Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor
    1.
    发明授权
    Substrate transfer robot, substrate transfer device, semiconductor manufacturing apparatus, and method for producing semiconductor 有权
    基板传送机器人,基板传送装置,半导体制造装置以及半导体的制造方法

    公开(公告)号:US08473096B2

    公开(公告)日:2013-06-25

    申请号:US12704538

    申请日:2010-02-12

    IPC分类号: H01L21/677

    CPC分类号: H01L21/67742 H01L21/67745

    摘要: A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot.

    摘要翻译: 基板传送机器人包括基板夹持部分,臂单元和控制器。 基板夹持部构造成保持基板。 臂单元包括能够在水平面上转动的多个臂。 臂单元具有在臂单元的前端处的基板夹持部分,并且构造成在预先教导的多个教导位置之间传送基板。 当教导教导的位置时,控制器被配置为产生对应于多个教导位置中的每一个的访问待命位置,并且被配置为生成并存储从访问备用位置到基板传送的最小转动姿势的多条路线 机器人。

    Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the same
    2.
    发明授权
    Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the same 有权
    基板传送机器人,包括该机器人的基板传送装置和包括该基板传送机器人的半导体制造装置

    公开(公告)号:US08401701B2

    公开(公告)日:2013-03-19

    申请号:US12560423

    申请日:2009-09-16

    申请人: Yoshiki Kimura

    发明人: Yoshiki Kimura

    IPC分类号: G05B19/04 G05B19/18

    摘要: A substrate transfer robot sets an interference region in advance in the range of motion of the substrate transfer robot; stores a plurality of patterns of a combination of a starting position, a target position, and the interference region, the starting position and the target position being among taught positions; determines which pattern among the plurality of patterns a movement of the substrate transfer robot from the starting position to the target position matches when the substrate transfer robot moves between the plurality of taught positions; and determines a movement path from the starting position to the target position so as to avoid the interference region in accordance with the determined pattern so that the substrate transfer robot avoids the interference region.

    摘要翻译: 基板传送机器人在基板传送机器人的运动范围内预先设定干涉区域; 存储起始位置,目标位置和干扰区域的组合的多个图案,起始位置和目标位置在教导位置之间; 确定当所述基板传送机器人在所述多个教导位置之间移动时,所述多个图案中的所述基板传送机器人从所述起始位置到所述目标位置的移动匹配的所述图案; 并且确定从起始位置到目标位置的移动路径,以便根据所确定的图案避免干涉区域,使得基板传送机器人避免干涉区域。

    Bicycle operating method using predicted values
    4.
    发明授权
    Bicycle operating method using predicted values 失效
    自行车操作方法使用预测值

    公开(公告)号:US6073061A

    公开(公告)日:2000-06-06

    申请号:US993683

    申请日:1997-12-18

    申请人: Yoshiki Kimura

    发明人: Yoshiki Kimura

    CPC分类号: B62M9/122 B62M25/08

    摘要: A method of shifting a bicycle transmission includes the step of calculating, by a computer, a past period of a wheel revolution. The computer may then calculate a current virtual period of the wheel revolution from the past period. The bicycle transmission is then shifted at a time calculated by the computer within the virtual period. In another embodiment of the present invention, a virtual velocity may be calculated from the past period, and the bicycle transmission may be shifted at the virtual velocity. If desired, the computer may calculate a past velocity from the past period, and the virtual velocity may be calculated from the past velocity. To alleviate stress on the transmission, the bicycle transmission may be shifted when the virtual velocity is less than the past velocity (i.e., during deceleration). Also, the virtual velocity may be set for a smooth transmission from one gear to another.

    摘要翻译: 一种变速自行车变速器的方法包括以下步骤:通过计算机计算轮转的过去时段。 然后,计算机可以计算从过去时段开始的车轮旋转的当前虚拟周期。 然后在虚拟时段内由计算机计算的时间移动自行车传输。 在本发明的另一个实施例中,可以从过去的时间段计算虚拟速度,并且可以以虚拟速度移动自行车传动。 如果需要,计算机可以从过去的时间段计算过去的速度,并且可以根据过去的速度来计算虚拟速度。 为了减轻变速器的应力,当虚拟速度小于过去速度(即减速时)时,自行车变速器可以移动。 此外,虚拟速度可以被设置为从一个档位到另一个档位的平滑传送。

    Robot system
    5.
    发明授权
    Robot system 有权
    机器人系统

    公开(公告)号:US08892242B2

    公开(公告)日:2014-11-18

    申请号:US13403997

    申请日:2012-02-24

    申请人: Yoshiki Kimura

    发明人: Yoshiki Kimura

    IPC分类号: G06F7/00 H01L21/67

    CPC分类号: H01L21/67265

    摘要: A robot system includes a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction, and a position detecting unit for detecting storage positions of the substrates stored within the storage unit. The robot system further includes a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit, and an entry permission/prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.

    摘要翻译: 机器人系统包括用于沿着垂直方向以多级传送存储在存储单元内的基板的机器人手和用于检测存储在存储单元内的基板的存储位置的位置检测单元。 机器人系统还包括间隙计算单元,用于基于由位置检测单元检测到的基板的存储位置来计算相邻基板之间的间隙,以及用于确定允许或禁止进入的位置的入口允许/禁止确定单元 基于由间隙计算单元计算的间隙,机器人进入基板之间的空间。

    SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER APPARATUS INCLUDING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME
    6.
    发明申请
    SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER APPARATUS INCLUDING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME 有权
    基板传送机器人,包括它们的基板传送装置和包括它们的半导体制造装置

    公开(公告)号:US20100161124A1

    公开(公告)日:2010-06-24

    申请号:US12560423

    申请日:2009-09-16

    申请人: Yoshiki KIMURA

    发明人: Yoshiki KIMURA

    IPC分类号: G05B19/18

    摘要: A substrate transfer robot sets an interference region in advance in the range of motion of the substrate transfer robot; stores a plurality of patterns of a combination of a starting position, a target position, and the interference region, the starting position and the target position being among taught positions; determines which pattern among the plurality of patterns a movement of the substrate transfer robot from the starting position to the target position matches when the substrate transfer robot moves between the plurality of taught positions; and determines a movement path from the starting position to the target position so as to avoid the interference region in accordance with the determined pattern so that the substrate transfer robot avoids the interference region.

    摘要翻译: 基板传送机器人在基板传送机器人的运动范围内预先设定干涉区域; 存储起始位置,目标位置和干扰区域的组合的多个图案,起始位置和目标位置在教导位置之间; 确定当所述基板传送机器人在所述多个教导位置之间移动时,所述多个图案中的所述基板传送机器人从所述起始位置到所述目标位置的移动匹配的所述图案; 并且确定从起始位置到目标位置的移动路径,以便根据所确定的图案避免干涉区域,使得基板传送机器人避免干涉区域。

    Password registration device for a bicycle
    7.
    发明授权
    Password registration device for a bicycle 失效
    自行车密码登记装置

    公开(公告)号:US06737956B1

    公开(公告)日:2004-05-18

    申请号:US09309168

    申请日:1999-05-10

    申请人: Yoshiki Kimura

    发明人: Yoshiki Kimura

    IPC分类号: G05B1900

    摘要: A password registration device includes a password input device for inputting an input password; a tentative password designation mechanism for designating the input password as a tentative password; a signaling mechanism coupled to the tentative password designation mechanism for signaling that the input password is designated as a tentative password; and a reference password memory for storing a reference password. A password registration requesting device is provided for requesting storage of the tentative password in the reference password memory, and a password registration mechanism is provided for storing the tentative password in the reference password memory in response to the password registration requesting device. In another embodiment, a password registration device includes a password input device for inputting an input password; a reference password memory; a password registration mechanism for storing the input password in the reference password memory; a default password memory for storing a default password; and resetting means for storing the default password in the reference password memory. The resetting means can be used to set the default password as the reference password if the user forgets the originally input password.

    摘要翻译: 密码登记装置包括用于输入输入密码的密码输入装置; 用于将输入密码指定为临时密码的暂时密码指定机制; 耦合到临时密码指定机构的信令机制,用于指示输入密码被指定为暂时密码; 以及用于存储参考密码的参考密码存储器。 提供密码登记请求装置,用于请求在参考密码存储器中存储暂时密码,并且提供密码登记机制,用于响应于密码登记请求装置将临时密码存储在参考密码存储器中。 在另一个实施例中,密码登记装置包括用于输入输入密码的密码输入装置; 参考密码记忆; 用于将输入的密码存储在参考密码存储器中的密码登记机构; 用于存储默认密码的默认密码存储器; 以及用于将默认密码存储在参考密码存储器中的复位装置。 如果用户忘记了原始输入的密码,则可以使用重置装置将默认密码设置为参考密码。

    ROBOT SYSTEM
    8.
    发明申请
    ROBOT SYSTEM 有权
    机器人系统

    公开(公告)号:US20120290124A1

    公开(公告)日:2012-11-15

    申请号:US13403997

    申请日:2012-02-24

    申请人: Yoshiki KIMURA

    发明人: Yoshiki KIMURA

    IPC分类号: G06F7/00

    CPC分类号: H01L21/67265

    摘要: A robot system includes a robot hand for transferring substrates stored within a storage unit in multiple stages along a vertical direction, and a position detecting unit for detecting storage positions of the substrates stored within the storage unit. The robot system further includes a clearance calculating unit for calculating a clearance between the adjoining substrates on the basis of the storage positions of the substrates detected by the position detecting unit, and an entry permission/prohibition determining unit for determining permission or prohibition of entry of the robot hand into a space between the substrates on the basis of the clearance calculated by the clearance calculating unit.

    摘要翻译: 机器人系统包括用于沿着垂直方向以多级传送存储在存储单元内的基板的机器人手和用于检测存储在存储单元内的基板的存储位置的位置检测单元。 机器人系统还包括间隙计算单元,用于基于由位置检测单元检测到的基板的存储位置来计算相邻基板之间的间隙,以及用于确定允许或禁止进入的位置的入口允许/禁止确定单元 基于由间隙计算单元计算的间隙,机器人进入基板之间的空间。

    HORIZONTAL MULTI-JOINT ROBOT AND TRANSPORTATION APPARATUS INCLUDING THE SAME
    9.
    发明申请
    HORIZONTAL MULTI-JOINT ROBOT AND TRANSPORTATION APPARATUS INCLUDING THE SAME 审中-公开
    水平多机器人和运输装置,包括它们

    公开(公告)号:US20110135437A1

    公开(公告)日:2011-06-09

    申请号:US12944726

    申请日:2010-11-12

    IPC分类号: B25J11/00 B25J18/00

    摘要: A third arm is provided in addition to an end effecter, a first arm and a second arm. The third arm performs swinging and turning motion until a third rotational axis is aligned with an extension of an axial line on an access position. Then, the end effecter moves linearly to transport a workpiece from and to the access position.

    摘要翻译: 除了末端执行器,第一臂和第二臂之外,还设有第三臂。 第三臂执行摆动和转动运动,直到第三旋转轴与进入位置上的轴线的延伸线对准。 然后,端部执行器线性移动以将工件从和接近进入位置传送。

    SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR PRODUCING SEMICONDUCTOR
    10.
    发明申请
    SUBSTRATE TRANSFER ROBOT, SUBSTRATE TRANSFER DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR PRODUCING SEMICONDUCTOR 有权
    基板传送机器人,基板传送装置,半导体制造装置及其半导体制造方法

    公开(公告)号:US20100209225A1

    公开(公告)日:2010-08-19

    申请号:US12704538

    申请日:2010-02-12

    CPC分类号: H01L21/67742 H01L21/67745

    摘要: A substrate transfer robot includes a substrate gripping portion, an arm unit, and a controller. The substrate gripping portion is configured to hold a substrate. The arm unit includes a plurality of arms which are capable of turning in a horizontal plane. The arm unit has the substrate gripping portion at a leading end of the arm unit and is configured to transfer the substrate between a plurality of taught positions taught beforehand. When the taught positions are taught, the controller is configured to generate an access standby position corresponding to each of the plurality of taught positions and configured to generate and store a plurality of routes from the access standby position to a minimum turning posture of the substrate transfer robot.

    摘要翻译: 基板传送机器人包括基板夹持部分,臂单元和控制器。 基板夹持部构造成保持基板。 臂单元包括能够在水平面上转动的多个臂。 臂单元具有在臂单元的前端处的基板夹持部分,并且构造成在预先教导的多个教导位置之间传送基板。 当教导教导的位置时,控制器被配置为产生对应于多个教导位置中的每一个的访问待命位置,并且被配置为生成并存储从访问备用位置到基板传送的最小转动姿势的多条路线 机器人。