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公开(公告)号：US20240264336A1
公开(公告)日：2024-08-08
申请号：US18605667
申请日：2024-03-14
发明人： Alexander Berger , Cheng-Hsuan Chou , David Knapp
CPC分类号： G02B1/14 , B05D1/60 , B05D7/22 , C23C16/045 , G02B3/00
摘要： Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device including an optical encoder using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including an optical encoder, where one or more internal components enclosed within the optical encoder and a coating deposited onto a surface of the internal components, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.
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公开(公告)号：US20220349041A1
公开(公告)日：2022-11-03
申请号：US17864745
申请日：2022-07-14
发明人： Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
摘要： Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
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公开(公告)号：US11933942B2
公开(公告)日：2024-03-19
申请号：US16820338
申请日：2020-03-16
发明人： Alexander Berger , Cheng-Hsuan Chou , David Knapp
CPC分类号： G02B1/14 , B05D1/60 , B05D7/22 , C23C16/045 , G02B3/00
摘要： Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including one or more internal components enclosed within the assembled device and a coating deposited onto a surface of the internal components enclosed within the assembled device, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.
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公开(公告)号：US20210123143A1
公开(公告)日：2021-04-29
申请号：US17072301
申请日：2020-10-16
发明人： David Fenwick , Jennifer Y. Sun , Cheng-Hsuan Chou , Xiao-Ming He
IPC分类号： C23F11/02 , C23C16/40 , C23C16/505 , C23C16/455 , C23F11/18
摘要： Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.
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公开(公告)号：US10755900B2
公开(公告)日：2020-08-25
申请号：US15965794
申请日：2018-04-27
发明人： Toan Tran , Laksheswar Kalita , Tae Won Kim , Dmitry Lubomirsky , Xiaowei Wu , Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
IPC分类号： C23C16/40 , H01J37/32 , C23C16/02 , C23C28/04 , C23C16/455 , C23C16/04 , C23C16/44 , C23C24/04 , C23C18/36 , C25D7/12
摘要： A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
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公开(公告)号：US20190382880A1
公开(公告)日：2019-12-19
申请号：US16444701
申请日：2019-06-18
发明人： Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
摘要： Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
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公开(公告)号：US20180330923A1
公开(公告)日：2018-11-15
申请号：US15965794
申请日：2018-04-27
发明人： Toan Tran , Laksheswar Kalita , Tae Won Kim , Dmitry Lubomirsky , Xiaowei Wu , Xiao-Ming He , Cheng-Hsuan Chou , Jennifer Y. Sun
摘要： A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
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