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1.发明申请Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof 有权电子显微镜，用于小型化结构物体的检查和处理及其方法公开(公告)号：US20100119698A1
公开(公告)日：2010-05-13
申请号：US12655940
申请日：2010-01-11
CPC分类号： H01J37/301 , G03F1/72 , G03F1/86 , H01J37/244 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/006 , H01J2237/18 , H01J2237/24475 , H01J2237/2448 , H01J2237/2449 , H01J2237/30466 , H01J2237/30472 , H01J2237/31732 , H01J2237/31744
摘要： The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron to microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.
摘要翻译： 本公开涉及一种用于制造具有小型化结构的物体的方法。 该方法涉及通过在同时将电子束引导到待处理的位置，沉积材料或烧蚀材料的同时提供反应气体来处理物体; 并且通过用电子束扫描物体的表面并且将产生的后向散射的电子和二次电子引导到能量选择器来检查物体，反射来自能量选择器的二次电子，检测通过能量选择器的反向散射电子并产生电子 依赖于检测到的反向散射电子的扫描区域的微观图像; 并检查生成的电子显微镜图像，并决定是否进行进一步的沉积或消融材料。 本公开还涉及适于执行该方法的电子显微镜和处理系统。
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2.发明授权Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof 有权电子显微镜，用于小型化结构物体的检查和处理及其方法公开(公告)号：US08058614B2
公开(公告)日：2011-11-15
申请号：US12655940
申请日：2010-01-11
CPC分类号： H01J37/301 , G03F1/72 , G03F1/86 , H01J37/244 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/006 , H01J2237/18 , H01J2237/24475 , H01J2237/2448 , H01J2237/2449 , H01J2237/30466 , H01J2237/30472 , H01J2237/31732 , H01J2237/31744
摘要： The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron to microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.
摘要翻译： 本公开涉及一种用于制造具有小型化结构的物体的方法。 该方法涉及通过在同时将电子束引导到待处理的位置，沉积材料或烧蚀材料的同时提供反应气体来处理物体; 并且通过用电子束扫描物体的表面并且将产生的后向散射的电子和二次电子引导到能量选择器来检查物体，反射来自能量选择器的二次电子，检测通过能量选择器的反向散射电子并产生电子 依赖于检测到的反向散射电子的扫描区域的微观图像; 并检查生成的电子显微镜图像，并决定是否进行进一步的沉积或消融材料。 本公开还涉及适于执行该方法的电子显微镜和处理系统。
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3.发明授权Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof 有权电子显微镜，用于小型化结构物体的检查和处理及其方法公开(公告)号：US07645989B2
公开(公告)日：2010-01-12
申请号：US11902125
申请日：2007-09-19
CPC分类号： H01J37/301 , G03F1/72 , G03F1/86 , H01J37/244 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/006 , H01J2237/18 , H01J2237/24475 , H01J2237/2448 , H01J2237/2449 , H01J2237/30466 , H01J2237/30472 , H01J2237/31732 , H01J2237/31744
摘要： The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.
摘要翻译： 本公开涉及一种用于制造具有小型化结构的物体的方法。 该方法涉及通过在同时将电子束引导到待处理的位置，沉积材料或烧蚀材料的同时提供反应气体来处理物体; 并通过用电子束扫描物体的表面来检查物体，并将产生的反向散射电子和二次电子引导到能量选择器，反射来自能量选择器的二次电子，检测通过能量选择器的反向散射电子并产生电子显微镜 依赖于检测到的反向散射电子的扫描区域的图像; 并检查生成的电子显微镜图像，并决定是否进行进一步的沉积或消融材料。 本公开还涉及适于执行该方法的电子显微镜和处理系统。
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4.发明申请Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof 有权电子显微镜，用于小型化结构物体的检查和处理及其方法公开(公告)号：US20080099674A1
公开(公告)日：2008-05-01
申请号：US11902125
申请日：2007-09-19
CPC分类号： H01J37/301 , G03F1/72 , G03F1/86 , H01J37/244 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/006 , H01J2237/18 , H01J2237/24475 , H01J2237/2448 , H01J2237/2449 , H01J2237/30466 , H01J2237/30472 , H01J2237/31732 , H01J2237/31744
摘要： The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.
摘要翻译： 本公开涉及一种用于制造具有小型化结构的物体的方法。 该方法涉及通过在同时将电子束引导到待处理的位置，沉积材料或烧蚀材料的同时提供反应气体来处理物体; 并通过用电子束扫描物体的表面来检查物体，并将产生的反向散射电子和二次电子引导到能量选择器，反射来自能量选择器的二次电子，检测通过能量选择器的反向散射电子并产生电子显微镜 依赖于检测到的反向散射电子的扫描区域的图像; 并检查生成的电子显微镜图像，并决定是否进行进一步的沉积或消融材料。 本公开还涉及适于执行该方法的电子显微镜和处理系统。
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