摘要:
A method for controlling an initial position of a magnetically levitated body comprises sensing the position of the levitated body by position sensors and applying exciting currents to electromagnets in response to the sensed position to adjust the position of the body to an initial central position. The sensing step comprises detecting a first limiting position of the body in a first direction and detecting a second limiting position of the body in a second direction opposite the first direction. The applying step comprises calculating a central position from the first and second limiting positions and applying exciting currents to the electromagnets to move the body into the calculated central position. An apparatus for controlling positioning of a magnetically levitated body based on limiting positions is also disclosed.
摘要:
A magnetic bearing device is provided which is capable of reducing vibration, as well as electric and magnetic noise, generated from a pump device while making it possible to control the position of a rotor at high speed and high power. Also provided is a pump device having the magnetic bearing device mounted thereto. Switching is made between a high-voltage mode in which an electromagnet coil is supplied with electric power from a high voltage power source and a low voltage mode in which the electromagnet coil is supplied with electric power from a low voltage power source. The switching is made based on whether or not a current change speed is below a reference current change speed. When the current change speed is equal to or larger than the reference current change speed, the device is switched to the high voltage mode. When the current change speed is less than the reference current change speed, the device is switched to the low voltage mode.
摘要:
To provide a control circuit or the like of a brush-less motor capable of properly controlling current of motor windings by detecting positions of magnetic poles of a rotor at a rotational frequency of the rotor from low rotation which cannot lock a PLL circuit to steady-state rotation for rotating at high speed. Positions of magnetic poles are detected by a change in a magnetic flux (magnetic flux signal) of motor windings caused by rotating a rotor having the magnetic poles, thereby, a synchronizing signal (ROT signal) in synchronism with rotation of the rotor is generated. When the rotor is rotated at a low rotational frequency which cannot lock a PLL circuit, the rotor is driven by using predetermined two driving voltage vectors among outputable driving voltage vectors and when a rotational frequency capable of locking the PLL circuit is reached, the rotor is driven by successively outputting the outputable driving voltage vectors in synchronism with the positions of the magnetic poles detecting the outputable driving voltage vectors. Further, the magnetic flux signal is provided by using voltage between two phases at which phases and magnitudes of voltage drop caused by inductances of motor windings are equal to each other.
摘要:
To further improve the stability of drive control for the start period of a motor without complicating a circuit configuration.During the period in which the rotational speed of a rotor does not reach the rotational speed capable of locking a PLL circuit, a drive control method of two-phase mode in which a start current is supplied by two energizing patterns is used. In energizing pattern A, a current is caused to flow in a motor winding in the direction from U to W and in the direction from V to W at the same time. In energizing pattern B, a current is caused to flow in the motor winding in the direction from W to U and in the direction from W to V at the same time. A potential difference Vu-v between a U phase and a V phase in which the phase and magnitude of voltage drop due to inductance are equal is detected. Based on the detected potential difference Vu-v, a magnetic flux estimation signal φu-v is calculated by an integrator. Then, based on the magnetic flux estimation signal φu-v, an ROT signal is sent from a comparator. The energizing pattern of the start current is switched over according to the ROT signal, and torque in the normal rotation direction is developed, by which the rotor is accelerated.
摘要:
To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section 281 stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section 281 outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section 252 performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section 281, and outputs, to an A/D converter 154, a sensor output signal 153 having a sensor output voltage V after the sensor sensitivity adjustment.
摘要:
To provide a magnetic bearing device capable of lowering the costs required for the manufacture, installation, or the like of a turbo molecular pump by reducing the number of elements of an amplifier circuit that drives, through excitation, electromagnets as well as the number of wires of a cable that connects the each electromagnet and the amplifier circuit to each other, and a turbo molecular pump with the magnetic bearing device mounted thereto. One end of an electromagnet coil is connected to a common node. Also, the other end thereof is connected to an amplifier circuit composed of one transistor and one diode. Further, the one end of the electromagnet coil is common with respect to each of the electromagnets, and the common node R is controlled by an intermediate-voltage maintaining circuit so as to maintain an intermediate voltage.
摘要:
To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section 281 stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section 281 outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section 252 performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section 281, and outputs, to an A/D converter 154, a sensor output signal 153 having a sensor output voltage V after the sensor sensitivity adjustment.
摘要:
A turbomolecular pump device having a DC brushless motor provided with a simplified rpm detection mechanism is provided. A pickup coil for detecting a magnetic flux produced by a permanent magnet of the DC brushless motor is built in the motor. Namely, a small size, low cost, simple and strong pickup coil is disposed in a space between the permanent magnet (rotor) of the DC brushless motor and the motor drive coil (stator coil). The magnetic flux produced by the permanent magnet in the pickup coil is detected. This is converted into an rpm signal of the DC brushless motor by a sequence controlling circuit. It is supervised whether or not the overspeed is performed. Then, when the overspeed is detected, an interruption command is fed to the power source breaker so that the supply of the power is forcibly interrupted to thereby stop the DC brushless motor.
摘要:
A magnetic bearing device has a rotor, electromagnets that control axial/radial positions of the rotor, and a power source that supplies power to the electromagnets. A switching circuit switches a voltage of a common node connected to each one end of the electromagnets. The switching circuit includes a first switch element that connects and disconnects between one end of the power source and the common node, and a first rectifier element connected between the other end of the power source and the common node. An excitation control circuit controls excitation of each of the electromagnets by a supply current that flows through the electromagnets in one direction or a regenerated current that flows through the electromagnets in one direction. The excitation control circuit includes a second switch element that connects and disconnects between the other end of one of the electromagnets and the other end of the power source, and a second rectifier element connected between the other end of one of the electromagnets and the one end of the power source.
摘要:
To further improve the stability of drive control for the start period of a motor without complicating a circuit configuration.During the period in which the rotational speed of a rotor does not reach the rotational speed capable of locking a PLL circuit, a drive control method of two-phase mode in which a start current is supplied by two energizing patterns is used. In energizing pattern A, a current is caused to flow in a motor winding in the direction from U to W and in the direction from V to W at the same time. In energizing pattern B, a current is caused to flow in the motor winding in the direction from W to U and in the direction from W to V at the same time. A potential difference Vu-v between a U phase and a V phase in which the phase and magnitude of voltage drop due to inductance are equal is detected. Based on the detected potential difference Vu-v, a magnetic flux estimation signal φu-v is calculated by an integrator. Then, based on the magnetic flux estimation signal φu-v, an ROT signal is sent from a comparator. The energizing pattern of the start current is switched over according to the ROT signal, and torque in the normal rotation direction is developed, by which the rotor is accelerated.