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公开(公告)号：US20060216037A1
公开(公告)日：2006-09-28
申请号：US11087479
申请日：2005-03-23
IPC分类号： H04B10/00
CPC分类号： H01S3/0057
摘要： A pulse-stretcher has an optical delay loop including a beamsplitter. The beamsplitter divides an input pulse into a temporal sequence of pulse replicas, a first of which is transmitted by the beamsplitter and the remainder of which are reflected by the beamsplitter along the path of the transmitted replica. The sequence of replicas form an initially stretched pulse having a longer duration and lower peak power than the input pulse. A prism cooperative with the delay loop reflects the initially stretched pulse back into the delay loop along a path laterally displaced from the replica path. The beamsplitter divides the initially stretched pulse into a temporal sequence of pulse replicas propagating along a common path to form a finally stretched pulse, having a longer duration and a lower peak power than the initially stretched pulse. The finally stretched pulse has a sequence of power peaks. Peak power in the pulse is minimized when the beamsplitter reflectivity is selected such that the power of the first two of these peaks is equal.
摘要翻译： 脉冲展宽器具有包括分束器的光学延迟回路。 分束器将输入脉冲分成脉冲副本的时间序列，第一个脉冲副本由分束器发送，其余部分由分光器沿着所发送的副本的路径反射。 复制序列形成具有比输入脉冲更长的持续时间和更低峰值功率的初始拉伸脉冲。 与延迟环路的棱镜协同工作将沿着沿着从复制路径横向移位的路径的初始拉伸脉冲反射回延迟环路。 分束器将初始拉伸的脉冲划分成沿着公共路径传播的脉冲复制的时间序列，以形成具有比初始拉伸的脉冲更长的持续时间和更低的峰值功率的最终拉伸的脉冲。 最后拉伸的脉冲具有一系列功率峰值。 当选择分束器反射率使得这些峰中的前两个的功率相等时，脉冲中的峰值功率被最小化。
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2.发明申请Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权具有长光学寿命的主振荡器功率放大器（MOPA）准分子或分子氟激光系统公开(公告)号：US20070115535A1
公开(公告)日：2007-05-24
申请号：US11654780
申请日：2007-01-18
申请人： Sergei Govorkov , Gongxue Hua , Timur Misuryaev , Alexander Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei Govorkov , Gongxue Hua , Timur Misuryaev , Alexander Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射在这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。
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3.发明申请Apparatus for combining beams from repetitively pulsed lasers along a common path 失效用于组合沿着公共路径的重复脉冲激光束的光束的装置公开(公告)号：US20060215725A1
公开(公告)日：2006-09-28
申请号：US11386637
申请日：2006-03-22
CPC分类号： H01S3/005 , G02B26/0816
摘要： Two pulse sequences are delivered by two lasers. A rotating segmented mirror having one or more reflective areas and one or more transmissive areas is rotated synchronously with the delivery of the pulse sequences to transmit pulses from one sequence, and to reflect pulses from the other sequence at intervals.
摘要翻译： 两个脉冲序列由两个激光器传送。 具有一个或多个反射区域和一个或多个透射区域的旋转分段反射镜与脉冲序列的传送同步地旋转以从一个序列传输脉冲，并且以间隔反射来自另一个序列的脉冲。
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4.发明申请Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权带宽限制和长脉冲主振荡器功率振荡器激光系统公开(公告)号：US20060007978A1
公开(公告)日：2006-01-12
申请号：US11142648
申请日：2005-06-01
申请人： Sergei Govorkov , Alexander Wiessner , Timur Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei Govorkov , Alexander Wiessner , Timur Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译： 激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。 功率振荡器包括用于限制可放大的辐射带宽的光学装置。 与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。 功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。
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5.发明申请Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权具有长光学寿命的主振荡器功率放大器（MOPA）准分子或分子氟激光系统公开(公告)号：US20050002425A1
公开(公告)日：2005-01-06
申请号：US10881103
申请日：2004-06-30
申请人： Sergei Govorkov , Gongxue Hua , Timur Misuryaev , Alexander Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei Govorkov , Gongxue Hua , Timur Misuryaev , Alexander Wiessner , Thomas Schmidt , Rainer Paetzel
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
摘要翻译： 包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射到这些部件上的脉冲的强度来增加。 在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。 可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。 水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。 分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。 棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。
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