公开(公告)号：US20180166289A1

公开(公告)日：2018-06-14

申请号：US15580370

申请日：2016-06-07

Applicant: AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION

Inventor： Chang-Koo KIM ,  Sung-Woon CHO ,  Jun-Hyun KIM ,  Jeong-Geun BAK

IPC: H01L21/3065 ,  H01L21/033 ,  H01L21/02 ,  B32B33/00

CPC classification number: H01L21/3065 ,  B32B33/00 ,  B32B2307/73 ,  B32B2307/732 ,  B32B2457/14 ,  B81B1/008 ,  B81B2201/055 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C1/00031 ,  B81C1/00111 ,  B81C1/00206 ,  B81C1/00214 ,  B81C1/00531 ,  B81C1/00539 ,  B82Y40/00 ,  C09D5/00 ,  C09K13/00 ,  H01L21/02112 ,  H01L21/0334

Abstract: The present invention relates to a method for producing a super-hydrophobic surface, and to a stack having a super-hydrophobic surface prepared by the above method. The super-hydrophobic surface may be realized only by plasma etching and deposition. The super-hydrophobic surface according to the present invention has a very low work of adhesion less than or equal to 3 mJ/m2. This super-hydrophobic surface may be applied to various fields including self-cleaning surface, anti-fogging surface, automobile glass surface, and drug delivery device surface.