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公开(公告)号：US11850742B2
公开(公告)日：2023-12-26
申请号：US16850590
申请日：2020-04-16
CPC分类号： B25J9/04 , B25J9/0009 , B25J9/06 , B25J17/02 , B25J15/0014
摘要： A robot may include a first arm assembly including a first upper arm rotatable about a first axis; a first forearm adapted for rotation relative to the first upper arm about a second axis; a first wrist member adapted for rotation relative to the first forearm about a third axis; and a first end effector coupled to the first wrist member, wherein the first end effector is moveable along a first path. A second arm assembly may include a second upper arm rotatable about the first axis; a second forearm adapted for rotation relative to the second upper arm about a fourth axis; a second wrist member adapted for rotation relative to the second forearm; and a second end effector coupled to the second wrist member, wherein the second end effector is moveable along a second path that does not overlap the first path. Other apparatus and methods are disclosed.
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公开(公告)号：US11101115B2
公开(公告)日：2021-08-24
申请号：US16824394
申请日：2020-03-19
发明人： Nicholas M. Kopec , Damon K. Cox , Andreas Schmid
IPC分类号： H01J37/32 , H01L21/687
摘要： A method and apparatus for replacing process kits that include edge rings and/or support rings in processing chambers. In one implementation, a process kit comprises a multi-segment edge ring. The multi-segment edge ring comprises a first segment, a second segment, and a first annular body. The first annular body comprises a first upper surface, a first lower surface opposite the first upper surface, a first inner surface and a first outer surface. The first segment and the second segment are connectable to form the first annular body. The first lower surface is operable to be positioned over a substrate support disposed within a processing chamber, and at least a portion of the inner surface, which is positioned between the first upper surface and the first lower surface has a diameter greater than a diameter of a substrate to be processed in the processing chamber.
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公开(公告)号：US10710819B1
公开(公告)日：2020-07-14
申请号：US16445550
申请日：2019-06-19
发明人： Rajkumar Thanu , Damon K. Cox
IPC分类号： H01L21/67 , B65G47/91 , B25J9/00 , B25J15/06 , H01L21/687
摘要： A processing system includes a robot arm with an end effector having a longitudinal axis, the robot arm having a reach of at least 45 inches, wherein the end effector includes: a first wafer pocket defined within the end effector at a first location along the longitudinal axis, wherein the first wafer pocket has the reach of at least 45 inches; and a second wafer pocket defined within the end effector at a second location along the longitudinal axis, wherein the second wafer pocket has a second reach that is less than 45 inches. The end effector is capable of concurrently carrying a first wafer in the first wafer pocket and a second wafer in the second wafer pocket.
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公开(公告)号：US11850745B2
公开(公告)日：2023-12-26
申请号：US17886709
申请日：2022-08-12
发明人： Jeff Hudgens , Damon K. Cox , Rajkumar Thanu
IPC分类号： B25J9/10 , B25J18/00 , B25J17/02 , H01L21/677 , H01L21/687 , F16H35/02 , F16H35/00
CPC分类号： B25J9/1045 , B25J17/0241 , B25J18/00 , F16H35/02 , H01L21/67742 , H01L21/68707 , F16H2035/003
摘要： Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.
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公开(公告)号：US11766782B2
公开(公告)日：2023-09-26
申请号：US16861000
申请日：2020-04-28
IPC分类号： B25J9/16 , H01L21/67 , H01L21/677 , H01L21/687 , B65G47/90 , H01L21/68 , B25J11/00 , B25J13/08
CPC分类号： B25J9/1692 , B65G47/905 , H01L21/67167 , H01L21/67196 , H01L21/67259 , H01L21/67706 , H01L21/67742 , H01L21/67745 , H01L21/68 , H01L21/68707 , B25J9/1697 , B25J11/0095 , B25J13/08
摘要： A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.
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公开(公告)号：US20230132174A1
公开(公告)日：2023-04-27
申请号：US17968870
申请日：2022-10-19
摘要： A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.
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公开(公告)号：US20220088803A1
公开(公告)日：2022-03-24
申请号：US17030094
申请日：2020-09-23
发明人： Alexander Berger , Paul Lawrence Korff , William Paul Laceky , Jeffrey C. Hudgens , Rajkumar Thanu , Damon K. Cox , Matvey Farber
摘要： A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.
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公开(公告)号：US20210292104A1
公开(公告)日：2021-09-23
申请号：US17205878
申请日：2021-03-18
摘要： A carrier includes a rigid body forming a plurality of openings and a plurality of fasteners configured to removably attach to the rigid body via the plurality of openings. A first set of fingers is configured to be removably attached to the rigid body via the plurality of fasteners and the plurality of openings. The first set of fingers is configured to support first content during first transportation of the carrier within a substrate processing system. A second set of fingers is configured to be removably attached to the rigid body via the plurality of fasteners and the plurality of openings. The second set of fingers is configured to support second content during second transportation of the carrier within the substrate processing system.
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公开(公告)号：US20210276180A1
公开(公告)日：2021-09-09
申请号：US16808015
申请日：2020-03-03
发明人： Jeff Hudgens , Damon K. Cox , Rajkumar Thanu
IPC分类号： B25J9/10 , B25J18/00 , B25J17/02 , F16H35/02 , H01L21/677 , H01L21/687
摘要： Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.
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10.发明授权公开(公告)号：US10850390B2
公开(公告)日：2020-12-01
申请号：US16415978
申请日：2019-05-17
IPC分类号： H01L21/67 , B25J9/00 , B25J9/04 , H01L21/677
摘要： Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.
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