公开(公告)号：US10312048B2

公开(公告)日：2019-06-04

申请号：US15834939

申请日：2017-12-07

Applicant: APPLIED MATERIALS, INC.

Inventor： Leonid Dorf ,  Travis Koh ,  Olivier Luere ,  Olivier Joubert ,  Philip A. Kraus ,  Rajinder Dhindsa ,  James Hugh Rogers

IPC: H01J37/08 ,  C23C14/54 ,  C23C16/50 ,  H01J37/248

Abstract: Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias. In an embodiment, a method includes applying a positive jump voltage to an electrode of a process chamber to neutralize a wafer surface, applying a negative jump voltage to the electrode to set a wafer voltage, and modulating the amplitude of the wafer voltage to produce a predetermined number of pulses to determine an ion energy distribution function. In another embodiment a method includes applying a positive jump voltage to an electrode of a process chamber to neutralize a wafer surface, applying a negative jump voltage to the electrode to set a wafer voltage, and applying a ramp voltage to the electrode that overcompensates for ion current on the wafer or applying a ramp voltage to the electrode that undercompensates for ion current on the wafer.

公开(公告)号：US12211734B2

公开(公告)日：2025-01-28

申请号：US17688712

申请日：2022-03-07

Applicant: Applied Materials, Inc.

Inventor： Alexander Sulyman ,  Carlaton Wong ,  Rajinder Dhindsa ,  Timothy Joseph Franklin ,  Steven Babayan ,  Anwar Husain ,  James Hugh Rogers ,  Xue Yang Chang

IPC: H01L21/67 ,  H01L21/683 ,  H01L21/687

Abstract: Methods and apparatus for a lift pin mechanism for substrate processing chambers are provided herein. In some embodiments, the lift pin mechanism includes a lift pin comprising a shaft with a top end, a bottom end, and a coupling end at the bottom end; a bellows assembly disposed about the shaft. The bellows assembly includes an upper bellows flange having an opening for axial movement of the shaft; a bellows having a first end coupled to a lower surface of the upper bellows flange such that the shaft extends into a central volume surrounded by the bellows; and a bellows guide assembly coupled to a second end of the bellows to seal the central volume. The shaft is coupled to the bellows guide assembly at the coupling end. The bellows guide assembly is axially movable to move the lift pin with respect to the upper bellows flange.

公开(公告)号：US12125688B2

公开(公告)日：2024-10-22

申请号：US17183595

申请日：2021-02-24

Applicant: APPLIED MATERIALS, INC.

Inventor： Hamid Noorbakhsh ,  James Hugh Rogers

IPC: H01J37/32

CPC classification number: H01J37/32733 ,  H01J37/32467 ,  H01J37/32715

Abstract: Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a process chamber includes a slit door having an arcuate profile and including a first plate slidably coupled to a second plate, wherein the first plate is configured to be coupled to an actuator, wherein the second plate has an inner surface that includes silicon, and wherein the inner surface includes a plurality of grooves.