公开(公告)号：US08785942B2

公开(公告)日：2014-07-22

申请号：US13352987

申请日：2012-01-18

申请人： Akira Yoshida ,  Jun Komiyama ,  Yoshihisa Abe ,  Hiroshi Oishi ,  Kenichi Eriguchi ,  Shunichi Suzuki

发明人： Akira Yoshida ,  Jun Komiyama ,  Yoshihisa Abe ,  Hiroshi Oishi ,  Kenichi Eriguchi ,  Shunichi Suzuki

IPC分类号： H01L29/15

CPC分类号： H01L21/0237 ,  H01L21/02458 ,  H01L21/02505 ,  H01L21/0254 ,  H01L21/0262 ,  H01L29/2003 ,  H01L29/7787

摘要： A nitride semiconductor substrate suitable for a normally-off type high breakdown-voltage device and a method of manufacturing the substrate are provided allowing both a higher threshold voltage and improvement in current collapse.In a nitride semiconductor substrate 10 having a substrate 1, a buffer layer 2 formed on one principal plane of the substrate 1, an intermediate layer 3 formed on the buffer layer 2, an electron transport layer 4 formed on the intermediate layer 3, and an electron supply layer 5 formed on the electron transport layer 4, the intermediate layer 3 has a thickness of 200 nm to 1500 nm and a carbon concentration of 5×1016 atoms/cm3 to 1×1018 atoms/cm3 and is of AlxGa1-xN (0.05≦x≦0.24), and the electron transport layer 4 has a thickness of 5 nm to 200 nm and is of AlyGa1-yN (0≦y≦0.04).

摘要翻译： 提供了适用于常关型高击穿电压装置的氮化物半导体衬底和制造衬底的方法，其允许更高的阈值电压和电流崩溃的改善。 在具有衬底1的氮化物半导体衬底10中，形成在衬底1的一个主平面上的缓冲层2，形成在缓冲层2上的中间层3，形成在中间层3上的电子传输层4和 形成在电子输送层4上的电子供给层5，中间层3的厚度为200nm〜1500nm，碳浓度为5×1016原子/ cm3〜1×1018原子/ cm3，为AlxGa1-xN（ 0.05＆nlE; x＆lt; L; 0.24），电子传输层4的厚度为5nm〜200nm，为Al y Ga 1-y N（0＆nl E; y＆nlE; 0.04）。

公开(公告)号：US08538137B2

公开(公告)日：2013-09-17

申请号：US12844141

申请日：2010-07-27

申请人： Hironori Sumitomo ,  Yoshihisa Abe

发明人： Hironori Sumitomo ,  Yoshihisa Abe

IPC分类号： G06K9/00

CPC分类号： G01C11/06 ,  G06T1/00

摘要： A technique is provided which can improve the precision of a matching point search with a plurality of images taking the same object where distant and near views coexist. A plurality of first images obtained by time-sequentially imaging an object from a first viewpoint, and a plurality of second images obtained by time-sequentially imaging the object from a second viewpoint, are obtained. Reference regions including a reference point are set respectively in the first images with the same arrangement, and comparison regions corresponding to the form of the reference regions are set respectively in the second images with the same arrangement. One reference distribution of pixel values about two-or-more-dimensional space is generated from the distributions of pixel values about the plurality of reference regions, and one comparison distribution of pixel values about two-or-more-dimensional space is generated from the distributions of pixel values about the plurality of comparison regions. Then, a matching point in the plurality of second images that corresponds to the reference point is detected by using the reference distribution of pixel values and the comparison distribution of pixel values.

摘要翻译： 提供一种技术，其可以提供具有多个图像的匹配点搜索的精度，该多个图像采用遥远和近视图共存的相同对象。 获得通过从第一视点对对象进行时间顺序成像获得的多个第一图像和从第二视点对对象进行时间顺序成像而获得的多个第二图像。 在具有相同布置的第一图像中分别设置包括参考点的参考区域，并且在相同布置的第二图像中分别设置与参考区域的形式对应的比较区域。 从关于多个参考区域的像素值的分布产生关于二维或更多维空间的像素值的一个参考分布，并且从二维或更多维空间生成关于二维或更多维空间的像素值的一个比较分布 关于多个比较区域的像素值的分布。 然后，通过使用像素值的参考分布和像素值的比较分布来检测对应于参考点的多个第二图像中的匹配点。

公开(公告)号：US08121814B2

公开(公告)日：2012-02-21

申请号：US12322963

申请日：2009-02-10

申请人： Yoshihisa Abe ,  Toshio Kawano

发明人： Yoshihisa Abe ,  Toshio Kawano

IPC分类号： G01B21/02 ,  G01B21/00 ,  G06F19/00 ,  G06F17/40

CPC分类号： G01B11/25

摘要： A method is provided for controlling display of three-dimensional data in a three-dimensional processor that processes three-dimensional data indicating three-dimensional position coordinates of each point on a surface of an object to be measured, the three-dimensional data being obtained by projecting measurement light onto the object and receiving measurement light reflected from the object. The method includes obtaining reliability data that are an index of reliability of three-dimensional data of said each point, enabling a user to adjust a threshold for defining a range of the reliability, and displaying, on a screen of a display, three-dimensional data corresponding to reliability falling within a range defined by the threshold adjusted by the user with the three-dimensional data displayed distinguishably from different three-dimensional data.

摘要翻译： 提供了一种用于控制三维处理器中的三维数据的显示的方法，该三维处理器处理指示待测物体的表面上的每个点的三维位置坐标的三维数据，获得的三维数据 通过将测量光投射到物体上并接收从物体反射的测量光。 该方法包括获得作为所述每个点的三维数据的可靠性的索引的可靠性数据，使得用户能够调整用于定义可靠性的范围的阈值，并且在显示器的屏幕上显示三维 与由用户调整的阈值所限定的范围内的可靠度相对应的数据与由不同的三维数据可区分地显示的三维数据相对应的数据。

公开(公告)号：US20110062556A1

公开(公告)日：2011-03-17

申请号：US12879035

申请日：2010-09-10

申请人： Jun KOMIYAMA ,  Kenichi Eriguchi ,  Hiroshi Oishi ,  Yoshihisa Abe ,  Akira Yoshida ,  Shunichi Suzuki

发明人： Jun KOMIYAMA ,  Kenichi Eriguchi ,  Hiroshi Oishi ,  Yoshihisa Abe ,  Akira Yoshida ,  Shunichi Suzuki

IPC分类号： H01L29/20

CPC分类号： H01L21/0254 ,  H01L21/02458 ,  H01L21/02507

摘要： A compound semiconductor substrate which inhibits the generation of a crack or a warp and is preferable for a normally-off type high breakdown voltage device, arranged that a multilayer buffer layer 2 in which AlxGa1-xN single crystal layers (0.6≦X≦1.0) 21 containing carbon from 1×1018 atoms/cm3 to 1×1021 atoms/cm3 and AlyGa1-yN single crystal layers (0.1≦y≦0.5) 22 containing carbon from 1×1017 atoms/cm3 to 1×1021 atoms/cm3 are alternately and repeatedly stacked in order, and a nitride active layer 3 provided with an electron transport layer 31 having a carbon concentration of 5×1017 atoms/cm3 or less and an electron supply layer 32 are deposited on a Si single crystal substrate 1 in order. The carbon concentrations of the AlxGa1-xN single crystal layers 21 and that of the AlyGa1-yN single crystal layers 22 respectively decrease from the substrate 1 side towards the above-mentioned active layer 3 side. In this way, the compound semiconductor substrate is produced.

摘要翻译： 一种禁止产生裂纹或翘曲的化合物半导体衬底，优选用于常闭型高击穿电压器件，其中AlxGa1-xN单晶层（0.6＆amp; NlE; X＆amp; NlE; 1.0 ）含有1×1018原子/ cm 3至1×1021原子/ cm3的碳和含有1×10 17原子/ cm 3至1×1021原子/ cm 3的碳的Al y Ga 1-y N单晶层（0.1＆lt; 1lE; y＆nlE; 0.5） 交替重复堆叠，并且在Si单晶衬底1上沉积具有碳浓度为5×10 17原子/ cm 3以下的电子传输层31和电子供给层32的氮化物活性层3 订购。 Al x Ga 1-x N单晶层21和Al y Ga 1-y N单晶层22的碳浓度分别从衬底1侧朝向上述有源层3侧减小。 以这种方式制造化合物半导体衬底。

公开(公告)号：US20110026773A1

公开(公告)日：2011-02-03

申请号：US12844141

申请日：2010-07-27

申请人： Hironori SUMITOMO ,  Yoshihisa Abe

发明人： Hironori SUMITOMO ,  Yoshihisa Abe

IPC分类号： G06T7/00

CPC分类号： G01C11/06 ,  G06T1/00

摘要： A technique is provided which can improve the precision of a matching point search with a plurality of images taking the same object where distant and near views coexist. A plurality of first images obtained by time-sequentially imaging an object from a first viewpoint, and a plurality of second images obtained by time-sequentially imaging the object from a second viewpoint, are obtained. Reference regions including a reference point are set respectively in the first images with the same arrangement, and comparison regions corresponding to the form of the reference regions are set respectively in the second images with the same arrangement. One reference distribution of pixel values about two-or-more-dimensional space is generated from the distributions of pixel values about the plurality of reference regions, and one comparison distribution of pixel values about two-or-more-dimensional space is generated from the distributions of pixel values about the plurality of comparison regions. Then, a matching point in the plurality of second images that corresponds to the reference point is detected by using the reference distribution of pixel values and the comparison distribution of pixel values.

摘要翻译： 提供一种技术，其可以提供具有多个图像的匹配点搜索的精度，该多个图像采用遥远和近视图共存的相同对象。 获得通过从第一视点对对象进行时间顺序成像获得的多个第一图像和从第二视点对对象进行时间顺序成像而获得的多个第二图像。 在具有相同布置的第一图像中分别设置包括参考点的参考区域，并且在相同布置的第二图像中分别设置与参考区域的形式对应的比较区域。 从关于多个参考区域的像素值的分布产生关于二维或更多维空间的像素值的一个参考分布，并且从二维或更多维空间生成关于二维或更多维空间的像素值的一个比较分布 关于多个比较区域的像素值的分布。 然后，通过使用像素值的参考分布和像素值的比较分布来检测对应于参考点的多个第二图像中的匹配点。

公开(公告)号：US07724380B2

公开(公告)日：2010-05-25

申请号：US11434310

申请日：2006-05-15

申请人： Shinichi Horita ,  Yoshihisa Abe

发明人： Shinichi Horita ,  Yoshihisa Abe

IPC分类号： G06K5/00

CPC分类号： G06T7/579 ,  G06T2200/08

摘要： A three-dimensional measurement method is provided for measuring an object shape in a non-contact manner by using a non-contact sensor and a sensor moving mechanism that changes a position and a posture of the sensor and can operate by numerical control, moving the non-contact sensor in accordance with measurement path information indicating plural positions and postures of the sensor at the respective positions. The measurement path information is set in advance by teaching. The method includes performing preliminary three-dimensional measurement of the object in accordance with preliminary measurement path information, using shape data obtained by the preliminary three-dimensional measurement and shape data of an imaginary object as a measurement target in the teaching to detect positioning error between the object and the imaginary object, modifying the measurement path information depending on the detected positioning error, and performing three-dimensional measurement of the object in accordance with the modified measurement path information.

摘要翻译： 提供一种三维测量方法，用于通过使用改变传感器的位置和姿势并且可以通过数字控制操作的非接触传感器和传感器移动机构以非接触的方式测量物体形状， 根据测量路径信息指示传感器在各个位置处的多个位置和姿势的非接触式传感器。 通过教学预先设定测量路径信息。 该方法包括根据初步测量路径信息，使用通过初步三维测量获得的形状数据和虚拟对象的形状数据作为测量对象来执行对象的初步三维测量，以检测教学中的定位误差 物体和虚拟物体，根据检测出的定位误差来修正测量路径信息，并根据修改的测量路径信息进行物体的三维测量。

公开(公告)号：US07715020B2

公开(公告)日：2010-05-11

申请号：US11811781

申请日：2007-06-12

申请人： Wataru Yamaguchi ,  Shinichi Horita ,  Yoshihisa Abe

发明人： Wataru Yamaguchi ,  Shinichi Horita ,  Yoshihisa Abe

IPC分类号： G01B11/24 ,  G01B11/30

CPC分类号： G01B11/2518

摘要： A three-dimensional shape measuring system is provided with a measuring unit having a three-dimensional measurement range and adapted to measure the three-dimensional shape of a measurement object in a noncontact manner, a measurement range shifting unit for shifting the position of the measurement range of the measuring unit, a shape calculating unit for calculating the overall three-dimensional shape of the measurement object from a plurality of measurement data obtained by shifting the measurement range relative to the measurement object, and a judging unit for setting judgment areas in specified peripheral areas within the measurement range and judging the presence or absence of any unmeasured area of the measurement object outside the measurement range based on measurement data corresponding to the judgment areas. The measurement range shifting unit shifts the position of the measurement range in a direction toward the unmeasured area when the presence of the unmeasured area is judged by the judging unit.

摘要翻译： 三维形状测量系统具有测量单元，该测量单元具有三维测量范围并适于以非接触方式测量测量对象的三维形状;测量范围移动单元，用于移动测量位置 测量单元的范围，形状计算单元，用于根据通过相对于测量对象移动测量范围而获得的多个测量数据来计算测量对象的整体三维形状;以及判断单元，用于设置指定的测量对象的测量范围 在测量范围内的外围区域，并且基于与判断区域相对应的测量数据，判断测量范围之外的测量对象的任何未测量区域的存在或不存在。 当判断单元判断存在未测量区域时，测量范围移动单元将测量范围的位置朝向未测量区域的方向移动。

公开(公告)号：US20080024795A1

公开(公告)日：2008-01-31

申请号：US11879686

申请日：2007-07-18

申请人： Shinji Yamamoto ,  Yoshihisa Abe

发明人： Shinji Yamamoto ,  Yoshihisa Abe

IPC分类号： G01B11/24

CPC分类号： G01B11/2527 ,  G06T7/521

摘要： A three-dimensional shape measuring system includes: a light projecting/receiving apparatus which causes a light receiver to receive light reflected on a surface of a measurement object onto a light receiving surface thereof at a predetermined cycle multiple times, while changing a projecting direction of the light; and a measuring apparatus for measuring a three-dimensional shape of the measurement object, utilizing light receiving data. The measuring apparatus includes: a light receiving time setter for setting a light receiving time in each cycle with respect to each of light receiving areas constituting the light receiving surface; a data converter for converting an output value representing the light receiving data obtained in each cycle into an output value standardized with respect to the light receiving time in each cycle, if the light receiving times are different in the cycles; a projection timing acquirer for acquiring a projection timing at which the light receiving amount of each light receiving area is maximum; and a position acquirer for acquiring a position of a measurement point on the surface of the measurement object corresponding to each light receiving area.

摘要翻译： 三维形状测量系统包括：光投射/接收装置，其使得光接收器以预定周期多次将测量对象的表面上反射的光接收到其受光面上，同时改变投影方向 光; 以及利用光接收数据测量测量对象的三维形状的测量装置。 测量装置包括：光接收时间设定器，用于相对于构成光接收表面的每个光接收区域设定每个周期中的光接收时间; 数据转换器，用于将每个周期中获得的光接收数据的输出值转换为相对于每个周期中的光接收时间标准化的输出值，如果光接收时间在周期不同; 投影定时获取器，用于获取每个光接收区域的光接收量最大的投影定时; 以及位置获取器，用于获取与每个光接收区域对应的测量对象表面上的测量点的位置。

公开(公告)号：US20070291281A1

公开(公告)日：2007-12-20

申请号：US11811781

申请日：2007-06-12

申请人： Wataru Yamaguchi ,  Shinichi Horita ,  Yoshihisa Abe

发明人： Wataru Yamaguchi ,  Shinichi Horita ,  Yoshihisa Abe

IPC分类号： G01B11/24

CPC分类号： G01B11/2518

摘要： A three-dimensional shape measuring system is provided with a measuring unit having a three-dimensional measurement range and adapted to measure the three-dimensional shape of a measurement object in a noncontact manner, a measurement range shifting unit for shifting the position of the measurement range of the measuring unit, a shape calculating unit for calculating the overall three-dimensional shape of the measurement object from a plurality of measurement data obtained by shifting the measurement range relative to the measurement object, and a judging unit for setting judgment areas in specified peripheral areas within the measurement range and judging the presence or absence of any unmeasured area of the measurement object outside the measurement range based on measurement data corresponding to the judgment areas. The measurement range shifting unit shifts the position of the measurement range in a direction toward the unmeasured area when the presence of the unmeasured area is judged by the judging unit.

摘要翻译： 三维形状测量系统具有测量单元，该测量单元具有三维测量范围并适于以非接触方式测量测量对象的三维形状;测量范围移动单元，用于移动测量位置 测量单元的范围，形状计算单元，用于根据通过相对于测量对象移动测量范围而获得的多个测量数据来计算测量对象的整体三维形状;以及判断单元，用于设置指定的测量对象的测量范围 在测量范围内的外围区域，并且基于与判断区域相对应的测量数据，判断测量范围之外的测量对象的任何未测量区域的存在或不存在。 当判断单元判断存在未测量区域时，测量范围移动单元将测量范围的位置朝向未测量区域的方向移动。

公开(公告)号：US20070069216A1

公开(公告)日：2007-03-29

申请号：US11434115

申请日：2006-05-16

申请人： Jun Komiyama ,  Yoshihisa Abe ,  Shunichi Suzuki ,  Hideo Nakanishi

发明人： Jun Komiyama ,  Yoshihisa Abe ,  Shunichi Suzuki ,  Hideo Nakanishi

IPC分类号： H01L31/0312

CPC分类号： H01L29/7787 ,  H01L29/2003

摘要： A substrate for compound semiconductor device and a compound semiconductor device using the substrate are provided which allow a breakdown voltage to be high, cause little energy loss, and are suitably used for a high-electron mobility transistor etc. An n-type 3C—SiC single crystal buffer layer 3 having a carrier concentration of 1016-1021/cm3, a hexagonal GaxAl1-xN single crystal buffer layer (0≦x

摘要翻译： 提供了一种化合物半导体器件的基板和使用该基板的化合物半导体器件，其允许击穿电压高，导致很少的能量损失，并且适合用于高电子迁移率晶体管等。n型3C-SiC 载流子浓度为10-16 / 21/3/3的单晶缓冲层3，六方晶系 > 1×1×N单晶缓冲层（0 <= x <1）4，n型六方晶系Al 1-y < 载流子浓度为10〜10/10/10/10以上的SUB> N单晶层（0.2 <= y <= 1）5 ，和n型六方晶系Al 1-z N单晶载体供给层（0≤z≤0.8,0.2≤yz≤1） ）6具有载流子浓度为10 11 -10 16 / cm 3的物质依次层叠在n型Si单晶衬底2上 具有晶面取向{111}和载体浓度为10 16 -10 21 / cm 3。 在上述基板2的背面形成有背面电极7，在上述载体供给层6的表面上形成有表面电极8。