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公开(公告)号：US10766824B2
公开(公告)日：2020-09-08
申请号：US15807508
申请日：2017-11-08
IPC分类号： C04B35/64 , H01J37/32 , C04B35/622 , C04B41/50 , C04B41/00 , C04B41/87 , C04B35/505 , C04B35/50
摘要： Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.
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公开(公告)号：US20210123143A1
公开(公告)日：2021-04-29
申请号：US17072301
申请日：2020-10-16
发明人： David Fenwick , Jennifer Y. Sun , Cheng-Hsuan Chou , Xiao-Ming He
IPC分类号： C23F11/02 , C23C16/40 , C23C16/505 , C23C16/455 , C23F11/18
摘要： Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.
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公开(公告)号：US10858741B2
公开(公告)日：2020-12-08
申请号：US16298964
申请日：2019-03-11
发明人： Xiao-Ming He , Jennifer Y. Sun
IPC分类号： C23C16/40 , C23C16/455 , C23C28/04 , C25D11/24
摘要： Disclosed herein is an article comprising one or more channels and a multi-layer protective coating on the one or more channels. The multi-layer protective coating includes an anodization layer comprising a plurality of cracks and a plurality of pores, a sealing layer on the anodization layer, and a top layer on the sealing layer. The sealing layer comprises a metal oxide, the seals the plurality of cracks and the plurality of pores, and has a porosity of approximately 0%. The top layer comprises a rare earth oxide, a rare earth fluoride, or a rare earth oxyfluoride, has a different material composition than the sealing layer, and has a porosity of approximately 0%.
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公开(公告)号：US20220349041A1
公开(公告)日：2022-11-03
申请号：US17864745
申请日：2022-07-14
发明人： Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
摘要： Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
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公开(公告)号：US20200291528A1
公开(公告)日：2020-09-17
申请号：US16298964
申请日：2019-03-11
发明人： Xiao-Ming He , Jennifer Y. Sun
IPC分类号： C23C28/04
摘要： Disclosed herein is an article comprising one or more channels and a multi-layer protective coating on the one or more channels. The multi-layer protective coating includes an anodization layer comprising a plurality of cracks and a plurality of pores, a sealing layer on the anodization layer, and a top layer on the sealing layer. The sealing layer comprises a metal oxide, the seals the plurality of cracks and the plurality of pores, and has a porosity of approximately 0%. The top layer comprises a rare earth oxide, a rare earth fluoride, or a rare earth oxyfluoride, has a different material composition than the sealing layer, and has a porosity of approximately 0%.
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公开(公告)号：US10755900B2
公开(公告)日：2020-08-25
申请号：US15965794
申请日：2018-04-27
发明人： Toan Tran , Laksheswar Kalita , Tae Won Kim , Dmitry Lubomirsky , Xiaowei Wu , Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
IPC分类号： C23C16/40 , H01J37/32 , C23C16/02 , C23C28/04 , C23C16/455 , C23C16/04 , C23C16/44 , C23C24/04 , C23C18/36 , C25D7/12
摘要： A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
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公开(公告)号：US20190382880A1
公开(公告)日：2019-12-19
申请号：US16444701
申请日：2019-06-18
发明人： Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
摘要： Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
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公开(公告)号：US20180330923A1
公开(公告)日：2018-11-15
申请号：US15965794
申请日：2018-04-27
发明人： Toan Tran , Laksheswar Kalita , Tae Won Kim , Dmitry Lubomirsky , Xiaowei Wu , Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
摘要： A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
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