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    Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
    1.
    发明申请
    Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
    具有长光学寿命的主振荡器功率放大器（MOPA）准分子或分子氟激光系统

    公开(公告)号：US20050002425A1

    公开(公告)日：2005-01-06

    申请号：US10881103

    申请日：2004-06-30

    申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

    发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

    IPC分类号： H01S3/00 ,  H01S3/10 ,  H01S3/22

    CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

    摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

    摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射到这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。

    Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
    2.
    发明申请
    Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
    具有长光学寿命的主振荡器功率放大器（MOPA）准分子或分子氟激光系统

    公开(公告)号：US20070115535A1

    公开(公告)日：2007-05-24

    申请号：US11654780

    申请日：2007-01-18

    申请人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

    发明人： Sergei Govorkov ,  Gongxue Hua ,  Timur Misuryaev ,  Alexander Wiessner ,  Thomas Schmidt ,  Rainer Paetzel

    IPC分类号： H01S3/00

    CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/0835 ,  H01S3/235

    摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

    摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射在这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。

    Reduced-maintenance excimer laser with oil-free solid state pulser
    9.
    发明申请
    Reduced-maintenance excimer laser with oil-free solid state pulser 失效
    使用无油固态脉冲发生器的减少维护准分子激光器

    公开(公告)号：US20050169341A1

    公开(公告)日：2005-08-04

    申请号：US10713583

    申请日：2003-11-14

    申请人： Hubertus Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei Govorkov

    发明人： Hubertus Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei Govorkov

    IPC分类号： H01S3/097 ,  H01S3/225

    CPC分类号： H01S3/097 ,  H01S3/225

    摘要： An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

    摘要翻译： 无油脉冲发生器设计可用于生产更轻，生产成本更低，比现有系统简单的准分子或分子氟激光系统。 这样的设计允许将相对较低的DC电压施加到主变压器，允许脉冲发生器在没有油冷却的情况下运行。 该相对低的电压可以增加到驱动激光系统所需的所需电压水平，例如达到12kV至15kV。 可以使用诸如并联脉冲充电的一对电容器元件之类的标准组件来实现该转移，但是可以在其中一个电容器元件上的电荷反转之后串联放电。