摘要:
A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot.
摘要:
A substrate transfer robot sets an interference region in advance in the range of motion of the substrate transfer robot; stores a plurality of patterns of a combination of a starting position, a target position, and the interference region, the starting position and the target position being among taught positions; determines which pattern among the plurality of patterns a movement of the substrate transfer robot from the starting position to the target position matches when the substrate transfer robot moves between the plurality of taught positions; and determines a movement path from the starting position to the target position so as to avoid the interference region in accordance with the determined pattern so that the substrate transfer robot avoids the interference region.
摘要:
A specified metal member included among the components of a valve, coupling or like fluid handling part for use in piping and fluid control devices is made of an alloy comprising, in % by weight, 0.001 to 0.01% of C, up to 5% of Si, up to 2% of Mn, up to 0.03% of P, up to 100 ppm of S, up to 50 ppm of O, 18 to 25% of Cr, 15 to 25% of Ni, 4.5 to 7.0% of Mo, 0.5 to 3.0% of Cu, 0.1 to 0.3% of N, and the balance substantially Fe and other inevitable impurities, the alloy having a CRI (crevice corrosion resistance index) value in the range of 40≦CRI≦55, as determined from the expression CRI=[Cr]+4×[Mo]+30×[N] wherein the amount of alloy components present in combination in the alloy to ensure crevice corrosion resistance are expressed in % by weight.
摘要:
A method of shifting a bicycle transmission includes the step of calculating, by a computer, a past period of a wheel revolution. The computer may then calculate a current virtual period of the wheel revolution from the past period. The bicycle transmission is then shifted at a time calculated by the computer within the virtual period. In another embodiment of the present invention, a virtual velocity may be calculated from the past period, and the bicycle transmission may be shifted at the virtual velocity. If desired, the computer may calculate a past velocity from the past period, and the virtual velocity may be calculated from the past velocity. To alleviate stress on the transmission, the bicycle transmission may be shifted when the virtual velocity is less than the past velocity (i.e., during deceleration). Also, the virtual velocity may be set for a smooth transmission from one gear to another.
摘要:
A robot system includes a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction, and a position detecting unit for detecting storage positions of the substrates stored within the storage unit. The robot system further includes a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit, and an entry permission/prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.
摘要:
A substrate transfer robot sets an interference region in advance in the range of motion of the substrate transfer robot; stores a plurality of patterns of a combination of a starting position, a target position, and the interference region, the starting position and the target position being among taught positions; determines which pattern among the plurality of patterns a movement of the substrate transfer robot from the starting position to the target position matches when the substrate transfer robot moves between the plurality of taught positions; and determines a movement path from the starting position to the target position so as to avoid the interference region in accordance with the determined pattern so that the substrate transfer robot avoids the interference region.
摘要:
A password registration device includes a password input device for inputting an input password; a tentative password designation mechanism for designating the input password as a tentative password; a signaling mechanism coupled to the tentative password designation mechanism for signaling that the input password is designated as a tentative password; and a reference password memory for storing a reference password. A password registration requesting device is provided for requesting storage of the tentative password in the reference password memory, and a password registration mechanism is provided for storing the tentative password in the reference password memory in response to the password registration requesting device. In another embodiment, a password registration device includes a password input device for inputting an input password; a reference password memory; a password registration mechanism for storing the input password in the reference password memory; a default password memory for storing a default password; and resetting means for storing the default password in the reference password memory. The resetting means can be used to set the default password as the reference password if the user forgets the originally input password.
摘要:
A robot system includes a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction, and a position detecting unit for detecting storage positions of the substrates stored within the storage unit. The robot system further includes a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit, and an entry permission/prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.
摘要:
A third arm is provided in addition to an end effecter, a first arm and a second arm. The third arm performs swinging and turning motion until a third rotational axis is aligned with an extension of an axial line on an access position. Then, the end effecter moves linearly to transport a workpiece from and to the access position.
摘要:
A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot.