Apparatus and method for monitoring and controlling crystal growth
    1.
    发明授权
    Apparatus and method for monitoring and controlling crystal growth 有权
    用于监测和控制晶体生长的装置和方法

    公开(公告)号:US07959732B1

    公开(公告)日:2011-06-14

    申请号:US11455400

    申请日:2006-06-19

    IPC分类号: C30B35/00

    摘要: Apparatus and method for growing a crystal from a melt of a growth material, wherein crystal growth occurs at a solid-liquid interface between the melt and the crystal, and a characteristic of the solid-liquid interface is determined by using a float atop the melt and a detector for detecting displacement of the float. The characteristic of the solid-liquid interface can be at least one of the following: position, velocity or acceleration of the solid-liquid interface.

    摘要翻译: 用于从生长材料的熔体生长晶体的装置和方法,其中在熔体和晶体之间的固 - 液界面处发生晶体生长,并且通过使用熔体顶部的浮子来确定固 - 液界面的特性 以及用于检测浮子的位移的检测器。 固 - 液界面的特性可以是以下至少一个:固 - 液界面的位置,速度或加速度。