公开(公告)号：US08939107B2

公开(公告)日：2015-01-27

申请号：US13037077

申请日：2011-02-28

申请人： Yingling Yang ,  Gary J. Cheng ,  Ji Li ,  Yi Zhang

发明人： Yingling Yang ,  Gary J. Cheng ,  Ji Li ,  Yi Zhang

IPC分类号： B05C9/12 ,  B05C11/00 ,  B23K26/06 ,  B23K26/08 ,  B23K26/32 ,  B23K26/34 ,  B23K26/36 ,  B23K26/40

CPC分类号： B23K26/063 ,  B23K26/0622 ,  B23K26/0661 ,  B23K26/0853 ,  B23K26/32 ,  B23K26/324 ,  B23K26/34 ,  B23K26/36 ,  B23K2103/50

摘要： A confined pulsed laser deposition method and apparatus that includes an ablative coating between a transparent confinement layer and a backing plane, and a laser beam directed through the confinement layer to ablate the coating at generally ambient temperature and pressure, and using laser induced pressure to synthesize metaphase from the ablative coating. For example, diamond phase carbon can be synthesized from a graphite coating. The laser beam can be directed through a focus lens to control the final spot size, or through a beam diffuser to make the intensity more uniform. An XYZ-stage can position a desired target area of the ablative coating to be irradiated by the laser beam. The laser beam can have an intensity of less than about 6 GW/cm2, or less than about 4 GW/cm2. The laser beam can have an excitation wavelength of about 568 nm.

摘要翻译： 一种限制脉冲激光沉积方法和装置，其包括透明约束层和背衬平面之间的烧蚀涂层，以及引导通过约束层的激光束，以在一般环境温度和压力下烧蚀涂层，并且使用激光诱导压力合成 烧蚀涂层的中期。 例如，可以由石墨涂层合成金相碳。 激光束可以被引导通过聚焦透镜来控制最终光斑尺寸，或者通过光束漫射器使得强度更均匀。 XYZ级可以定位由激光束照射的烧蚀涂层的期望目标区域。 激光束可以具有小于约6GW / cm 2或小于约4GW / cm 2的强度。 激光束可以具有约568nm的激发波长。

公开(公告)号：US20120021559A1

公开(公告)日：2012-01-26

申请号：US13113386

申请日：2011-05-23

申请人： Gary J. Cheng ,  Martin Yi Zhang ,  Yingling Yang

发明人： Gary J. Cheng ,  Martin Yi Zhang ,  Yingling Yang

IPC分类号： H01L31/18 ,  B23K26/00

CPC分类号： B23K26/352 ,  H01L31/0322 ,  H01L31/03923 ,  H01L31/03925 ,  H01L31/1836 ,  H01L31/1852 ,  H01L31/1872 ,  Y02E10/541 ,  Y02E10/544 ,  Y02P70/521

摘要： A system and method for enhancing the conversion efficiency of thin film photovoltaics. The thin film structure includes a photovoltaic absorbent layer covered by a confinement layer. A laser beam passes through the confinement layer and hits the photovoltaic absorbent layer. The laser can be pulsed to create localized rapid heating and cooling of the photovoltaic absorbent layer. The confinement layer confines the laser induced plasma plume creating a localized high-pressure condition for the photovoltaic absorbent layer. The laser beam can be scanned across specific regions of the thin film structure. The laser beam can be pulsed as a series of short pulses. The photovoltaic absorbent layer can be made of various materials including copper indium diselenide, gallium arsenide, and cadmium telluride. The photovoltaic absorbent layer can be sandwiched between a substrate and the confinement layer, and a molybdenum layer can be between the substrate and the photovoltaic absorbent layer.

摘要翻译： 一种提高薄膜光伏转换效率的系统和方法。 薄膜结构包括被限制层覆盖的光伏吸收层。 激光束通过限制层并撞击光伏吸收层。 激光可以被脉冲以产生光伏吸收层的局部快速加热和冷却。 限制层限制激光诱导的等离子体羽流，为光伏吸收层产生局部高压条件。 可以在薄膜结构的特定区域上扫描激光束。 激光束可以作为一系列短脉冲脉冲。 光电吸收层可以由各种材料制成，包括二硒硒化铜，砷化镓和碲化镉。 光电吸收层可以夹在基板和限制层之间，钼层可以在基板和光电吸收层之间。

公开(公告)号：US08349713B2

公开(公告)日：2013-01-08

申请号：US13113386

申请日：2011-05-23

申请人： Gary J. Cheng ,  Martin Yi Zhang ,  Yingling Yang

发明人： Gary J. Cheng ,  Martin Yi Zhang ,  Yingling Yang

IPC分类号： H01L21/20

CPC分类号： B23K26/352 ,  H01L31/0322 ,  H01L31/03923 ,  H01L31/03925 ,  H01L31/1836 ,  H01L31/1852 ,  H01L31/1872 ,  Y02E10/541 ,  Y02E10/544 ,  Y02P70/521

摘要： A system and method for enhancing the conversion efficiency of thin film photovoltaics. The thin film structure includes a photovoltaic absorbent layer covered by a confinement layer. A laser beam passes through the confinement layer and hits the photovoltaic absorbent layer. The laser can be pulsed to create localized rapid heating and cooling of the photovoltaic absorbent layer. The confinement layer confines the laser induced plasma plume creating a localized high-pressure condition for the photovoltaic absorbent layer. The laser beam can be scanned across specific regions of the thin film structure. The laser beam can be pulsed as a series of short pulses. The photovoltaic absorbent layer can be made of various materials including copper indium diselenide, gallium arsenide, and cadmium telluride. The photovoltaic absorbent layer can be sandwiched between a substrate and the confinement layer, and a molybdenum layer can be between the substrate and the photovoltaic absorbent layer.

摘要翻译： 一种提高薄膜光伏转换效率的系统和方法。 薄膜结构包括被限制层覆盖的光伏吸收层。 激光束通过限制层并撞击光伏吸收层。 激光可以被脉冲以产生光伏吸收层的局部快速加热和冷却。 限制层限制激光诱导的等离子体羽流，为光伏吸收层产生局部高压条件。 可以在薄膜结构的特定区域上扫描激光束。 激光束可以作为一系列短脉冲脉冲。 光电吸收层可以由各种材料制成，包括二硒硒化铜，砷化镓和碲化镉。 光电吸收层可以夹在基板和限制层之间，钼层可以在基板和光电吸收层之间。

公开(公告)号：US20110283762A1

公开(公告)日：2011-11-24

申请号：US13113408

申请日：2011-05-23

申请人： Gary J. Cheng ,  Huang Gao ,  Yingling Yang

发明人： Gary J. Cheng ,  Huang Gao ,  Yingling Yang

IPC分类号： B21D26/02

CPC分类号： B21D26/06 ,  Y10T29/49805 ,  Y10T29/49806

摘要： A laser nanoforming system and method for forming three-dimensional nanostructures from a metallic surface. A laser beam is directed to hit and explode an ablative layer to generate a shockwave that exerts a force on the metallic surface to form an inverse nanostructure of an underlying mold. A dry lubricant can be located between the metallic surface and mold to reduce friction. A confinement layer substantially transparent to the laser beam can confine the shockwave. A cushion layer can protect the mold from damage. A flyer layer between the ablative layer and metallic surface can protect the metallic surface from thermal effects of the exploding ablative layer. The mold can have feature sizes less than 500 nm. The metallic surface can be aluminum film. The dry lubricant can be sputtered Au—Cr film, evaporated Au film or a dip-coated PVP film or other dry lubricant materials.

摘要翻译： 一种用于从金属表面形成三维纳米结构的激光纳米成形系统和方法。 激光束被引导以撞击并爆炸消融层以产生在金属表面上施加力的冲击波，以形成下面的模具的反向纳米结构。 干式润滑剂可以位于金属表面和模具之间，以减少摩擦。 基本上对激光束透明的限制层可以限制冲击波。 缓冲层可以保护模具免受损坏。 可烧蚀层和金属表面之间的飞翼层可以保护金属表面免受爆炸烧蚀层的热影响。 模具可以具有小于500nm的特征尺寸。 金属表面可以是铝膜。 干式润滑剂可以溅射Au-Cr膜，蒸发Au膜或浸涂PVP膜或其他干燥润滑剂材料。

公开(公告)号：US20110210479A1

公开(公告)日：2011-09-01

申请号：US13037077

申请日：2011-02-28

申请人： Yingling Yang ,  Gary J. Cheng ,  Ji Li ,  Yi Zhang

发明人： Yingling Yang ,  Gary J. Cheng ,  Ji Li ,  Yi Zhang

IPC分类号： B29C35/08

CPC分类号： B23K26/063 ,  B23K26/0622 ,  B23K26/0661 ,  B23K26/0853 ,  B23K26/32 ,  B23K26/324 ,  B23K26/34 ,  B23K26/36 ,  B23K2103/50

摘要： A confined pulsed laser deposition method and apparatus that includes an ablative coating between a transparent confinement layer and a backing plane, and a laser beam directed through the confinement layer to ablate the coating at generally ambient temperature and pressure, and using laser induced pressure to synthesize metaphase from the ablative coating. For example, diamond phase carbon can be synthesized from a graphite coating. The laser beam can be directed through a focus lens to control the final spot size, or through a beam diffuser to make the intensity more uniform. An XYZ-stage can position a desired target area of the ablative coating to be irradiated by the laser beam. The laser beam can have an intensity of less than about 6 GW/cm2, or less than about 4 GW/cm2. The laser beam can have an excitation wavelength of about 568 nm.

摘要翻译： 一种限制脉冲激光沉积方法和装置，其包括透明约束层和背衬平面之间的烧蚀涂层，以及引导通过约束层的激光束，以在一般环境温度和压力下烧蚀涂层，并且使用激光诱导压力合成 烧蚀涂层的中期。 例如，可以由石墨涂层合成金相碳。 激光束可以被引导通过聚焦透镜来控制最终光斑尺寸，或者通过光束漫射器使得强度更均匀。 XYZ平台可以定位由激光束照射的烧蚀涂层的期望目标区域。 激光束可以具有小于约6GW / cm 2或小于约4GW / cm 2的强度。 激光束可以具有约568nm的激发波长。

公开(公告)号：US08499599B2

公开(公告)日：2013-08-06

申请号：US13113408

申请日：2011-05-23

申请人： Gary J. Cheng ,  Huang Gao ,  Yingling Yang

发明人： Gary J. Cheng ,  Huang Gao ,  Yingling Yang

IPC分类号： B21D26/02 ,  B21J5/04

CPC分类号： B21D26/06 ,  Y10T29/49805 ,  Y10T29/49806

摘要： A laser nanoforming system and method for forming three-dimensional nanostructures from a metallic surface. A laser beam is directed to hit and explode an ablative layer to generate a shockwave that exerts a force on the metallic surface to form an inverse nanostructure of an underlying mold. A dry lubricant can be located between the metallic surface and mold to reduce friction. A confinement layer substantially transparent to the laser beam can confine the shockwave. A cushion layer can protect the mold from damage. A flyer layer between the ablative layer and metallic surface can protect the metallic surface from thermal effects of the exploding ablative layer. The mold can have feature sizes less than 500 nm. The metallic surface can be aluminum film. The dry lubricant can be sputtered Au—Cr film, evaporated Au film or a dip-coated PVP film or other dry lubricant materials.

摘要翻译： 一种用于从金属表面形成三维纳米结构的激光纳米成形系统和方法。 激光束被引导以撞击并爆炸消融层以产生在金属表面上施加力的冲击波，以形成下面的模具的反向纳米结构。 干式润滑剂可以位于金属表面和模具之间，以减少摩擦。 基本上对激光束透明的限制层可以限制冲击波。 缓冲层可以保护模具免受损坏。 可烧蚀层和金属表面之间的飞翼层可以保护金属表面免受爆炸烧蚀层的热影响。 模具可以具有小于500nm的特征尺寸。 金属表面可以是铝膜。 干式润滑剂可以溅射Au-Cr膜，蒸发Au膜或浸涂PVP膜或其他干燥润滑剂材料。