公开(公告)号：US20150061452A1

公开(公告)日：2015-03-05

申请号：US14466352

申请日：2014-08-22

申请人： Kouji NAKATAKE ,  Yasushi YODA ,  Masaaki OHASHI

发明人： Kouji NAKATAKE ,  Yasushi YODA ,  Masaaki OHASHI

IPC分类号： H02K3/34 ,  H02K3/487

CPC分类号： H02K3/487 ,  H02K3/325 ,  H02K3/522 ,  H02K2203/12

摘要： A coil is wound via an electrically insulating member within a slot of a stator core of an electromagnetic motor which is formed of a stator and a rotor. Groove portions are formed to oppose one another in respective opposing portions of a slot opening portion side of the electrically insulating member. An electrically insulating sheet is disposed by being inserted into the pair of groove portions.

摘要翻译： 线圈通过电绝缘构件缠绕在由定子和转子形成的电磁马达的定子芯的槽内。 沟槽部分形成为在电绝缘构件的槽开口部侧的相对的相对部分中彼此相对。 电绝缘片通过插入一对槽部而设置。

公开(公告)号：USD610988S1

公开(公告)日：2010-03-02

申请号：US29337355

申请日：2009-05-20

申请人： Masaaki Oohashi ,  Mitsuaki Shioiri ,  Yasushi Yoda ,  Nobutoshi Nakamura ,  Takao Oshimori

设计人： Masaaki Oohashi ,  Mitsuaki Shioiri ,  Yasushi Yoda ,  Nobutoshi Nakamura ,  Takao Oshimori

公开(公告)号：USD610987S1

公开(公告)日：2010-03-02

申请号：US29337353

申请日：2009-05-20

申请人： Masaaki Oohashi ,  Mitsuaki Shioiri ,  Yasushi Yoda ,  Nobutoshi Nakamura ,  Takao Oshimori

设计人： Masaaki Oohashi ,  Mitsuaki Shioiri ,  Yasushi Yoda ,  Nobutoshi Nakamura ,  Takao Oshimori

公开(公告)号：US20090251672A1

公开(公告)日：2009-10-08

申请号：US12153984

申请日：2008-05-28

申请人： Hiroyuki Nagasaka ,  Yasushi Yoda

发明人： Hiroyuki Nagasaka ,  Yasushi Yoda

IPC分类号： G03B27/52

CPC分类号： G03F7/70925 ,  G03F7/70341 ,  G03F7/70716

摘要： An exposure apparatus exposes a substrate with an exposure light through an exposure liquid. The exposure apparatus includes an optical element from which the exposure light exits; a stage which is movable on the light-exit side of the optical element; a certain member which is provided on the stage; and a vibration generator which vibrates the certain member to apply vibration to the liquid in the liquid immersion space formed on the certain member. It is possible to suppress the deterioration of the performance which would be otherwise caused by any contamination.

摘要翻译： 曝光装置通过曝光液体曝光具有曝光光的基板。 曝光装置包括曝光光从该光学元件出射的光学元件; 可在光学元件的光出射侧移动的台; 在舞台上设置的某个会员; 以及振动发生器，其振动所述某些构件以对形成在所述特定构件上的液浸空间中的液体施加振动。 可以抑制否则由任何污染引起的性能的劣化。

公开(公告)号：US20080123067A1

公开(公告)日：2008-05-29

申请号：US11791335

申请日：2005-11-24

申请人： Yasushi Yoda ,  Yuichi Shibazaki ,  Dai Arai

发明人： Yasushi Yoda ,  Yuichi Shibazaki ,  Dai Arai

IPC分类号： G03B27/42 ,  G03B27/58

CPC分类号： G12B5/00 ,  G03F7/70341 ,  G03F7/70725 ,  G03F7/70733 ,  G03F7/709 ,  H01L21/682

摘要： Stopper mechanisms keep a wafer table and a measurement table from moving closer than a predetermined distance, and the blocking by the stopper mechanisms can also be released by a drive mechanism. Therefore, for example, in the case X-axis stators are driven independently, even if at least one of the two tables go out of control, the stopper mechanisms can keep the tables from coming into contact with each other, and for example, in the case the tables are to be in a state closer than the predetermined distance, by a release mechanism that releases the blocking of the stopper mechanisms, the tables can approach each other without the stopper mechanisms interfering.

摘要翻译： 止动器机构保持晶片台和测量台移动比预定距离更近，并且由止动机构的阻挡也可以由驱动机构释放。 因此，例如，在X轴定子单独驱动的情况下，即使两个表中的至少一个失控，停止机构也可以使台不会相互接触，例如， 通过释放机构来释放阻挡机构的阻挡，桌子将处于比预定距离更靠近的状态的情况下，桌子可以相互接近而不会阻塞制动器。

公开(公告)号：US06654100B2

公开(公告)日：2003-11-25

申请号：US09801683

申请日：2001-03-09

申请人： Yasushi Yoda

发明人： Yasushi Yoda

IPC分类号： G03B2742

CPC分类号： G03F7/707 ,  G03B27/426 ,  G03F7/70708

摘要： A stage device includes a switching device that switches between a first state in which a stage can move along a first movement reference surface, and a second state in which the stage can move along a second movement reference surface. The stage device can have first and second stages, and the switching device can switch both stages between the first and second states, such that the first stage is switched to the first movement reference surface while the second stage is switched to the second movement reference surface and vice-versa. Because of this, even if the first movement reference surface is formed on a first reference member (e.g., a holding plate) and the second reference surface is formed on a second reference member (e.g., guides), no problems are generated due to movement of the first and second stages. Compared to a case on which the first and second movement reference surfaces are formed on a single reference member, the first reference member can be made smaller. Therefore, difficulty of processing the reference surfaces can be overcome because it is easier to precisely process smaller surfaces.

公开(公告)号：US20100225185A1

公开(公告)日：2010-09-09

申请号：US12716543

申请日：2010-03-03

申请人： Masaaki Oohashi ,  Youichi Horiuchi ,  Yasushi Yoda ,  Kouji Nakatake

发明人： Masaaki Oohashi ,  Youichi Horiuchi ,  Yasushi Yoda ,  Kouji Nakatake

IPC分类号： H02K11/00

CPC分类号： H02K3/522 ,  H02K15/095

摘要： A pair of connecting wire hooks are disposed on both sides of a nozzle receiving groove in an extended slot space (a first extended space) to sandwich an extended portion of an extended virtual space (a third extended space). In this configuration, the pair of connecting wire hooks are not located within the third extended space. Thus, in the stator for rotary electric machine, the space factor of the winding portion may be increased in a situation where the connecting wire hook is disposed within the first extended space.

摘要翻译： 一对连接线钩设置在延伸槽空间（第一延伸空间）中的喷嘴接收槽的两侧，以夹持延伸的虚拟空间（第三延伸空间）的延伸部分。 在该构造中，一对连接线钩不在第三延伸空间内。 因此，在用于旋转电机的定子中，在连接线钩设置在第一延伸空间内的情况下，可以增加绕组部分的空间系数。

公开(公告)号：US07763999B2

公开(公告)日：2010-07-27

申请号：US11778975

申请日：2007-07-17

申请人： Masaaki Oohashi ,  Kouji Nakatake ,  Yasushi Yoda

发明人： Masaaki Oohashi ,  Kouji Nakatake ,  Yasushi Yoda

IPC分类号： H02K11/00

CPC分类号： H02K3/50 ,  H02K3/34 ,  H02K3/38 ,  H02K5/225 ,  H02K11/33 ,  H02K2203/03

摘要： A stator for rotary electric machines is provided, in which a volume occupied by winding portions may be increased and a connecting wire may readily be engaged to prevent from coming off. A plurality of connecting wire engaging hooks 23, with which the connecting wire extending from the winding portion is engaged, are respectively disposed in the vicinity of border portions between a plurality of magnetic pole sections 11 and a yoke 9, corresponding to the magnetic pole sections 11. A mounting location of a connector 29 on a circuit substrate 7 is determined so that all of ends of a plurality of terminal conductors of the connector may be located between adjoining two of the connecting wire engaging hooks 23. With this arrangement, all of the ends 31a of the plurality of terminal conductors 31 may be disposed between adjoining two of a plurality of the winding portions 3, and be spaced from the winding portions 3.

摘要翻译： 提供一种用于旋转电机的定子，其中卷绕部分占据的体积可以增加，并且连接线可以容易地接合以防止脱落。 从绕组部分延伸的连接线与其接合的多个连接线接合钩23分别设置在多个磁极部分11和磁轭9之间的边界部分附近，磁轭部分对应于磁极部分 确定连接器29在电路基板7上的安装位置，使得连接器的多个端子导体的所有端部可以位于相邻的两个连接线接合钩23之间。通过这种布置， 多个端子导体31的端部31a可以设置在多个绕组部3的相邻的两个之间，并且与绕组部3间隔开。

公开(公告)号：US20080055575A1

公开(公告)日：2008-03-06

申请号：US11892944

申请日：2007-08-28

申请人： Hiroyuki Nagasaka ,  Tomoharu Fujiwara ,  Masato Hamatani ,  Yasushi Yoda

发明人： Hiroyuki Nagasaka ,  Tomoharu Fujiwara ,  Masato Hamatani ,  Yasushi Yoda

IPC分类号： G03B27/42

CPC分类号： G03F7/70925 ,  G03F7/70341 ,  G03F7/7085 ,  G03F7/70866

摘要： An exposure apparatus is provided with a first member that can form liquid immersion with a first liquid so as to fill an optical path for exposure light with the first liquid, a second member that can form liquid immersion with a second liquid in a position distanced from the first member, and a vibration generator that imparts vibration to the second liquid between the predetermined member and the second member. The predetermined member is cleaned with the second liquid.

摘要翻译： 曝光装置设置有第一构件，其可以形成具有第一液体的液浸，以便填充用于与第一液体曝光的光的光路;第二构件，其可以与第二液体形成液体浸没在远离 所述第一构件以及在所述预定构件和所述第二构件之间向所述第二液体施加振动的振动发生器。 用第二液体清洁预定的构件。

公开(公告)号：US06583597B2

公开(公告)日：2003-06-24

申请号：US09899946

申请日：2001-07-06

申请人： Keiichi Tanaka ,  Yukiharu Okubo ,  Hiroaki Narushima ,  Yukio Kakizaki ,  Yasushi Yoda

发明人： Keiichi Tanaka ,  Yukiharu Okubo ,  Hiroaki Narushima ,  Yukio Kakizaki ,  Yasushi Yoda

IPC分类号： G05B1100

CPC分类号： G03F7/70816 ,  F16C29/025 ,  F16C32/0618 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/70758 ,  H01J37/20 ,  H01J2237/20278

摘要： Stage apparatus are disclosed for holding an object (e.g., substrate or reticle, for example) in a microlithography system, especially a system for performing microlithography in a vacuum environment. The stage apparatus provides movement of a stage (intended to hold the object) in X and Y directions of a guide plane. The stage is mounted to an arm member having at least first and second ends situated symmetrically relative to the stage. The ends include linear-motor movers that interact with corresponding stators, and include gas bearings on surfaces that slide relative to other surfaces as the stage is moved within the guide plane. The linear-motor movers can be one- or two-dimensional movers and desirably allow &thgr;-direction motion of the stage. Other configurations include guide members and sliders that undergo sliding motion relative to the guide members via non-contacting gas bearings. The sliders can be driven by a combination of a linear motor and a gas cylinder, the latter assisting the driving force by the linear motor during acceleration and deceleration of the stage.

摘要翻译： 公开了用于在微光刻系统中保持物体（例如，基板或掩模版）的平台装置，特别是用于在真空环境中执行微光刻的系统。 舞台装置提供在导向平面的X和Y方向上的舞台（用于保持物体）的运动。 平台安装到臂构件，臂构件具有至少第一和第二端相对于平台对称设置。 端部包括与相应的定子相互作用的线性马达驱动器，并且当载物台在引导平面内移动时，包括在相对于其它表面滑动的表面上的气体轴承。 线性马达移动器可以是一维或二维移动器，并且期望地允许载物台的θ方向运动。 其他构造包括引导构件和滑块，其经由非接触气体轴承相对于引导构件经历滑动运动。 滑块可以通过线性马达和气瓶的组合来驱动，后者在加速和减速阶段通过线性马达来辅助驱动力。