公开(公告)号：US08893309B2

公开(公告)日：2014-11-18

申请号：US13388223

申请日：2010-06-22

申请人： Feng Tao ,  Miquel Salmeron ,  Gabor A. Somorjai

发明人： Feng Tao ,  Miquel Salmeron ,  Gabor A. Somorjai

IPC分类号： G01Q60/10 ,  G01Q30/18 ,  G01Q30/16 ,  G01Q60/16 ,  G01Q30/12 ,  G01Q60/00 ,  G21K5/10 ,  B82Y35/00

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/12 ,  G01Q30/16 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/869 ,  Y10S977/871

摘要： An embodiment of a scanning tunneling microscope (STM) reactor includes a pressure vessel, an STM assembly, and three spring coupling objects. The pressure vessel includes a sealable port, an interior, and an exterior. An embodiment of an STM system includes a vacuum chamber, an STM reactor, and three springs. The three springs couple the STM reactor to the vacuum chamber and are operable to suspend the scanning tunneling microscope reactor within the interior of the vacuum chamber during operation of the STM reactor. An embodiment of an STM assembly includes a coarse displacement arrangement, a piezoelectric fine displacement scanning tube coupled to the coarse displacement arrangement, and a receiver. The piezoelectric fine displacement scanning tube is coupled to the coarse displacement arrangement. The receiver is coupled to the piezoelectric scanning tube and is operable to receive a tip holder, and the tip holder is operable to receive a tip.

摘要翻译： 扫描隧道显微镜（STM）反应器的一个实施例包括压力容器，STM组件和三个弹簧耦合物体。 压力容器包括可密封的端口，内部和外部。 STM系统的实施例包括真空室，STM反应器和三个弹簧。 三个弹簧将STM反应器耦合到真空室，并且可操作以在STM反应器的操作期间将扫描隧道显微镜反应器悬挂在真空室内部。 STM组件的实施例包括粗排列布置，耦合到粗位移布置的压电精细位移扫描管和接收器。 压电精细位移扫描管耦合到粗排位置。 接收器耦合到压电扫描管并且可操作以接收尖端保持器，并且尖端保持器可操作以接收尖端。

公开(公告)号：US5306918A

公开(公告)日：1994-04-26

申请号：US946412

申请日：1992-11-09

申请人： Jean-Pierre Goudonnet ,  Yvon LaCroute

发明人： Jean-Pierre Goudonnet ,  Yvon LaCroute

IPC分类号： G01B21/30 ,  G01N21/27 ,  G01N27/00 ,  G01Q30/08 ,  G01Q30/16 ,  G01Q60/18 ,  G02B21/24 ,  H01J37/20 ,  H01J37/28 ,  H01J37/26

CPC分类号： G01Q30/16 ,  B82Y35/00 ,  G02B21/24 ,  H01J37/20 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/869 ,  Y10S977/871 ,  Y10S977/881 ,  Y10S977/888

摘要： Installation for the analysis or transformation of the surface of samples placed in a vacuum or controlled atmosphere, including a main enclosure in which is positioned a support plate for at least one device, called SXM, in which a microprobe such as a light or electricity conducting tip is positioned close to the surface of the sample to be examined, whether in the air or in a vacuum. The device is intended for the microscopy, spectroscopy or etching of the sample surface by scanning of the surface by the microprobe. The support plate is equipped with elements for disconnecting it from the main enclosure and with elements for rotating the support plate around a central axis allowing the use of a series of SXM devices fitted into the periphery of the support plate. The main enclosure is completed by a scrubbing enclosure for the surface of the samples and by an introduction and storage enclosure for the samples, which can be handled through the installation by the end of a conveyor rod that can be moved longitudinally and in axial rotation along the alignment axis of the enclosures.

摘要翻译： PCT No.PCT / FR91 / 00378 Sec。 371日期：1993年1月5日 102（e）日期1993年1月5日PCT提交1991年5月7日PCT公布。 公开号WO91 / 17429 日期为1991年11月14日。用于分析或转化放置在真空或受控气氛中的样品表面的装置，包括主壳体，其中定位有至少一个称为SXM的装置的支撑板，其中， 例如光或电导电尖端定位为接近待检测样品的表面，无论是在空气中还是在真空中。 该器件旨在通过微探针扫描表面进行显微镜，光谱或样品表面的蚀刻。 支撑板配备有用于将其与主壳体断开的元件以及用于使支撑板围绕中心轴线旋转的元件，允许使用装配在支撑板的周边中的一系列SXM装置。 主外壳由用于样品表面的洗涤外壳和样品的引入和存储外壳完成，样品可以通过安装在传送杆端部进行处理，该输送杆可纵向移动并沿轴向旋转 外壳的对齐轴。

公开(公告)号：US20140082775A1

公开(公告)日：2014-03-20

申请号：US14029168

申请日：2013-09-17

申请人： Brookhaven Science Associates, LLC

发明人： Percy Zahl

IPC分类号： G01Q20/02

CPC分类号： G01Q20/02 ,  G01Q30/16 ,  Y10T29/49826

摘要： A modular transferable ultra-high vacuum compatible device has a body with a tunnel through its thickness. An interferometric sensor is mounted above the body and has a brace on which a cantilever is disposed and through which an optical fiber passes so that the two may be aligned prior to installation in an atomic force measurement apparatus. The sensor-mounted body is coupled to a mount for engaging an atomic force measurement apparatus to act as the interferometric head of the apparatus.

摘要翻译： 模块化可转移的超高真空兼容装置具有通过其厚度的隧道的主体。 干涉测量传感器安装在主体上方，并具有一个支架，悬臂设置在支架上，光纤通过该支架，使得两者可以在安装在原子力测量装置之前对齐。 传感器安装的主体联接到用于接合原子力测量装置以用作装置的干涉头部的安装件。

公开(公告)号：US5619035A

公开(公告)日：1997-04-08

申请号：US577199

申请日：1995-12-22

申请人： Paul S. Weiss ,  Stephan J. Stranick

发明人： Paul S. Weiss ,  Stephan J. Stranick

IPC分类号： G01Q30/02 ,  G01Q30/10 ,  G01Q30/14 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/60 ,  G11B9/00 ,  G11B11/00 ,  G11B11/08 ,  H01J37/20 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q30/10 ,  G01Q30/16 ,  G01Q60/12 ,  G01Q60/22 ,  G01Q60/60 ,  G11B11/002 ,  G11B11/08 ,  G11B9/14 ,  G11B9/149 ,  H01J37/20 ,  H01J2237/204 ,  H01J2237/2065 ,  H01J2237/2538 ,  H01J2237/2583 ,  H01J2237/31738 ,  Y10S977/86

摘要： A system for transporting in a vacuum chamber sample holders and samples between a holder tray and a location for use with a surface analytical instrument is disclosed. Also provided is a system including a microwave coaxial cable connecting the tip terminal of a scanning tunneling microscope to a microwave signal source and a system for clamping a heater to a sample holder in order to heat the sample.

摘要翻译： 公开了一种用于在真空室中运送样品保持器和样品在保持器托盘和用于表面分析仪器的位置之间的系统。 还提供了一种系统，其包括将扫描隧道显微镜的末端连接到微波信号源的微波同轴电缆和用于将加热器夹持到样品架以便加热样品的系统。

公开(公告)号：US4939363A

公开(公告)日：1990-07-03

申请号：US370819

申请日：1989-06-23

申请人： Hiroshi Bando ,  Akira Sakai

发明人： Hiroshi Bando ,  Akira Sakai

IPC分类号： G01B7/34 ,  G01N23/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/00 ,  G01Q30/04 ,  G01Q30/08 ,  G01Q30/10 ,  G01Q30/20 ,  G01Q60/10 ,  G01Q60/16 ,  H01J37/26 ,  H01J37/28 ,  H01L21/66

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/16 ,  G01Q60/54 ,  Y10S977/852 ,  Y10S977/861

摘要： A scanning tunneling microscope according to the present invention comprises a tip for emitting spin-polarized electrons and a magnet for applying a magnetic field to this tip. This tip is constituted of a metal needle made of a tungsten and an EuS layer about 400 .ANG. which is coated on the surface of the metal needle. This tip is brought to such a close distance to the surface of the specimen that tunnel current flows. A magnetic field is applied to the axial direction of the tip a bias voltage is applied between the tip and the specimen and the tip is made to scan the surface of the specimen. The tip having a magnetic field applied to the axial direction thereof emits only spin-polarized electrons with the electron spins oriented in the axial direction. The spin-polarized electrons flows only in the area at the surface of the specimen where empty states for the electrons having spins in the parallel direction are distributed. By detecting the flow of the electrons, that is, the tunnel current, it is possible to obtain the distribution of the electrons having downward or downward spins. The shape of the pointed end of the tip is almost the same as that of a tip used in an ordinary STM. This makes it possible to measure the distribution of the electron spins with an atomic scale resolution.

公开(公告)号：US20190025339A1

公开(公告)日：2019-01-24

申请号：US16070909

申请日：2016-12-16

申请人： FUDAN UNIVERSITY

发明人： Shiwei WU ,  Zeyuan SUN ,  Shuai ZHANG ,  Di HUANG ,  Shengyu ZHOU ,  Lifeng YIN ,  Chunlei GAO ,  Jian SHEN

IPC分类号： G01Q30/18 ,  G01Q60/16 ,  G01Q30/16 ,  F17C3/08 ,  H01F6/04

CPC分类号： G01Q30/18 ,  F17C3/085 ,  F17C2203/0687 ,  F17C2221/017 ,  F17C2223/0161 ,  G01Q30/16 ,  G01Q60/16 ,  H01F6/04

摘要： A scanning probe microscope of the present disclosure includes: a room-temperature bore superconducting magnet including a liquid helium-consumption free closed-cycle cooling system, a superconducting magnet, and a chamber having a room-temperature bore; and a scanning probe microscope including a scanning head, a vacuum chamber, and a vibration isolation platform; and a computer control system. The room-temperature bore superconducting magnet is cooled by the cryogen-free closed-cycle cooling system which eliminates the dependence on liquid helium for high magnetic field operation. There is no physical contact between the scanning probe microscope and the superconducting magnet connected to the closed-cycle cooling system. The scanning probe microscope can achieve atomic-scale spatial resolution. The temperature of the scanning probe microscope is not restricted by the low temperature conditions for operation of the superconducting magnet. The scanning probe microscope and the vacuum chamber can achieve high-temperature baking independent of the superconducting magnet for ultra-high vacuum conditions.

公开(公告)号：US09689893B2

公开(公告)日：2017-06-27

申请号：US15168985

申请日：2016-05-31

申请人： HITACHI HIGH-TECH SCIENCE CORPORATION

发明人： Kazunori Ando

IPC分类号： G01Q30/12 ,  G01Q30/16 ,  G01Q30/20

CPC分类号： G01Q30/16 ,  G01Q30/12 ,  G01Q30/20

摘要： Disclosed herein is a scanning probe microscope including a cantilever, a three-dimensional moving mechanism moving a sample stage in three dimensions, and a measurement chamber sealed not to be exposed to external air. At least the cantilever, the sample stage, and the three-dimensional moving mechanism are accommodated in the measurement chamber. The measurement chamber is provided with a pair of guide rails used to transport the sample stage. The sample stage has an engagement portion. The three-dimensional moving mechanism is disposed in the vicinity of a predetermined position and between the guide rails. The three-dimensional moving mechanism can be moved to above the guide rails and below the guide rails. When the sample stage is transported to the predetermined position in a horizontal direction, the three-dimensional moving mechanism is lifted up to the bottom surface of the sample stage so that the scanning probe microscope can perform measurement.

公开(公告)号：US20150226766A1

公开(公告)日：2015-08-13

申请号：US14412831

申请日：2013-07-05

申请人： Bruker Nano, Inc. ,  IMEC

发明人： Kristof Paredis ,  Wilfried Vandervorst

IPC分类号： G01Q30/16 ,  G01Q30/12

CPC分类号： G01Q30/16 ,  G01Q30/12

摘要： An apparatus (100) for performing atomic force microscopy is disclosed. The apparatus comprises an AFM measurement unit (102) configured to operate in a first controlled atmosphere (300) and a pretreatment unit (101) configured to operate in a second controlled atmosphere (400), the second controlled atmosphere being different from the first controlled atmosphere. The pretreatment unit is connected to the AFM measurement unit. In one embodiment, the second controlled atmosphere is a vacuum atmosphere, whereas the first controlled atmosphere includes at least an inert gas.

摘要翻译： 公开了一种用于进行原子力显微镜的装置（100）。 该装置包括被配置为在第一受控气氛（300）中操作的AFM测量单元（102）和被配置为在第二受控气氛（400）中操作的预处理单元（101），所述第二受控气氛不同于第一受控气氛 大气层。 预处理单元连接到AFM测量单元。 在一个实施方案中，第二受控气氛是真空气氛，而第一受控气氛至少包括惰性气体。

公开(公告)号：US20100140473A1

公开(公告)日：2010-06-10

申请号：US12596707

申请日：2008-04-24

申请人： Volker Klocke

发明人： Volker Klocke

IPC分类号： G01B21/30 ,  G01B21/20 ,  G01B5/28 ,  G01Q70/00

CPC分类号： G01Q10/02 ,  G01B21/04 ,  G01Q10/04 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/2025 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/28

摘要： A nanorobot module with a measurement device for the measurement of spatial surface properties with a measurement range in the centimetre range and a resolution in the nanometre range, that can be arranged in a vacuum chamber, for example the vacuum chamber of a microscope. Along with this integration of the nanorobot module into a vacuum chamber, the disclosure further relates to the automation of the module in the chamber system, in particular the connection of the controller of the nanorobot system and the chamber system by the provision of an interface between both systems. Finally, the disclosure relates to a mechatronic exchange adapter for the flexible securing of nanorobot modules within a vacuum chamber, in particular the disclosure relates to an exchange adapter, which preferably in one process electrically connects a nanorobot module and mechanically secures it so that it is guided with high precision and without play.

摘要翻译： 一种具有用于测量空间表面性质的测量装置的纳米机器人模块，其具有在厘米范围内的测量范围和在纳米范围内的分辨率，其可以布置在真空室中，例如显微镜的真空室中。 随着将纳米机器人模块集成到真空室中，本发明还涉及腔室系统中的模块的自动化，特别是通过提供纳米机器人系统的控制器与腔室系统之间的界面的连接 两个系统。 最后，本公开涉及一种用于在真空室内柔性固定纳米机架模块的机电一体式交换适配器，特别地，本公开涉及一种交换适配器，其优选地在一个过程中电连接纳米机架模块并机械地固定它，使得它是 引导精准，无间隙。

公开(公告)号：US06504365B2

公开(公告)日：2003-01-07

申请号：US09966342

申请日：2001-09-27

申请人： Shinichi Kitamura

发明人： Shinichi Kitamura

IPC分类号： G01R3302

CPC分类号： G01R33/0385 ,  G01Q30/16 ,  G01Q60/08 ,  Y10S977/865

摘要： A magnetic force microscope capable of producing a topographic image containing no magnetic information. In the topographic imaging mode, an error amplifier controls the distance between a cantilever and the sample to cause the oscillation frequency of the cantilever to shift from f0 to f1, for causing a probe to tap each observation position (xi, yj) on the sample. According to the results of the control, topographic information in the observation position (xi, yj) is obtained. In the magnetic force imaging mode, the probe is placed on the observation position (xi, yj), and the distance between the cantilever and the sample is held to the distance used in the topographic imaging mode according to information stored in the memory. At this time, the amplitude of the cantilever is so adjusted that the probe does not tap the sample. Magnetic information about the observation position (xi, yj) on the sample is obtained based on the oscillation frequency of the cantilever at this time.