公开(公告)号：US11557499B2

公开(公告)日：2023-01-17

申请号：US17072082

申请日：2020-10-16

申请人： APPLIED MATERIALS, INC.

发明人： Yuichi Wada ,  Kok Wei Tan ,  Chul Nyoung Lee ,  Siew Kit Hoi ,  Xinxin Wang ,  Zheng Min Clarence Chong ,  Yaoying Zhong ,  Kok Seong Teo

IPC分类号： H01J37/32 ,  H01L21/683 ,  C23C4/134 ,  C23C14/34

摘要： Methods and apparatus for protecting parts of a process chamber from thermal cycling effects of deposited materials. In some embodiments, a method of protecting the part of the process chamber includes wet etching the part with a weak alkali or acid, cleaning the part by bead blasting, coating at least a portion of a surface of the part with a stress relief layer. The stress relief layer forms a continuous layer that is approximately 50 microns to approximately 250 microns thick and is configured to preserve a structural integrity of the part from the thermal cycling of aluminum deposited on the part. The method may also include wet cleaning of the part with a heated deionized water rinse after formation of the stress relief layer.

公开(公告)号：US11881385B2

公开(公告)日：2024-01-23

申请号：US16857828

申请日：2020-04-24

申请人： APPLIED MATERIALS, INC.

发明人： Yueh Sheng Ow ,  Yuichi Wada ,  Junqi Wei ,  Kang Zhang ,  Ananthkrishna Jupudi ,  Sarath Babu ,  Kok Seong Teo ,  Kok Wei Tan

IPC分类号： H01J37/32 ,  H01L21/67

CPC分类号： H01J37/32495 ,  H01J37/32504 ,  H01L21/67028 ,  H01J2237/335

摘要： Apparatus and methods use a unique process kit to protect a processing volume of a process chamber. The process kit includes a shield with a frame configured to be insertable into a shield and a foil liner composed of a metallic material that is attachable to the frame at specific points. The specific attachment points are spaced apart to produce an amount of flexibility based on a malleability of the metallic material. The amount of flexibility ranges from approximately 2.5 to approximately 4.5.