公开(公告)号：US20130040247A1

公开(公告)日：2013-02-14

申请号：US13535885

申请日：2012-06-28

申请人： Yusuke TAKI

发明人： Yusuke TAKI

IPC分类号： G03F7/20 ,  C23C14/32 ,  C23C16/26 ,  G03B27/52 ,  C01B31/00

CPC分类号： G03F7/70341 ,  G03F7/7095

摘要： A liquid immersion member holds liquid between the liquid immersion member and an object such that an optical path of exposure light applied to the object is filled with the liquid, thereby forming a liquid immersion space. In the liquid immersion member, an amorphous carbon film is formed on at least a part of a region coming into contact with the liquid.

摘要翻译： 液浸部件在液浸部件和物体之间保持液体，使得施加到物体的曝光光的光路被液体填充，从而形成液浸空间。 在液浸部件中，在与液体接触的区域的至少一部分上形成无定形碳膜。

公开(公告)号：US06809876B2

公开(公告)日：2004-10-26

申请号：US10464527

申请日：2003-06-19

申请人： Yusuke Taki

发明人： Yusuke Taki

IPC分类号： G02B300

CPC分类号： G03F7/70958 ,  C04B35/553 ,  C04B2235/723 ,  C04B2235/76 ,  C23C14/0694 ,  G02B1/02 ,  G02B1/115 ,  G02B5/283

摘要： An optical element of the present invention comprises a fluorite substrate 1, and a lanthanum fluoride film 2 formed directly on the substrate 1. The substrate 1, on which the lanthanum fluoride film 2 is formed, has a plane which is a (111) plane or a plane inclined by an angle within ±30 degrees, preferably within 15 degrees from the (111) plane. Therefore, the lanthanum fluoride film undergoes the crystal growth subjected to the C-axis orientation on the optical substrate. Since the lanthanum fluoride film is dense and has a small surface area, it scarcely involves the oxidation and hydroxylation areas as well as the structural defect. Therefore, it is possible to reduce the optical loss of the optical element in the vacuum ultraviolet region.

摘要翻译： 本发明的光学元件包括萤石基板1和直接形成在基板1上的氟化镧膜2.其上形成有氟化镧膜2的基板1具有作为（111）面的平面 或者倾斜角度在距离（111）平面的±30度内，优选地在15度内的平面。 因此，氟化镧膜在光学基板上经历C轴取向的晶体生长。 由于氟化镧膜致密，表面积小，几乎不涉及氧化和羟基化区域以及结构缺陷。 因此，可以减少真空紫外线区域中的光学元件的光损耗。

公开(公告)号：US06495202B1

公开(公告)日：2002-12-17

申请号：US09656737

申请日：2000-09-07

申请人： Yusuke Taki

发明人： Yusuke Taki

IPC分类号： B05D506

CPC分类号： G03F7/70958 ,  G02B13/143 ,  G03F7/70216

摘要： A method for manufacturing an optical element includes replacing fluoride atoms at a surface of the optical element. The surface is imparted with properties of substantial prevention of charge retention and/or substantial prevention of charge build-up to help maintain transmissivity in the optical element.

摘要翻译： 用于制造光学元件的方法包括在光学元件的表面上代替氟化物原子。 该表面具有基本上防止电荷保持的性质和/或基本上防止电荷积聚以有助于保持光学元件中的透射率。

公开(公告)号：US20130064536A1

公开(公告)日：2013-03-14

申请号：US13611078

申请日：2012-09-12

申请人： Yusuke TAKI ,  Yohei TAKAHASHI ,  Yujiro URAKAWA

发明人： Yusuke TAKI ,  Yohei TAKAHASHI ,  Yujiro URAKAWA

IPC分类号： B32B7/02 ,  C23C14/24 ,  C23C14/18 ,  C23C14/34 ,  G03B17/12 ,  G03B17/02

CPC分类号： G03B17/14 ,  C23C14/0641 ,  C23C14/205 ,  C23C14/345 ,  Y10T428/2495

摘要： A composite plastic member includes a first stacked body comprised of a plurality of chromium layers stacked on a plastic substrate; and a second stacked body comprised of a plurality of chromium nitride layers stacked on the first stacked body. Each of the first and second stacked bodies is formed such that a lower-hardness layer having a lower hardness than upper and lower layers which contact with and sandwich the lower-hardness layer therebetween and a higher-hardness layer having a higher hardness than upper and lower layers which contact with and sandwich the higher-hardness layer therebetween are alternately stacked in a stacking direction; and a thickness of a higher-hardness chromium nitride layer is not more than 40% of a thickness of a lower-hardness chromium nitride layer in the second stacked body. The composite plastic member has high wear resistance and satisfactory sliding performance, and the conductivity and excellent outer appearance.

摘要翻译： 复合塑料构件包括由堆叠在塑料基板上的多个铬层构成的第一层叠体; 以及由堆叠在第一层叠体上的多个氮化铬层构成的第二层叠体。 第一层叠体和第二层叠体各自形成为具有比上下层更低的硬度的下层硬度层，其中低层与下层硬度层接触并夹着其中的低硬度层，硬度高于上层和 在其间接触并夹着高硬度层的下层在层叠方向上交替堆叠; 并且较高硬度的氮化铬层的厚度不超过第二层叠体中的低硬度氮化铬层的厚度的40％。 复合塑料构件具有高耐磨性和令人满意的滑动性能，导电性和优异的外观。

公开(公告)号：US07731930B2

公开(公告)日：2010-06-08

申请号：US11663176

申请日：2005-11-10

申请人： Yusuke Taki ,  Kiyoaki Shinohara

发明人： Yusuke Taki ,  Kiyoaki Shinohara

IPC分类号： D01F9/12

CPC分类号： H01J9/025 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/04 ,  C01B2202/06 ,  C01B2202/36 ,  H01J1/304 ,  H01J2201/30469 ,  H01J2329/00

摘要： A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300° C. to 400° C. in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450° C. is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.

摘要翻译： 一种制造碳纳米管组件的方法，包括以下步骤：在基板上形成具有预定粒径的金属微粒; 在还原性气氛中将金属微粒加热到规定温度为300〜400℃，使其表面减少; 在反应器中将金属微粒加热到预定的反应温度; 并将有机化合物蒸气引入到反应器中以在金属微粒上生长碳纳米管，使金属微粒的温度超过450℃的时间在600秒或更少的时间段之前 在开始加热金属微粒之后开始碳纳米管的生长。

公开(公告)号：US20090121613A1

公开(公告)日：2009-05-14

申请号：US12232042

申请日：2008-09-10

申请人： Yusuke Taki ,  Kiyoaki Shinohara ,  Makiko Kikuchi

发明人： Yusuke Taki ,  Kiyoaki Shinohara ,  Makiko Kikuchi

IPC分类号： H01J63/04 ,  C23C16/26 ,  C01B31/00 ,  B01J21/06 ,  B01J21/10 ,  B01J21/02 ,  B01J23/745 ,  B01J23/75 ,  B01J23/755 ,  B32B3/14

CPC分类号： B01J35/023 ,  B01J21/185 ,  B01J23/85 ,  B01J23/888 ,  B01J35/004 ,  B01J35/006 ,  B01J37/18 ,  B01J37/34 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/04 ,  C01B2202/08 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2329/00 ,  Y10T428/24612

摘要： A method for producing a carbon nanotube assembly, the method controlling a growth density of carbon nanotubes on a substrate, includes: a step for preparing a catalyst particle dispersed film-formed substrate including a catalyst particle dispersed film in which metal catalyst particles having a predetermined particle diameter are dispersed among barrier particles; and a thermal CVD step for growing carbon nanotubes from the metal catalyst particles serving as starting points by heat decomposition of an organic compound vapor.

摘要翻译： 一种碳纳米管组件的制造方法，其特征在于，控制基板上的碳纳米管的生长密度的方法包括：制备催化剂粒子分散膜形成基板的工序，所述催化剂粒子分散膜形成基板包括催化剂粒子分散膜，其中， 颗粒直径分散在阻隔颗粒之间; 以及通过有机化合物蒸气的热分解从作为起始点的金属催化剂粒子生长碳纳米管的热CVD步骤。

公开(公告)号：US09341923B2

公开(公告)日：2016-05-17

申请号：US13611078

申请日：2012-09-12

申请人： Yusuke Taki ,  Yohei Takahashi ,  Yujiro Urakawa

发明人： Yusuke Taki ,  Yohei Takahashi ,  Yujiro Urakawa

IPC分类号： C23C14/00 ,  G03B17/14 ,  C23C14/06 ,  C23C14/20 ,  C23C14/34

CPC分类号： G03B17/14 ,  C23C14/0641 ,  C23C14/205 ,  C23C14/345 ,  Y10T428/2495

摘要： A composite plastic member includes a first stacked body comprised of a plurality of chromium layers stacked on a plastic substrate; and a second stacked body comprised of a plurality of chromium nitride layers stacked on the first stacked body. Each of the first and second stacked bodies is formed such that a lower-hardness layer having a lower hardness than upper and lower layers which contact with and sandwich the lower-hardness layer therebetween and a higher-hardness layer having a higher hardness than upper and lower layers which contact with and sandwich the higher-hardness layer therebetween are alternately stacked in a stacking direction; and a thickness of a higher-hardness chromium nitride layer is not more than 40% of a thickness of a lower-hardness chromium nitride layer in the second stacked body. The composite plastic member has high wear resistance and satisfactory sliding performance, and the conductivity and excellent outer appearance.

摘要翻译： 复合塑料构件包括由堆叠在塑料基板上的多个铬层构成的第一层叠体; 以及由堆叠在第一层叠体上的多个氮化铬层构成的第二层叠体。 第一层叠体和第二层叠体各自形成为具有比上下层更低的硬度的下层硬度层，其中低层与下层硬度层接触并夹着其中的低硬度层，硬度高于上层和 在其间接触并夹着高硬度层的下层在层叠方向上交替堆叠; 并且较高硬度的氮化铬层的厚度不超过第二层叠体中的低硬度氮化铬层的厚度的40％。 复合塑料构件具有高耐磨性和令人满意的滑动性能，导电性和优异的外观。

公开(公告)号：US07700459B2

公开(公告)日：2010-04-20

申请号：US11628053

申请日：2005-05-31

申请人： Masaomi Kameyama ,  Norio Kaneko ,  Yusuke Taki

发明人： Masaomi Kameyama ,  Norio Kaneko ,  Yusuke Taki

IPC分类号： H01L21/20

CPC分类号： H01L29/66439 ,  B82Y10/00 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/66757 ,  H01L29/785 ,  H01L51/0003 ,  H01L51/0049 ,  H01L51/0545

摘要： Upon fixing fine particulate active element members, which are carbon nanotube, rod-shaped semiconductor crystal, or the like, in an electronic device at predetermined positions thereof respectively, a method for producing an electronic device includes: dispersing the fine particulate active element members in a dielectric liquid and filling the liquid in a space between a process-objective substrate and a mask which is placed opposite to the substrate and which has predetermined pattern electrodes formed therein; and applying a predetermined voltage to the predetermined electrodes to concentrate the fine particulate active element members at positions which correspond to positions of the pattern electrodes, respectively. In this state, a light is irradiated to the substrate and the fine particulate active element members in the liquid so as to fix the fine particulate active element members to the substrate by a photochemical reaction. Thus, a high-performance electronic device using carbon nanotubes or rod-shaped semiconductor crystal can be manufactured at low cost.

摘要翻译： 在分别在电子装置的预定位置固定作为碳纳米管，棒状半导体晶体等的细颗粒活性元件构件时，电子装置的制造方法包括：将微粒活性元素构件分散在 电介质液体，并且在处理对象基板和掩模之间的空间中填充液体，所述掩模与所述基板相对放置并且其中形成有预定图案电极; 并且将预定电压施加到预定电极，以将细微粒状有源元件分别集中在对应于图案电极的位置的位置处。 在这种状态下，将光照射到液体中的基板和微粒活性元件部件上，以通过光化学反应将微粒活性元件部件固定在基板上。 因此，可以以低成本制造使用碳纳米管或棒状半导体晶体的高性能电子器件。

公开(公告)号：US20080014675A1

公开(公告)日：2008-01-17

申请号：US11628053

申请日：2005-05-31

申请人： Masaomi Kameyama ,  Norio Kaneko ,  Yusuke Taki

发明人： Masaomi Kameyama ,  Norio Kaneko ,  Yusuke Taki

IPC分类号： H01L21/64 ,  H01L51/00

CPC分类号： H01L29/66439 ,  B82Y10/00 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/66757 ,  H01L29/785 ,  H01L51/0003 ,  H01L51/0049 ,  H01L51/0545

摘要： Upon fixing fine particulate active element members AE1 to AE3, which are carbon nanotube, rod-shaped semiconductor crystal, or the like, in an electronic device at predetermined positions thereof respectively, a method for producing an electronic device includes: dispersing the fine particulate active element members in a dielectric liquid 12 and filling the liquid in a space between a process-objective substrate 20 and a mask 1 which is placed opposite to the substrate and which has predetermined pattern electrodes P1C, P1L, P1R formed therein; and applying a predetermined voltage to the predetermined electrodes to concentrate the fine particulate active element members at positions which correspond to positions of the pattern electrodes, respectively. In this state, a light is irradiated to the substrate and the fine particulate active element members in the liquid so as to fix the fine particulate active element members to the substrate by a photochemical reaction. Thus, a high-performance electronic device using carbon nanotubes or rod-shaped semiconductor crystal can be manufactured at low cost.

摘要翻译： 在分别在电子装置的预定位置固定作为碳纳米管，棒状半导体晶体等的微粒有源元件构件AE1〜AE3的情况下，电子装置的制造方法包括： 电介质液体12中的颗粒状有源元件，并将液体填充在处理对象基板20和掩模1之间的与基板相对放置的空间中，并且具有预定图案电极P 1 C，P 1 L，P 1 R形成; 并且将预定电压施加到预定电极，以将细微粒状有源元件分别集中在对应于图案电极的位置的位置处。 在这种状态下，将光照射到液体中的基板和微粒活性元件部件上，以通过光化学反应将微粒活性元件部件固定在基板上。 因此，可以以低成本制造使用碳纳米管或棒状半导体晶体的高性能电子器件。

公开(公告)号：US20080031804A1

公开(公告)日：2008-02-07

申请号：US11663176

申请日：2005-11-10

申请人： Yusuke Taki ,  Kiyoaki Shinohara

发明人： Yusuke Taki ,  Kiyoaki Shinohara

IPC分类号： C01B31/02 ,  H01J9/02

CPC分类号： H01J9/025 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/04 ,  C01B2202/06 ,  C01B2202/36 ,  H01J1/304 ,  H01J2201/30469 ,  H01J2329/00

摘要： A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300° C. to 400° C. in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450° C. is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.

摘要翻译： 一种制造碳纳米管组件的方法，包括以下步骤：在基板上形成具有预定粒径的金属微粒; 在还原性气氛中将金属微粒加热到规定温度为300〜400℃，使其表面减少; 在反应器中将金属微粒加热到预定的反应温度; 并将有机化合物蒸气引入到反应器中以在金属微粒上生长碳纳米管，使金属微粒的温度超过450℃的时间在600秒或更少的时间段之前 在开始加热金属微粒之后开始碳纳米管的生长。