公开(公告)号：US07184204B2

公开(公告)日：2007-02-27

申请号：US10881103

申请日：2004-06-30

申请人： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00 ,  H01S3/22

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

公开(公告)号：US20050002425A1

公开(公告)日：2005-01-06

申请号：US10881103

申请日：2004-06-30

申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00 ,  H01S3/10 ,  H01S3/22

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射到这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。

公开(公告)号：US07245420B2

公开(公告)日：2007-07-17

申请号：US11654780

申请日：2007-01-18

申请人： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei V. Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander O. Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00 ,  G02B27/14

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

公开(公告)号：US20070115535A1

公开(公告)日：2007-05-24

申请号：US11654780

申请日：2007-01-18

申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

IPC分类号： H01S3/00

CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射在这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。