METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER AND A MACH ZEHNDER MODULATOR
    1.
    发明申请
    METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER AND A MACH ZEHNDER MODULATOR 有权
    混合激光和MACH ZEHNDER调制器的混合集成方法和系统

    公开(公告)号:US20120057609A1

    公开(公告)日:2012-03-08

    申请号:US13040154

    申请日:2011-03-03

    IPC分类号: H01S3/10

    摘要: A tunable pulsed laser includes a substrate comprising a silicon material and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The tunable pulsed laser also includes a waveguide disposed in the substrate and optically coupled to the gain medium, an optical modulator optically coupled to the gain medium, a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, and a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate. The tunable pulsed laser further includes an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide and an output mirror.

    摘要翻译: 可调谐脉冲激光器包括包含硅材料和耦合到该衬底的增益介质的衬底。 增益介质包括化合物半导体材料。 可调脉冲激光器还包括布置在衬底中并光学耦合到增益介质的光波导,光学耦合到增益介质的光学调制器,以第一反射光谱为特征并设置在衬底中的第一波长选择元件,以及第二 波长选择元件,其特征在于第二反射光谱并且设置在基板中。 可调脉冲激光还包括设置在基板中并连接第一波长选择元件,第二波长选择元件和波导的光耦合器和输出镜。

    METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER FOR A CABLE TV TRANSMITTER
    2.
    发明申请
    METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER FOR A CABLE TV TRANSMITTER 有权
    用于电缆电视发射器的可变激光器的混合集成方法和系统

    公开(公告)号:US20120057079A1

    公开(公告)日:2012-03-08

    申请号:US13040181

    申请日:2011-03-03

    IPC分类号: H04N5/40

    摘要: A cable television transmitter includes a substrate including a silicon material, control electronics disposed in the substrate, and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The cable television transmitter also includes an optical modulator optically coupled to the gain medium and electrically coupled to the control electronics, a waveguide disposed in the substrate and optically coupled to the gain medium, a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, and a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate. The cable television transmitter further includes an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide and an output mirror.

    摘要翻译: 一种有线电视发射器包括:衬底,包括硅材料,设置在衬底中的控制电子器件和耦合到衬底的增益介质。 增益介质包括化合物半导体材料。 有线电视发射机还包括光学耦合到增益介质并电耦合到控制电子器件的光学调制器,设置在衬底中并光学耦合到增益介质的波导,第一波长选择元件,其特征在于第一反射光谱并且被布置 以及第二波长选择元件,其特征在于第二反射光谱并设置在基板中。 有线电视发射机还包括设置在基板中并连接第一波长选择元件,第二波长选择元件和波导的光耦合器和输出镜。

    Tunable laser modules incorporating micromachined pellicle splitters
    3.
    发明申请
    Tunable laser modules incorporating micromachined pellicle splitters 审中-公开
    可调谐激光模块结合微加工防护薄膜分离器

    公开(公告)号:US20060082889A1

    公开(公告)日:2006-04-20

    申请号:US11294965

    申请日:2005-12-06

    IPC分类号: G02B27/12

    摘要: A micromachined pellicle beam splitter and method of manufacture thereof are disclosed. In one embodiment, the beam splitter includes a silicon frame with a silicon nitride membrane attached to the frame and covering an opening through the frame. Other materials may be utilized, however, the coefficient of thermal expansion (CTE) of the membrane should be greater than that of the frame. The beam splitter may be manufactured by coating a silicon substrate with a layer of silicon nitride, patterning an opposite side of the silicon substrate with a photoresist or a metallic layer to define an opening an etching an opening through the substrate to the silicon nitride with either a dry etch or wet etch technique. An improved tunable laser module incorporating the micromachined pellicle beam splitter and a method of tuning a laser diode are also disclosed.

    摘要翻译: 公开了一种微加工防护薄膜分束器及其制造方法。 在一个实施例中,分束器包括硅框架,其具有附接到框架并覆盖通过框架的开口的氮化硅膜。 可以使用其它材料,然而,膜的热膨胀系数(CTE)应该大于框架的热膨胀系数(CTE)。 分束器可以通过用氮化硅层涂覆硅衬底来制造,用光致抗蚀剂或金属层将硅衬底的相对侧图案化以限定开口,通过衬底蚀刻通过衬底到氮化硅的开口,或者 干蚀刻或湿蚀刻技术。 还公开了一种结合有微加工防护薄膜分束器的改进的可调激光器模块和调谐激光二极管的方法。

    Method and system for hybrid integration of a tunable laser and a mach zehnder modulator
    4.
    发明授权
    Method and system for hybrid integration of a tunable laser and a mach zehnder modulator 有权
    可调谐激光器和马赫祖尔德调制器的混合集成方法和系统

    公开(公告)号:US08605766B2

    公开(公告)日:2013-12-10

    申请号:US13040154

    申请日:2011-03-03

    IPC分类号: H01S5/00

    摘要: A tunable pulsed laser includes a substrate comprising a silicon material and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The tunable pulsed laser also includes a waveguide disposed in the substrate and optically coupled to the gain medium, an optical modulator optically coupled to the gain medium, a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, and a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate. The tunable pulsed laser further includes an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide and an output mirror.

    摘要翻译: 可调谐脉冲激光器包括包含硅材料和耦合到该衬底的增益介质的衬底。 增益介质包括化合物半导体材料。 可调脉冲激光器还包括布置在衬底中并光学耦合到增益介质的光波导,光学耦合到增益介质的光学调制器,以第一反射光谱为特征并设置在衬底中的第一波长选择元件,以及第二 波长选择元件,其特征在于第二反射光谱并且设置在基板中。 可调脉冲激光还包括设置在基板中并连接第一波长选择元件,第二波长选择元件和波导的光耦合器和输出镜。

    Method and system for hybrid integration of an opto-electronic integrated circuit
    5.
    发明授权
    Method and system for hybrid integration of an opto-electronic integrated circuit 有权
    光电集成电路混合集成方法与系统

    公开(公告)号:US08368995B2

    公开(公告)日:2013-02-05

    申请号:US13076205

    申请日:2011-03-30

    IPC分类号: G02F1/01 H04B10/12 G02B6/26

    摘要: An opto-electronic integrated circuit (OEIC) includes an SOI substrate, a set of composite optical transmitters, a set of composite optical receivers, and control electronics disposed in the substrate and electrically coupled to the set of composite optical transmitters and receivers. Each of the composite optical transmitters includes a gain medium including a compound semiconductor material and an optical modulator. Each of the composite optical receivers includes a waveguide disposed in the SOI substrate, an optical detector bonded to the SOI substrate, and a bonding region disposed between the SOI substrate and the optical detector. The bonding region includes a metal-assisted bond at a first portion of the bonding region and a direct semiconductor-semiconductor bond at a second portion of the bonding region. The OEIC also includes control electronics disposed in the SOI substrate and electrically coupled to the set of composite optical transmitters and the set of composite optical receivers.

    摘要翻译: 光电集成电路(OEIC)包括SOI衬底,一组复合光发射器,一组复合光接收器和设置在衬底中的电耦合到该组合的光发射器和接收器的控制电子器件。 每个复合光发射机包括包括化合物半导体材料和光调制器的增益介质。 每个复合光接收机包括布置在SOI衬底中的波导,接合到SOI衬底的光学检测器和设置在SOI衬底和光学检测器之间的接合区域。 接合区域包括在接合区域的第一部分处的金属辅助键和在接合区域的第二部分处的直接半导体 - 半导体结合。 OEIC还包括设置在SOI衬底中并且电耦合到该组复合光发射器和该组复合光接收器的控制电子装置。

    Method and system for hybrid integration of a tunable laser and a phase modulator
    7.
    发明授权
    Method and system for hybrid integration of a tunable laser and a phase modulator 有权
    可调谐激光器和相位调制器的混合集成方法和系统

    公开(公告)号:US08559470B2

    公开(公告)日:2013-10-15

    申请号:US13040179

    申请日:2011-03-03

    IPC分类号: H01S3/10

    摘要: A tunable laser includes a substrate comprising a silicon material and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The tunable laser also includes an optical modulator optically coupled to the gain medium, a phase modulator optically coupled to the optical modulator, and a waveguide disposed in the substrate and optically coupled to the gain medium. The tunable laser further includes a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate, an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide, and an output mirror.

    摘要翻译: 可调谐激光器包括包括硅材料的基板和与基板耦合的增益介质。 增益介质包括化合物半导体材料。 可调谐激光器还包括光学耦合到增益介质的光学调制器,光学耦合到光学调制器的相位调制器,以及设置在衬底中并光学耦合到增益介质的波导。 所述可调谐激光器还包括第一波长选择元件,其特征在于第一反射光谱并且设置在所述基板中,第二波长选择元件,其特征在于第二反射光谱并且设置在所述基板中,设置在所述基板中并连接所述第一波长选择元件 波长选择元件,第二波长选择元件和波导,以及输出镜。

    Method and system for hybrid integration of a tunable laser for a cable TV transmitter
    8.
    发明授权
    Method and system for hybrid integration of a tunable laser for a cable TV transmitter 有权
    用于有线电视发射机的可调谐激光器的混合集成方法和系统

    公开(公告)号:US08867578B2

    公开(公告)日:2014-10-21

    申请号:US13040181

    申请日:2011-03-03

    摘要: A cable television transmitter includes a substrate including a silicon material, control electronics disposed in the substrate, and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The cable television transmitter also includes an optical modulator optically coupled to the gain medium and electrically coupled to the control electronics, a waveguide disposed in the substrate and optically coupled to the gain medium, a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, and a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate. The cable television transmitter further includes an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide and an output mirror.

    摘要翻译: 一种有线电视发射器包括:衬底,包括硅材料,设置在衬底中的控制电子器件和耦合到衬底的增益介质。 增益介质包括化合物半导体材料。 有线电视发射机还包括光学耦合到增益介质并电耦合到控制电子器件的光学调制器,设置在衬底中并光学耦合到增益介质的波导,第一波长选择元件,其特征在于第一反射光谱并且被布置 以及第二波长选择元件,其特征在于第二反射光谱并设置在基板中。 有线电视发射机还包括设置在基板中并连接第一波长选择元件,第二波长选择元件和波导的光耦合器和输出镜。

    Method and system for hybrid integration of a tunable laser
    9.
    发明授权
    Method and system for hybrid integration of a tunable laser 有权
    可调激光器混合集成的方法和系统

    公开(公告)号:US08615025B2

    公开(公告)日:2013-12-24

    申请号:US12903025

    申请日:2010-10-12

    IPC分类号: H01S3/10

    摘要: A tunable laser includes a substrate comprising a silicon material and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The tunable laser also includes a waveguide disposed in the substrate and optically coupled to the gain medium, a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, and a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate. The tunable laser further includes an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide and an output mirror.

    摘要翻译: 可调谐激光器包括包括硅材料的基板和与基板耦合的增益介质。 增益介质包括化合物半导体材料。 可调谐激光器还包括布置在衬底中并光学耦合到增益介质的波导,第一波长选择元件,其特征在于第一反射光谱并且设置在衬底中,以及第二波长选择元件,其特征在于第二反射光谱并且被布置 在基材中。 可调激光器还包括设置在基板中并连接第一波长选择元件,第二波长选择元件和波导的光耦合器和输出镜。

    METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER AND A PHASE MODULATOR
    10.
    发明申请
    METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER AND A PHASE MODULATOR 有权
    用于混合激光和相位调制器的混合集成的方法和系统

    公开(公告)号:US20120057610A1

    公开(公告)日:2012-03-08

    申请号:US13040179

    申请日:2011-03-03

    IPC分类号: H01S3/10

    摘要: A tunable laser includes a substrate comprising a silicon material and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The tunable laser also includes an optical modulator optically coupled to the gain medium, a phase modulator optically coupled to the optical modulator, and a waveguide disposed in the substrate and optically coupled to the gain medium. The tunable laser further includes a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate, an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide, and an output mirror.

    摘要翻译: 可调谐激光器包括包括硅材料的基板和与基板耦合的增益介质。 增益介质包括化合物半导体材料。 可调谐激光器还包括光学耦合到增益介质的光学调制器,光学耦合到光学调制器的相位调制器,以及设置在衬底中并光学耦合到增益介质的波导。 所述可调谐激光器还包括第一波长选择元件,其特征在于第一反射光谱并且设置在所述基板中,第二波长选择元件,其特征在于第二反射光谱并且设置在所述基板中,设置在所述基板中并连接所述第一波长选择元件 波长选择元件,第二波长选择元件和波导,以及输出镜。