公开(公告)号：US10766824B2

公开(公告)日：2020-09-08

申请号：US15807508

申请日：2017-11-08

Applicant: APPLIED Materials, Inc.

Inventor： Kaushal Gangakhedkar ,  Jennifer Y. Sun ,  Xiao-Ming He

IPC: C04B35/64 ,  H01J37/32 ,  C04B35/622 ,  C04B41/50 ,  C04B41/00 ,  C04B41/87 ,  C04B35/505 ,  C04B35/50

Abstract: Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.

公开(公告)号：US10858741B2

公开(公告)日：2020-12-08

申请号：US16298964

申请日：2019-03-11

Applicant: Applied Materials, Inc.

Inventor： Xiao-Ming He ,  Jennifer Y. Sun

IPC: C23C16/40 ,  C23C16/455 ,  C23C28/04 ,  C25D11/24

Abstract: Disclosed herein is an article comprising one or more channels and a multi-layer protective coating on the one or more channels. The multi-layer protective coating includes an anodization layer comprising a plurality of cracks and a plurality of pores, a sealing layer on the anodization layer, and a top layer on the sealing layer. The sealing layer comprises a metal oxide, the seals the plurality of cracks and the plurality of pores, and has a porosity of approximately 0%. The top layer comprises a rare earth oxide, a rare earth fluoride, or a rare earth oxyfluoride, has a different material composition than the sealing layer, and has a porosity of approximately 0%.

公开(公告)号：US20210123143A1

公开(公告)日：2021-04-29

申请号：US17072301

申请日：2020-10-16

Applicant: APPLIED MATERIALS, INC.

Inventor： David Fenwick ,  Jennifer Y. Sun ,  Cheng-Hsuan Chou ,  Xiao-Ming He

IPC: C23F11/02 ,  C23C16/40 ,  C23C16/505 ,  C23C16/455 ,  C23F11/18

Abstract: Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.

公开(公告)号：US20220349041A1

公开(公告)日：2022-11-03

申请号：US17864745

申请日：2022-07-14

Applicant: Applied Materials, Inc.

Inventor： Xiao-Ming He ,  Cheng-Hsuan Chou ,  Jennifer Y. Sun

IPC: C23C14/08 ,  C23C16/455 ,  C23C16/02 ,  C23C14/04 ,  C23C14/34 ,  C23C16/40

Abstract: Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.

公开(公告)号：US20200291528A1

公开(公告)日：2020-09-17

申请号：US16298964

申请日：2019-03-11

Applicant: Applied Materials, Inc.

Inventor： Xiao-Ming He ,  Jennifer Y. Sun

IPC: C23C28/04

Abstract: Disclosed herein is an article comprising one or more channels and a multi-layer protective coating on the one or more channels. The multi-layer protective coating includes an anodization layer comprising a plurality of cracks and a plurality of pores, a sealing layer on the anodization layer, and a top layer on the sealing layer. The sealing layer comprises a metal oxide, the seals the plurality of cracks and the plurality of pores, and has a porosity of approximately 0%. The top layer comprises a rare earth oxide, a rare earth fluoride, or a rare earth oxyfluoride, has a different material composition than the sealing layer, and has a porosity of approximately 0%.

公开(公告)号：US10755900B2

公开(公告)日：2020-08-25

申请号：US15965794

申请日：2018-04-27

Applicant: Applied Materials, Inc.

Inventor： Toan Tran ,  Laksheswar Kalita ,  Tae Won Kim ,  Dmitry Lubomirsky ,  Xiaowei Wu ,  Xiao-Ming He ,  Cheng-Hsuan Chou ,  Jennifer Y. Sun

IPC: C23C16/40 ,  H01J37/32 ,  C23C16/02 ,  C23C28/04 ,  C23C16/455 ,  C23C16/04 ,  C23C16/44 ,  C23C24/04 ,  C23C18/36 ,  C25D7/12

Abstract: A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.

公开(公告)号：US20190382880A1

公开(公告)日：2019-12-19

申请号：US16444701

申请日：2019-06-18

Applicant: Applied Materials, Inc.

Inventor： Xiao-Ming He ,  Cheng-Hsuan Chou ,  Jennifer Y. Sun

IPC: C23C14/08 ,  C23C16/455 ,  C23C16/02 ,  C23C16/40 ,  C23C14/34 ,  C23C14/04

Abstract: Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.

公开(公告)号：US20180330923A1

公开(公告)日：2018-11-15

申请号：US15965794

申请日：2018-04-27

Applicant: Applied Materials, Inc.

Inventor： Toan Tran ,  Laksheswar Kalita ,  Tae Won Kim ,  Dmitry Lubomirsky ,  Xiaowei Wu ,  Xiao-Ming He ,  Cheng-Hsuan Chou ,  Jennifer Y. Sun

IPC: H01J37/32 ,  C23C16/40

Abstract: A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.