Multiple gas injection apparatus for LPCVD equipment
    1.
    发明授权
    Multiple gas injection apparatus for LPCVD equipment 失效
    用于LPCVD设备的多重注气装置

    公开(公告)号:US4756272A

    公开(公告)日:1988-07-12

    申请号:US869638

    申请日:1986-06-02

    摘要: A quick-release multiple gas injection pipe connector fitting for removable attachment to a gas reaction chamber having a plurality of gas injection passages. The fitting permits a number of gas inlet lines to be removed from or attached to a reaction chamber fixture in one operation without a separate removal or attachment step for each gas line. The fitting also facilitates a process where the reaction gases are preferably mixed only at the reaction site and not before.

    摘要翻译: 一种快速释放多气体注入管连接器配件,用于可拆卸地连接到具有多个气体注入通道的气体反应室。 该装置允许在一个操作中将多个气体入口管路从反应室固定装置中移除或连接到反应室固定装置上,而不需要为每个气体管线单独地移除或附接步骤。 该配件还有助于其中反应气体优选仅在反应部位而不是之前混合的方法。

    Heat exchange apparatus for high temperature LPCVD equipment
    2.
    发明授权
    Heat exchange apparatus for high temperature LPCVD equipment 失效
    用于高温LPCVD设备的换热装置

    公开(公告)号:US4630669A

    公开(公告)日:1986-12-23

    申请号:US765640

    申请日:1985-08-15

    摘要: A heat exchanger apparatus having two sleeves which fit together to seal a sinuous heat exchange fluid channel between them where the channel is open along its length prior to assembly. The sleeves may be made removable to permit easy cleaning of the heat exchange fluid channel. The heat exchange fluid channel may thus be directly cleaned along its entire length in contrast to conventional heat exchangers employing tubes, where the tube interior can be accessed only from the ends. In one embodiment, the channel has a rectangular cross-section to enhance the heat exchange capability of the apparatus.

    摘要翻译: 一种具有两个套筒的热交换器装置,它们组合在一起,以密封其间的弯曲的热交换流体通道,其中通道在组装之前沿其长度敞开。 套筒可以是可移除的,以允许容易地清洁热交换流体通道。 因此,与使用管的常规热交换器相比,热交换流体通道可以沿其整个长度直接清洁,其中管内部仅可从端部进入。 在一个实施例中,通道具有矩形横截面以增强设备的热交换能力。