公开(公告)号：US09332166B2

公开(公告)日：2016-05-03

申请号：US13821490

申请日：2011-09-06

申请人： Tomoaki Kawakami ,  Toshihiko Tsuji

发明人： Tomoaki Kawakami ,  Toshihiko Tsuji

IPC分类号： G02B6/42 ,  H04N9/31 ,  H04N5/225 ,  G02B27/09

CPC分类号： H04N5/2256 ,  G02B27/0994

摘要： An imaging apparatus (1) includes an illumination optical system (100) that includes a light source (110) and is configured to guide light from the light source to a target(B), an imaging optical system configured to capture an image of the target, and a plurality of image sensors (430) arranged on an image plane of the imaging optical system. The illumination optical system includes a plurality of integrators (121,122). Light flux exits from one of the plurality of integrators illuminates at least one of the plurality of image sensors, and light exits from the other integrators illuminates at least one of the plurality of image sensors other than the image sensor illuminated by the light exits from the one of the plurality of integrators.

摘要翻译： 一种成像装置（1）包括照明光学系统（100），其包括光源（110）并且被配置为将来自所述光源的光引导到目标（B）;成像光学系统，被配置为捕获所述光源 目标和布置在成像光学系统的图像平面上的多个图像传感器（430）。 照明光学系统包括多个积分器（121,122）。 从多个积分器中的一个出射的光束照射多个图像传感器中的至少一个，并且来自其他积分器的光离开照亮多个图像传感器中的至少一个图像传感器，而不是由光照射的图像传感器从 多个集成商之一。

公开(公告)号：US09261691B2

公开(公告)日：2016-02-16

申请号：US13578854

申请日：2011-05-25

申请人： Tomoaki Kawakami

发明人： Tomoaki Kawakami

IPC分类号： G02B21/36

CPC分类号： G02B21/361

摘要： An image pickup apparatus of the present invention includes a light source unit, an illumination optical system configured to introduce a light from the light source unit onto a plane to be illuminated, a sample stage configured to place an object on the plane to be illuminated, an image pickup optical system configured to form an image of the object placed on the plane to be illuminated, an image pickup element portion configured by disposing a plurality of image pickup elements on an image plane of the image pickup optical system, and a light shielding member configured to reduce entrance of a light to an area where the plurality of image pickup elements of the image pickup element portion are not disposed.

摘要翻译： 本发明的图像拾取装置包括：光源单元，被配置为将来自光源单元的光引入待照亮的平面上的照明光学系统;被配置为将物体放置在被照明平面上的样本台; 被配置为形成被放置在被照明平面上的物体的图像的图像拾取光学系统;通过将多个图像拾取元件设置在摄像光学系统的图像平面上而构成的图像拾取元件部分，以及遮光 被配置为减少光的入射到不设置图像拾取元件部分的多个图像拾取元件的区域的构件。

公开(公告)号：US20090135398A1

公开(公告)日：2009-05-28

申请号：US12274468

申请日：2008-11-20

申请人： Tomoaki Kawakami

发明人： Tomoaki Kawakami

IPC分类号： G03B27/72 ,  G03B27/32

CPC分类号： G03B27/32 ,  G03B27/72 ,  G03F7/70091 ,  G03F7/70558

摘要： An exposure apparatus includes an illumination optical system configured to illuminate an original by a luminous flux from a light source and a projection optical system configured to project a pattern of the original onto a substrate. The illumination optical system includes a generator configured to form an effective light source as a light intensity distribution on a surface that has a Fourier transformation relationship with the original and an exposure dose adjuster arranged closer to the light source than the generator and configured to control an exposure dose on an exposure surface. The exposure dose adjuster includes a transmittance adjuster configured to discretely adjust a transmittance of the luminous flux, a zoom optical system configured to adjust a diameter of the luminous flux, and an aperture having a predetermined aperture area that defines a diameter of the luminous flux that has been adjusted by the zoom optical system.

摘要翻译： 曝光装置包括：照明光学系统，被配置为通过来自光源的光束照射原稿;以及投影光学系统，其被配置为将原稿的图案投影到基板上。 照明光学系统包括：发光器，被配置为在与原件具有傅里叶变换关系的表面上形成有效光源，并且将曝光剂量调节器设置成比发光器更靠近光源，并且被配置为控制 曝光表面的曝光剂量。 曝光剂量调节器包括透射率调节器，其被配置为离散地调节光通量的透射率，被配置为调节光通量的变焦光学系统，以及具有限定光通量直径的预定开口面积的孔径， 已被变焦光学系统调整。

公开(公告)号：US20110304741A1

公开(公告)日：2011-12-15

申请号：US13161066

申请日：2011-06-15

申请人： Tomoaki KAWAKAMI

发明人： Tomoaki KAWAKAMI

IPC分类号： H04N5/228

CPC分类号： G02B21/367

摘要： The image pickup apparatus includes an image sensor unit including an optical system forming an optical image of an object placed on a stage part and plural image sensors each of which captures part of the optical image, a drive mechanism relativity moving the stage part and the image sensor unit, and a processing part causing the image sensor unit to perform plural image capturing operations with causing the drive mechanism to relatively move the stage part and the image sensor unit after each image capturing operation, and combining the plural captured images to produce a whole image covering the whole image capturing area. The plural image sensors are arranged such that an effective diameter of the optical system necessary to introduce light from the stage part to all the plural image sensors is smaller than a diameter of a circle circumscribed to the whole image capturing area.

摘要翻译： 图像拾取装置包括图像传感器单元，其包括形成放置在平台部分上的物体的光学图像的光学系统和多个图像传感器，每个图像传感器捕获光学图像的一部分，驱动机构相对论移动台部分和图像 传感器单元和使图像传感器单元执行多个图像捕获操作的处理部分，使得驱动机构在每次图像捕获操作之后相对移动台部分和图像传感器单元，并且组合多个拍摄图像以产生整体 覆盖整个图像捕获区域的图像。 多个图像传感器被布置成使得将来自舞台部分的光引入所有多个图像传感器所需的光学系统的有效直径小于与整个图像捕获区域相对的圆的直径。

公开(公告)号：US07943707B2

公开(公告)日：2011-05-17

申请号：US11791324

申请日：2005-11-21

申请人： Tomoaki Kawakami ,  Takumi Katsurao

发明人： Tomoaki Kawakami ,  Takumi Katsurao

IPC分类号： C08F2/00 ,  C08F14/18

CPC分类号： C08F114/22 ,  C08F14/22 ,  C08F214/22 ,  C08F2/18

摘要： A monomer comprising vinylidene fluoride as a principal component is suspension-polymerized by supplying the monomer in division to a polymerization system containing a polymerization initiator at a pressure below a critical pressure Pcr (=4.38 MPa) of vinylidene fluoride and at a pressure above Pcr. As a result, a vinylidene fluoride polymer having excellent high-temperature coloring resistance and with remarkably less elution of organic matter and ionic components is produced, without using a specific halogenated hydrocarbon and without incurring troublesome labor and cost for recovery thereof.

摘要翻译： 以偏二氟乙烯为主要成分的单体通过在低于偏二氟乙烯的临界压力Pcr（= 4.38MPa）的压力和高于Pcr的压力下将含有聚合引发剂的聚合体系分开供给而进行悬浮聚合。 结果，制备了具有优异的耐高温着色性和显着更少的有机物和离子组分的洗脱的偏二氟乙烯聚合物，而不使用特定的卤代烃，并且不会产生麻烦的劳动和回收的成本。

公开(公告)号：US20090075216A1

公开(公告)日：2009-03-19

申请号：US12209040

申请日：2008-09-11

申请人： Tomoaki Kawakami

发明人： Tomoaki Kawakami

IPC分类号： G03F7/22 ,  G03B27/54

CPC分类号： G03F7/70091 ,  G03F7/705 ,  G03F7/70566

摘要： A computer-readable storage medium storing a program for causing a computer to execute determination of an exposure condition for use in illuminating an original plate with an illumination optical system and projecting an image of a pattern of the original plate onto a substrate through a projection optical system. The program causes the computer to perform operations including setting a light intensity distribution on a pupil plane in the illumination optical system based on a constraint condition concerning an optical element constituting the illumination optical system, calculating the image of the pattern of the original plate to be projected onto the substrate using the light intensity distribution, and determining the exposure condition for exposing the substrate with the image of the pattern of the original plate based on a calculation result of the image of the pattern of the original plate and the constraint condition.

摘要翻译： 一种计算机可读存储介质，其存储用于使计算机执行用于照明光学系统照亮原版的曝光条件的确定的程序，并且通过投影光学将原版的图案的图像投影到基板上 系统。 该程序使计算机执行包括在照明光学系统中基于关于构成照明光学系统的光学元件的约束条件来设置照明光学系统中的光瞳平面上的光强度分布的操作，将原始板的图案的图像计算为 使用光强度分布投影到基板上，并且基于原版的图案的图像的计算结果和约束条件来确定用于使原版的图案的图像曝光的基板的曝光条件。

公开(公告)号：US20060148912A1

公开(公告)日：2006-07-06

申请号：US10553442

申请日：2004-04-09

申请人： Takumi Katsurao ,  Tomoaki Kawakami ,  Toshio Hosokawa

发明人： Takumi Katsurao ,  Tomoaki Kawakami ,  Toshio Hosokawa

IPC分类号： C08J5/20

CPC分类号： B01D67/002 ,  B01D69/02 ,  B01D71/34 ,  B01D71/76 ,  B01D71/82 ,  B01D2323/06 ,  B01D2323/20 ,  B01D2325/36

摘要： A porous membrane of vinylidene fluoride resin excellent in hydrophilicity and having a good balance among strength, elongation and water permeation rate, which is thus useful as a microfiltration membrane or a separator of battery. The porous membrane is formed from a copolymer of 100 mols of a vinylidene fluoride monomer and 0.01-10.0 mols of a hydrophilic monomer having at least one species of hydrophilic group selected from epoxy group, hydroxy group, carboxy group, ester group, amide group and acid anhydride group.

摘要翻译： 亲水性优异，强度，伸长率和透水率均衡好的偏氟乙烯树脂的多孔膜，因此可用作微滤膜或电池隔膜。 多孔膜由100摩尔偏二氟乙烯单体和0.01-10.0摩尔具有至少一种选自环氧基，羟基，羧基，酯基，酰胺基的亲水基团的亲水性单体的共聚物形成， 酸酐基。

公开(公告)号：US08654223B2

公开(公告)日：2014-02-18

申请号：US13161066

申请日：2011-06-15

申请人： Tomoaki Kawakami

发明人： Tomoaki Kawakami

IPC分类号： H04N5/247

CPC分类号： G02B21/367

摘要： The image pickup apparatus includes an image sensor unit including an optical system forming an optical image of an object placed on a stage part and plural image sensors each of which captures part of the optical image, a drive mechanism relatively moving the stage part and the image sensor unit, and a processing part causing the image sensor unit to perform plural image capturing operations with causing the drive mechanism to relatively move the stage part and the image sensor unit after each image capturing operation, and combining the plural captured images to produce a whole image covering the whole image capturing area. The plural image sensors are arranged such that an effective diameter of the optical system necessary to introduce light from the stage part to all the plural image sensors is smaller than a diameter of a circle circumscribed to the whole image capturing area.

摘要翻译： 图像拾取装置包括图像传感器单元，该图像传感器单元包括形成放置在平台部分上的物体的光学图像的光学系统和分别捕获光学图像的一部分的多个图像传感器，相对移动平台部分和图像的驱动机构 传感器单元和使图像传感器单元执行多个图像捕获操作的处理部分，使得驱动机构在每次图像捕获操作之后相对移动台部分和图像传感器单元，并且组合多个拍摄图像以产生整体 覆盖整个图像捕获区域的图像。 多个图像传感器被布置成使得将来自舞台部分的光引入所有多个图像传感器所需的光学系统的有效直径小于与整个图像捕获区域相对的圆的直径。

公开(公告)号：US20130222569A1

公开(公告)日：2013-08-29

申请号：US13881302

申请日：2011-10-17

申请人： Tomoaki Kawakami ,  Toshihiko Tsuji

发明人： Tomoaki Kawakami ,  Toshihiko Tsuji

IPC分类号： H04N5/225

CPC分类号： H04N5/2256 ,  G02B21/086 ,  G02B21/367 ,  G02B27/0905 ,  G02B27/0961 ,  G02B27/0994 ,  H04N5/3454

摘要： An imaging apparatus includes: an illumination optical system including a light source and guiding the light from the light source to an illuminated surface B including an object; a plurality of image sensors for acquiring an image of the illuminated surface formed by an imaging optical system; a measurement unit for measuring a size of the object; and a control unit for determining an image sensor to be used when acquiring the image of the illuminated surface, among the plurality of image sensors, based on a measurement result of the measurement unit.

摘要翻译： 一种成像设备包括：照明光学系统，包括光源并将来自光源的光引导到包括物体的照明表面B; 用于获取由成像光学系统形成的照明表面的图像的多个图像传感器; 用于测量物体的尺寸的测量单元; 以及控制单元，用于基于测量单元的测量结果确定在获取多个图像传感器中的照明表面的图像时要使用的图像传感器。

公开(公告)号：US08236865B2

公开(公告)日：2012-08-07

申请号：US11883317

申请日：2006-01-30

申请人： Tomoaki Kawakami ,  Toshio Hosokawa

发明人： Tomoaki Kawakami ,  Toshio Hosokawa

IPC分类号： C08J9/36 ,  C04B28/02 ,  C08F110/00 ,  C08L27/12

CPC分类号： C08F14/22 ,  C08F259/08 ,  C08L27/16 ,  C08L31/04 ,  C08L33/12 ,  C08L33/14 ,  C08L51/003 ,  Y10S525/934 ,  C08F2/18 ,  C08L2666/04 ,  C08L2666/02

摘要： A hydrophilic vinylidene fluoride resin composition, comprising: porous vinylidene fluoride polymer particles and a hydrophilic polymer having a weight-average molecular weight of at least 2×105 contained in the pores of the porous vinylidene fluoride polymer particles. The composition is preferably obtained by subjecting a slurry containing porous vinylidene fluoride polymer particles after suspension polymerization to an appropriate degree of heat treatment for adjusting the amount of residual polymerization initiator, then impregnating the Polymer particles with a hydrophilic monomer and polymerizing the monomer. The thus-obtained vinylidene fluoride resin composition exhibits persistent hydrophilicity and good processability.

摘要翻译： 一种亲水性偏氟乙烯树脂组合物，其包含：多孔偏二氟乙烯聚合物颗粒和多孔偏二氟乙烯聚合物颗粒的孔中包含的重均分子量为至少2×10 5的亲水性聚合物。 该组合物优选通过使悬浮聚合后含有多孔偏二氟乙烯聚合物颗粒的浆料进行适当程度的热处理以调节残留聚合引发剂的量，然后用亲水性单体浸渍聚合物颗粒并聚合单体而获得。 由此得到的偏二氟乙烯树脂组合物表现出持久的亲水性和良好的加工性能。