公开(公告)号：US5698036A

公开(公告)日：1997-12-16

申请号：US653469

申请日：1996-05-24

申请人： Nobuo Ishii ,  Yasuo Kobayashi ,  Naohisa Goto ,  Makoto Ando ,  Junichi Takada ,  Yasuhiro Horike

发明人： Nobuo Ishii ,  Yasuo Kobayashi ,  Naohisa Goto ,  Makoto Ando ,  Junichi Takada ,  Yasuhiro Horike

IPC分类号： C23C16/511 ,  H01J37/32 ,  C23C16/00

CPC分类号： H01J37/3222 ,  C23C16/511 ,  H01J37/32192 ,  H01J37/32229

摘要： A plasma processing apparatus comprises a processing container, a waveguide tube for guiding microwaves generated by a microwave generator, and a flat antenna member connected to the wave guide and disposed in the container to face a semiconductor wafer supported in the container. The antenna includes a plurality of short slits concentrically or spirally arranged in the antenna. The slits are spaced apart in the widthwise direction at intervals of 5% to 50% of a guide wavelength of the microwave, and each of the slits has a length of +30% of the guide wavelength centered with respect to half of the guide wavelength.

摘要翻译： 等离子体处理装置包括处理容器，用于引导由微波发生器产生的微波的波导管和连接到波导的平坦天线构件，并且设置在容器中以面对支撑在容器中的半导体晶片。 天线包括在天线中同心或螺旋地布置的多个短狭缝。 狭缝在宽度方向上以微波的引导波长的5％至50％的间隔间隔开，并且每个狭缝具有相对于引导波长的一半中心的引导波长的+ 30％的长度 。

公开(公告)号：US20070003433A1

公开(公告)日：2007-01-04

申请号：US10595262

申请日：2004-10-04

申请人： Yasuhiro Horike ,  Akinori Yokogawa

发明人： Yasuhiro Horike ,  Akinori Yokogawa

IPC分类号： G01N31/22

CPC分类号： B01L3/502753 ,  B01L3/502738 ,  B01L3/502746 ,  B01L2200/0621 ,  B01L2200/10 ,  B01L2300/0654 ,  B01L2300/0672 ,  B01L2300/0803 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/087 ,  B01L2400/0409 ,  B01L2400/0478 ,  B01L2400/0683 ,  B01L2400/086

摘要： An object of the invention is to provide a test chip which allows efficient and convenient separation and measurement. This invention provides a measuring chip for separating and measuring a target component in a sample by rotation around first and second axes of rotation. The measuring chip includes a centrifugal separation tube that centrifugally separates the target component from the sample by rotating the measuring chip around the first axis of rotation; a first holding section installed in the bottom of the centrifugal separation tube, wherein non-target components other than the target component in the sample are introduced therein by rotation around the first axis of rotation, and the first holding section holds the non-target components during rotation around the second axis of rotation; and a measuring section connected to one end of the centrifugal separation tube that measures the non-target components introduced from the centrifugal separation tube by rotation around the second axis of rotation.

摘要翻译： 本发明的一个目的是提供一种允许有效和方便的分离和测量的测试芯片。 本发明提供了一种用于通过围绕第一和第二旋转轴线旋转来分离和测量样品中的目标部件的测量芯片。 测量芯片包括离心分离管，其通过围绕第一旋转轴线旋转测量芯片将目标部件与样品离心分离; 安装在离心分离管的底部的第一保持部，其中，除了样品中的目标成分以外的非目标成分通过围绕第一旋转轴线的旋转导入其中，第一保持部保持非目标成分 围绕第二旋转轴旋转; 以及测量部分，其连接到离心分离管的一端，其通过围绕第二旋转轴线的旋转来测量从离心分离管引入的非目标部件。