公开(公告)号：US07316963B2

公开(公告)日：2008-01-08

申请号：US11321590

申请日：2005-12-30

申请人： Won Wook Lee

发明人： Won Wook Lee

IPC分类号： H01L21/76

CPC分类号： H01L27/105 ,  H01L23/544 ,  H01L27/1052 ,  H01L2223/5446 ,  H01L2924/0002 ,  H01L2924/00

摘要： Disclosed herein is a method for manufacturing a semiconductor device. According to the present invention, a device isolation film having a step difference occurring during a process of forming a device isolation film in a scribe lane region serves as a first alignment key, and a second alignment key formed during a process of forming a recess gate region is used in the subsequent process, thereby improving the process steps and product cost.

摘要翻译： 本文公开了一种半导体器件的制造方法。 根据本发明，在划线路区域中形成器件隔离膜的工序期间具有阶梯差的器件隔离膜用作第一对准键，以及在形成凹槽的过程中形成的第二对准键 区域用于后续过程，从而改进工艺步骤和产品成本。

公开(公告)号：US07702259B2

公开(公告)日：2010-04-20

申请号：US11441057

申请日：2006-05-26

申请人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

发明人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

IPC分类号： G03G15/01

CPC分类号： G03G15/00 ,  G03G15/04045

摘要： Provided are a multi-pass image forming apparatus and an image forming method using the same. The multi-pass image forming apparatus includes a plurality of developers for forming a plurality of electrostatic latent images using toners having different polarities and colors in one development process and for forming a multi-color image in at least two development processes; an exposure unit for forming the plurality of the electrostatic latent images on a photosensitive medium; and an intermediate transferring unit for having a toner images transferred thereon from the photosensitive medium that overlap to form the multi-color image, wherein the toner image may overlap another toner image on the intermediate transferring unit.

摘要翻译： 提供一种多遍图像形成装置和使用其的图像形成方法。 多遍图像形成装置包括：多个显影剂，用于在一个显影过程中使用具有不同极性和颜色的调色剂形成多个静电潜像，并且用于在至少两个显影过程中形成多色图像; 用于在感光介质上形成多个静电潜像的曝光单元; 以及中间转印单元，用于使从其上重叠形成多色图像的感光介质转印到其上的调色剂图像，其中调色剂图像可能与中间转印单元上的另一个调色剂图像重叠。

公开(公告)号：US20090047045A1

公开(公告)日：2009-02-19

申请号：US12111269

申请日：2008-04-29

申请人： So Won Sheen ,  Won Wook Lee

发明人： So Won Sheen ,  Won Wook Lee

IPC分类号： G03G15/09

CPC分类号： G03G15/0928 ,  G03G15/095 ,  G03G2215/0634

摘要： An image forming apparatus capable of collecting residual toner from the donor roller by means of a plurality of magnetic rollers and consequently, reducing the occurrences of possible ghost phenomenon caused by the toner residue. The image forming apparatus includes an image receiving member having an electrostatic latent image formed on a surface thereof, a donor roller to receive a toner and form a layer of toner on an outer circumferential surface thereof, the donor roller being arranged to oppose the image receiving member so as to develop with toner the electrostatic latent image of the image receiving member, and a plurality of magnetic rollers each to support magnetic brushes of carrier.

摘要翻译： 一种图像形成装置，其能够通过多个磁性辊从供体辊收集残留调色剂，从而减少由调色剂残留物引起的可能的重影现象的发生。 图像形成装置包括具有形成在其表面上的静电潜像的图像接收构件，供体辊，用于接收调色剂并在其外周表面上形成调色剂层，供体辊布置成与图像接收相对 以便通过调色剂显影图像接收构件的静电潜像，以及多个磁性辊，每个磁辊用于支撑载体的磁刷。

公开(公告)号：US20060285883A1

公开(公告)日：2006-12-21

申请号：US11441057

申请日：2006-05-26

申请人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

发明人： Jong-moon Eun ,  Hisao Okada ,  Hyun-cheol Lee ,  Won Choe ,  Hyun-wook Bae ,  Won-wook Lee ,  So-won Sheen ,  In-cheol Jeon

IPC分类号： G03G15/01

CPC分类号： G03G15/00 ,  G03G15/04045

摘要： Provided are a multi-pass image forming apparatus and an image forming method using the same. The multi-pass image forming apparatus includes a plurality of developers for forming a plurality of electrostatic latent images using toners having different polarities and colors in one development process and for forming a multi-color image in at least two development processes; an exposure unit for forming the plurality of the electrostatic latent images on a photosensitive medium; and an intermediate transferring unit for having a toner images transferred thereon from the photosensitive medium that overlap to form the multi-color image, wherein the toner image may overlap another toner image on the intermediate transferring unit.

摘要翻译： 提供一种多遍图像形成装置和使用其的图像形成方法。 多遍图像形成装置包括：多个显影剂，用于在一个显影过程中使用具有不同极性和颜色的调色剂形成多个静电潜像，并且用于在至少两个显影过程中形成多色图像; 用于在感光介质上形成多个静电潜像的曝光单元; 以及中间转印单元，用于使从其上重叠形成多色图像的感光介质转印到其上的调色剂图像，其中调色剂图像可能与中间转印单元上的另一个调色剂图像重叠。

公开(公告)号：US20050014089A1

公开(公告)日：2005-01-20

申请号：US10811558

申请日：2004-03-29

申请人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

发明人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

IPC分类号： G03F7/11 ,  C08F130/02 ,  C08L29/04 ,  C09D5/33 ,  C09D143/02 ,  G03C1/76 ,  G03F7/09 ,  H01L21/027

CPC分类号： G03F7/091

摘要： Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I, its preparation method and an organic anti-reflective coating composition with respect to an ultra-fine pattern formation process of the photoresist for photolithography technique using ArF light source with a wavelength of 193 nm or VUV light source with a wavelength of 157 nm. An organic anti-reflective coating polymer capable of protecting a photoresist from amines in the atmosphere to minimize the post exposure delay effect after exposure to light and, at the same time, enhances notching status, such as, a pattern distortion caused by diffused reflection, and reducing reflection rate to minimize the swing effect. wherein m is an integer ranging from 5 to 5000.

摘要翻译： 本发明公开了一种有机抗反射涂层聚合物，其具有由下式I表示的结构，其制备方法和有机抗反射涂层组合物相对于使用ArF光源的光刻技术的光致抗蚀剂的超细图案形成方法 波长为193nm，波长157nm的VUV光源。 能够在大气中保护光致抗蚀剂免受胺的影响的有机抗反射涂层聚合物，以使曝光后的曝光后延迟效果最小化，同时增加凹陷状态，例如由扩散反射引起的图案变形， 并减少反射率以最小化摆动效果。 其中m为5至5000的整数。

公开(公告)号：US07364837B2

公开(公告)日：2008-04-29

申请号：US11835082

申请日：2007-08-07

申请人： Won Wook Lee ,  Geun Su Lee ,  Sam Young Kim

发明人： Won Wook Lee ,  Geun Su Lee ,  Sam Young Kim

IPC分类号： G03F7/00 ,  G03F7/38

CPC分类号： G03F7/38 ,  G03F7/168

摘要： Photoresist cleaning solutions are used to clean semiconductor substrates before or after an exposing step when photoresist patterns are formed. The cleaning solutions include H2O and a nonionic surfactant compound represented by Formula 1. By spraying the disclosed cleaning solutions on a surface of the semiconductor substrate before or after exposing step to form a photoresist pattern, the desired pattern only is obtained and unnecessary patterns generated in undesired regions by ghost images are avoided as excess acid generated by the photoacid generator is neutralized and removed and damage to unexposed portions of the photoresist polymer is avoided. wherein R1 and R2 are independently H, C1-C20 alkyl, C5-C25 alkyl aryl or C1-C10 ester; m is 1 or 2; n is an integer ranging from 10 to 300; and o is 0 or 1.

摘要翻译： 当形成光致抗蚀剂图案时，光刻胶清洁溶液用于在曝光步骤之前或之后清洁半导体衬底。 清洗溶液包括H 2 O 2和由式1表示的非离子表面活性剂化合物。通过在暴露步骤之前或之后将所公开的清洁溶液喷涂在半导体衬底的表面上以形成光致抗蚀剂图案，所需的 避免了图案，并且避免了由不想要的区域产生的重影图像产生的不必要的图案，因为光致酸发生器产生的过量酸被中和和去除，并且避免了光致抗蚀剂聚合物的未曝光部分的损坏。 其中R 1和R 2独立地为H，C 1 -C 20烷基，C 5 烷基芳基或C 1 -C 10烷基酯; C 1 -C 15烷基芳基或C 1 -C 10烷基酯; m为1或2; n为10〜300的整数。 o为0或1。

公开(公告)号：US07198887B2

公开(公告)日：2007-04-03

申请号：US10811558

申请日：2004-03-29

申请人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

发明人： Geun-soo Lee ,  Cheol-kyu Bok ,  Seung-chan Moon ,  Ki-soo Shin ,  Won-wook Lee

IPC分类号： G03F7/20 ,  G03F7/30 ,  G03C1/825 ,  G03C1/835

CPC分类号： G03F7/091

摘要： Disclosed are an organic anti-reflective coating polymer having a structure represented by the following formula I, its preparation method and an organic anti-reflective coating composition with respect to an ultra-fine pattern formation process of the photoresist for photolithography technique using ArF light source with a wavelength of 193 nm or VUV light source with a wavelength of 157 nm. An organic anti-reflective coating polymer capable of protecting a photoresist from amines in the atmosphere to minimize the post exposure delay effect after exposure to light and, at the same time, enhances notching status, such as, a pattern distortion caused by diffused reflection, and reducing reflection rate to minimize the swing effect. wherein m is an integer ranging from 5 to 5000.

摘要翻译： 本发明公开了一种有机抗反射涂层聚合物，其具有由下式I表示的结构，其制备方法和有机抗反射涂层组合物相对于使用ArF光源的光刻技术的光致抗蚀剂的超细图案形成方法 波长为193nm，波长157nm的VUV光源。 能够在大气中保护光致抗蚀剂免受胺的影响的有机抗反射涂层聚合物，以使曝光后的曝光后延迟效果最小化，同时增加凹陷状态，例如由扩散反射引起的图案变形， 并减少反射率以最小化摆动效果。

公开(公告)号：US20060291906A1

公开(公告)日：2006-12-28

申请号：US11350124

申请日：2006-02-09

申请人： Won-wook Lee

发明人： Won-wook Lee

IPC分类号： G03G15/01

CPC分类号： G03G15/0173 ,  G03G2215/018

摘要： A color image forming apparatus includes a plurality of developers, an exposure unit forming a plurality of latent images on a photosensitive medium, and a power transmission unit simultaneously driving two of the developers that store toners having different polarities and colors. A charging unit converts toner images having different polarities, which are developed on the photosensitive medium, into toner images having the same polarity. The toner images are superpositionally transferred from the photosensitive medium to an intermediate transfer unit to form a color image.

摘要翻译： 彩色图像形成装置包括多个显影剂，在感光介质上形成多个潜像的曝光单元和同时驱动存储具有不同极性和颜色的调色剂的两个显影剂的电力传输单元。 充电单元将在感光介质上显影的具有不同极性的调色剂图像转换成具有相同极性的调色剂图像。 将调色剂图像从感光介质重叠地转印到中间转印单元以形成彩色图像。

公开(公告)号：US08422916B2

公开(公告)日：2013-04-16

申请号：US12969787

申请日：2010-12-16

申请人： Won Wook Lee

发明人： Won Wook Lee

IPC分类号： G03G15/02

CPC分类号： G03G15/0291

摘要： A charge device including an electrode arranged to face an object to be charged, and an image forming apparatus having the same. The electrode includes an electrode body made of a conductive material, a first layer made of carbon and formed on an outer surface of the electrode body, and a second layer made of a metal and formed between the electrode body and the first layer, to reduce and/or impede oxidization thereof.

摘要翻译： 包括布置成面对被充电物体的电极的充电装置和具有该电荷的图像形成装置。 电极包括由导电材料制成的电极体，由碳制成并形成在电极体的外表面上的第一层和形成在电极体和第一层之间的金属制成的第二层，以减少 和/或阻碍其氧化。

公开(公告)号：US20110158693A1

公开(公告)日：2011-06-30

申请号：US12969787

申请日：2010-12-16

申请人： Won Wook LEE

发明人： Won Wook LEE

IPC分类号： G03G15/02

CPC分类号： G03G15/0291

摘要： A charge device including an electrode arranged to face an object to be charged, and an image forming apparatus having the same. The electrode includes an electrode body made of a conductive material, a first layer made of carbon and formed on an outer surface of the electrode body, and a second layer made of a metal and formed between the electrode body and the first layer, to reduce and/or impede oxidization thereof.

摘要翻译： 包括布置成面对被充电物体的电极的充电装置和具有该电荷的图像形成装置。 电极包括由导电材料制成的电极体，由碳制成并形成在电极体的外表面上的第一层和形成在电极体和第一层之间的金属制成的第二层，以减少 和/或阻碍其氧化。