor integrated circuit including a master-slave flip-flop
    10.
    发明授权
    Semiconductor integrated circuit including a master-slave flip-flop 有权
    半导体集成电路包括一个主从触发器

    公开(公告)号:US08044695B2

    公开(公告)日:2011-10-25

    申请号:US12484743

    申请日:2009-06-15

    申请人: Takayuki Miyazaki

    发明人: Takayuki Miyazaki

    IPC分类号: H03K3/356

    CPC分类号: H03K3/0372 H03K3/0375

    摘要: A semiconductor integrated circuit having a flip-flop with improve soft error resistance, including a controller which controls a clock signal generating circuit to output a first clock signal and a second clock signal with a timing so that logic of data retained in a first data retaining terminal becomes identical to logic of data retained in a third data retaining terminal, and then turns on a first switching circuit to connect between the first data retaining terminal and the first data retaining terminal.

    摘要翻译: 一种具有提高软误差电阻的触发器的半导体集成电路,包括控制器,其控制时钟信号发生电路以输出第一时钟信号和第二时钟信号,其中定时使数据的逻辑保留在第一数据保持 终端变得与保持在第三数据保持终端中的数据的逻辑相同,然后接通第一切换电路以连接第一数据保持终端和第一数据保持终端。