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1.
公开(公告)号:US20080105833A1
公开(公告)日:2008-05-08
申请号:US11866099
申请日:2007-10-02
IPC分类号: H01J37/317
CPC分类号: H01J27/022 , H01J37/08 , H01J37/302 , H01J37/3171 , H01J2237/006 , H01J2237/182
摘要: An ion implantation device with a dual pumping mode and method thereof for use in producing atomic or molecular ion beams are disclosed. In one particular exemplary embodiment, an ion implantation apparatus is provided for controlling a pressure within an ion beam source housing corresponding to an ion beam species being produced. The ion implantation apparatus may include the ion beam source housing comprising a plurality of species for use in ion beam production. A pumping section may also be included for evacuating gas from the ion beam source housing. A controller may further be included for controlling the pumping section according to pumping parameters corresponding to a species of the plurality of species being used for ion beam production.
摘要翻译: 公开了一种用于生产原子或分子离子束的双泵浦模式及其方法的离子注入装置。 在一个特定的示例性实施例中,提供离子注入装置,用于控制对应于正在产生的离子束种类的离子束源壳体内的压力。 离子注入装置可以包括离子束源壳体,其包括用于离子束产生的多个物质。 还可以包括泵送部分以从离子束源壳体排出气体。 可以进一步包括控制器,以根据对应于用于离子束产生的多种物质的种类的泵送参数来控制泵送部分。
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2.
公开(公告)号:US20080105828A1
公开(公告)日:2008-05-08
申请号:US11733973
申请日:2007-04-11
申请人: Christopher R. HATEM , Jay Thomas SCHEUER , Russell J. LOW , Morgan D. Evans , Jonathan Gerald ENGLAND
发明人: Christopher R. HATEM , Jay Thomas SCHEUER , Russell J. LOW , Morgan D. Evans , Jonathan Gerald ENGLAND
CPC分类号: C23C14/48 , C01B3/0026 , C01B3/0031 , C01B3/0036 , C01B3/0047 , C01B3/0068 , C23C14/564 , H01J37/08 , H01J37/3171 , H01J2237/022 , H01J2237/31705 , Y02E60/327
摘要: Techniques for removing molecular fragments from an ion implanter are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for removing molecular fragments from an ion implanter. The apparatus may comprise a supply mechanism configured to couple to an ion source chamber and to supply a feed material to the ion source chamber. The apparatus may also comprise one or more hydrogen-absorbing materials placed in a flow path of the feed material, to prevent at least one portion of hydrogen-containing molecular fragments in the feed material from entering the ion source chamber.
摘要翻译: 公开了从离子注入机去除分子碎片的技术。 在一个特定的示例性实施例中,这些技术可以被实现为用于从离子注入机去除分子碎片的装置。 该装置可以包括配置成耦合到离子源室并且将进料材料供应到离子源室的供给机构。 该装置还可以包括放置在进料材料的流动路径中的一种或多种吸氢材料,以防止进料中至少一部分含氢分子碎片进入离子源室。
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3.
公开(公告)号:US07622722B2
公开(公告)日:2009-11-24
申请号:US11866099
申请日:2007-10-02
CPC分类号: H01J27/022 , H01J37/08 , H01J37/302 , H01J37/3171 , H01J2237/006 , H01J2237/182
摘要: An ion implantation device with a dual pumping mode and method thereof for use in producing atomic or molecular ion beams are disclosed. In one particular exemplary embodiment, an ion implantation apparatus is provided for controlling a pressure within an ion beam source housing corresponding to an ion beam species being produced. The ion implantation apparatus may include the ion beam source housing comprising a plurality of species for use in ion beam production. A pumping section may also be included for evacuating gas from the ion beam source housing. A controller may further be included for controlling the pumping section according to pumping parameters corresponding to a species of the plurality of species being used for ion beam production.
摘要翻译: 公开了一种用于生产原子或分子离子束的双泵浦模式及其方法的离子注入装置。 在一个特定的示例性实施例中,提供离子注入装置,用于控制对应于正在产生的离子束种类的离子束源壳体内的压力。 离子注入装置可以包括离子束源壳体,其包括用于离子束产生的多个物质。 还可以包括泵送部分以从离子束源壳体排出气体。 可以进一步包括控制器,以根据对应于用于离子束产生的多种物质的种类的泵送参数来控制泵送部分。
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公开(公告)号:USD314275S
公开(公告)日:1991-02-05
申请号:US139864
申请日:1987-12-30
申请人: Marshall Frey , Thomas Scheuer
设计人: Marshall Frey , Thomas Scheuer
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公开(公告)号:US4801213A
公开(公告)日:1989-01-31
申请号:US113935
申请日:1987-10-19
申请人: Marshall Frey , Thomas Scheuer
发明人: Marshall Frey , Thomas Scheuer
CPC分类号: B65D81/052 , A45C13/021
摘要: An inflatable insert is receivable in an item of luggage, such as a suitcase, for protecting fragile articles as they are transported in the item of luggage. The insert includes an inflatable wall portion which is receivable in an item of luggage so that it extends along the inner side of the sidewall thereof and a pocket element on the inner side of the inflatable wall portion for receiving and containing a fragile article in the item of luggage so that it is protected by the inflatable wall portion of the insert. The insert preferably further includes inflatable top and bottom flaps on the upper and lower ends of the inflatable wall portion which are positionable so that they extend inwardly adjacent the upper and lower ends of the pocket element, respectively, for further protecting a fragile article contained in the pocket element.
摘要翻译: 可充气的插入物可以接收在诸如手提箱的行李物品中,用于在行李物品中运输时保护脆弱物品。 该插入件包括一个可充气的壁部分,该壁部分可以容纳在一个行李物品中,使得其沿其侧壁的内侧延伸,并且在该可充气壁部分的内侧上具有一个袋状元件,用于接收并容纳该物品中的脆弱物品 的行李,使其被插入件的可充气壁部分保护。 插入件优选地还包括可充气壁部分的上端和下端上的可膨胀顶部和底部折片,其可定位成使得它们分别相对于口袋元件的上端和下端向内延伸,以进一步保护包含在其中的脆弱物品 口袋元素。
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