Integrated type probe card and its fabrication method
    2.
    发明授权
    Integrated type probe card and its fabrication method 失效
    集成型探针卡及其制作方法

    公开(公告)号:US07057406B2

    公开(公告)日:2006-06-06

    申请号:US10822666

    申请日:2004-04-13

    CPC classification number: G01R31/2889

    Abstract: An integrated type probe card includes a circuit space converter having first and second contacts arranged at different density at two sides, probes connected to the contacts at one side of the circuit space converter that are arranged at a high density probes; a spring connector plate, which holds metal spring members in respective receiving holes thereof, a circuit board pressed on the metal spring members against the contacts at the other side of the circuit space converter that are arranged at a low density, and a level adjustment mechanism that accommodates the probes, the circuit space converter, the spring connector plate and the circuit board and enables the user to adjust the level status of the circuit space converter, keeping the circuit space converter electrically connected to the circuit board for transmitting test signal from the probes to the circuit board.

    Abstract translation: 集成式探针卡包括电路空间转换器,该电路空间转换器具有在两侧以不同密度布置的第一和第二触点,连接到以高密度探针布置的电路空间转换器一侧的触点的探针; 弹簧连接板,其在其各个容纳孔中保持金属弹簧构件,压在金属弹簧构件上的电路板抵靠电路空间转换器的另一侧以低密度排列的触点;电平调节机构 容纳探头,电路空间转换器,弹簧连接器板和电路板,使用户能够调整电路空间转换器的电平状态,保持电路空间转换器电连接到电路板,以将测试信号从 探针到电路板。

    High conducting thin-film nanoprobe card and its fabrication method
    3.
    发明授权
    High conducting thin-film nanoprobe card and its fabrication method 有权
    高导电薄膜纳米探针卡及其制作方法

    公开(公告)号:US07012441B2

    公开(公告)日:2006-03-14

    申请号:US10455447

    申请日:2003-06-06

    Abstract: A conducting thin-film nanoprobe card fabrication method includes the steps of: (a) arranging nanotubes on a substrate in vertical; (b) covering the nanotubes with a liquid polymeric resin and then hardening the polymeric resin to form a conducting nanomembrane; (c) removing a part of the polymeric resin from the conducting nanomembrane to expose one end of each nanotube to outside; (d) removing the substrate and preparing a ceramic substrate having contacts at one side and metal bumps at the other side and plated through holes electrically respectively connected with the contacts and the metal bumps; (e) mounting the nanomembrane on the ceramic substrate to hold the nanotubes in contact with the contacts of the ceramic substrate, and (f) forming recessed holes in the nanomembrane by etching and inserting a metal rod in each recessed hole to form a respective probe.

    Abstract translation: 导电薄膜纳米探针卡制造方法包括以下步骤:(a)在垂直于基底上布置纳米管; (b)用液体聚合物树脂覆盖纳米管,然后硬化聚合树脂以形成导电纳米膜; (c)从导电纳米膜中去除一部分聚合物树脂以将每个纳米管的一端暴露于外部; (d)去除衬底并制备在一侧具有接触的陶瓷衬底和另一侧的金属凸块,并且电镀通孔,电孔分别与触点和金属凸块连接; (e)将纳米膜安装在陶瓷基片上以使纳米管保持与陶瓷基片的触点接触,(f)通过在每个凹孔中蚀刻并插入金属棒形成相应的探头,在纳米膜中形成凹陷孔 。

    Integrated type probe card and its fabrication method
    4.
    发明申请
    Integrated type probe card and its fabrication method 失效
    集成型探针卡及其制作方法

    公开(公告)号:US20050174132A1

    公开(公告)日:2005-08-11

    申请号:US10822666

    申请日:2004-04-13

    CPC classification number: G01R31/2889

    Abstract: An integrated type probe card includes a circuit space converter having first and second contacts arranged at different density at two sides, probes connected to the contacts at one side of the circuit space converter that are arranged at a high density probes; a spring connector plate, which holds metal spring members in respective receiving holes thereof, a circuit board pressed on the metal spring members against the contacts at the other side of the circuit space converter that are arranged at a low density, and a level adjustment mechanism that accommodates the probes, the circuit space converter, the spring connector plate and the circuit board and enables the user to adjust the level status of the circuit space converter, keeping the circuit space converter electrically connected to the circuit board for transmitting test signal from the probes to the circuit board.

    Abstract translation: 集成式探针卡包括电路空间转换器,该电路空间转换器具有在两侧以不同密度布置的第一和第二触点,连接到以高密度探针布置的电路空间转换器一侧的触点的探针; 弹簧连接板,其在其各个容纳孔中保持金属弹簧构件,压在金属弹簧构件上的电路板抵靠电路空间转换器的另一侧以低密度排列的触点;电平调节机构 容纳探头,电路空间转换器,弹簧连接器板和电路板,使用户能够调整电路空间转换器的电平状态,保持电路空间转换器电连接到电路板,以将测试信号从 探针到电路板。

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