公开(公告)号：US20230143103A1

公开(公告)日：2023-05-11

申请号：US17981647

申请日：2022-11-07

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: H01L21/67 ,  F16L55/132 ,  F16K3/24

CPC classification number: H01L21/67253 ,  F16K3/24 ,  F16L55/132 ,  H01L21/67248

Abstract: A valve assembly may provide a body comprising a bottom portion and a top portion having a threaded region, a closing mechanism situated above the top portion of the body, an actuator in communication with the closing mechanism, a nut configured to attach to the threaded region, and a threaded hole extending into at least one of the bottom portion of the body or the nut.

公开(公告)号：US20210041284A1

公开(公告)日：2021-02-11

申请号：US16944763

申请日：2020-07-31

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: G01F23/26

Abstract: A chemical vessel used for holding a liquid chemical precursor is disclosed comprising a liquid level sensor tube. The liquid level sensor tube is configured to operate in an environment where the liquid chemical precursor is heated to a point of boiling or vaporization. The liquid level sensor tube comprises housing with a slot built in to prevent any false readings of sensors disposed within the liquid level sensor tube.

公开(公告)号：US20240301980A1

公开(公告)日：2024-09-12

申请号：US18665202

申请日：2024-05-15

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: F16L53/38 ,  C23C16/455 ,  H01L21/67

CPC classification number: F16L53/38 ,  H01L21/67023 ,  C23C16/45561 ,  Y10T137/6416

Abstract: An apparatus capable of heating a liquid may provide a valve assembly configured to receive an incoming liquid from a bulk source. The valve assembly may control the flow of the liquid to a source vessel via a pipe system. The pipe system includes a first pipe directly connected to the valve assembly and a second pipe downstream from the first pipe and connected between the first pipe and the source valve. The second pipe is heated with a heating system that surrounds the second pipe, and the second pipe has a larger diameter than that of the first pipe.

公开(公告)号：US11869782B2

公开(公告)日：2024-01-09

申请号：US17981647

申请日：2022-11-07

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: F16K27/12 ,  H01L21/67 ,  F16K3/24 ,  F16L55/132

CPC classification number: H01L21/67253 ,  F16K3/24 ,  F16K27/12 ,  F16L55/132 ,  H01L21/67248

Abstract: A valve assembly may provide a body comprising a bottom portion and a top portion having a threaded region, a closing mechanism situated above the top portion of the body, an actuator in communication with the closing mechanism, a nut configured to attach to the threaded region, and a threaded hole extending into at least one of the bottom portion of the body or the nut.

公开(公告)号：US20240112934A1

公开(公告)日：2024-04-04

申请号：US18539754

申请日：2023-12-14

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: H01L21/67 ,  F16K3/24 ,  F16K27/12 ,  F16L55/132

CPC classification number: H01L21/67253 ,  F16K3/24 ,  F16K27/12 ,  F16L55/132 ,  H01L21/67248

Abstract: A valve assembly may provide a body comprising a bottom portion and a top portion having a threaded region, a closing mechanism situated above the top portion of the body, an actuator in communication with the closing mechanism, a nut configured to attach to the threaded region, and a threaded hole extending into at least one of the bottom portion of the body or the nut.

公开(公告)号：US11781221B2

公开(公告)日：2023-10-10

申请号：US16860973

申请日：2020-04-28

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III ,  Todd Robert Dunn

IPC: C23C16/40 ,  C23C16/52 ,  G01F23/00 ,  C23C16/44 ,  C23C16/455 ,  C30B25/14 ,  C30B25/16 ,  C23C16/458

CPC classification number: C23C16/52 ,  C23C16/4408 ,  C23C16/4583 ,  C23C16/45525 ,  C30B25/14 ,  C30B25/165 ,  G01F23/0007

Abstract: A chemical vessel is disclosed comprising a dip tube and a level sensor tube arranged in an elongated counterbore incorporated into a housing of the chemical vessel. The chemical vessel may be configured to allow a pushback routine to take place, whereby a level of liquid in the chemical vessel is reduced to a point that the dip tube is free from liquid inside the dip tube or at the bottom of the dip tube. Once the dip tube is free of the liquid, then a vacuum source may be used to purge vapor within the chemical vessel without the risk of damage to the vacuum source.

公开(公告)号：US11680839B2

公开(公告)日：2023-06-20

申请号：US16944763

申请日：2020-07-31

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: G01F23/263 ,  G01F23/296 ,  G01F23/292

CPC classification number: G01F23/265 ,  G01F23/268 ,  G01F23/2961 ,  G01F23/2921

Abstract: A chemical vessel used for holding a liquid chemical precursor is disclosed comprising a liquid level sensor tube. The liquid level sensor tube is configured to operate in an environment where the liquid chemical precursor is heated to a point of boiling or vaporization. The liquid level sensor tube comprises housing with a slot built in to prevent any false readings of sensors disposed within the liquid level sensor tube.

公开(公告)号：US20230091275A1

公开(公告)日：2023-03-23

申请号：US17944296

申请日：2022-09-14

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: F16L53/38 ,  H01L21/67

Abstract: An apparatus capable of heating a liquid may provide a valve assembly configured to receive an incoming liquid from a bulk source. The valve assembly may control the flow of the liquid to a source vessel via a pipe system. The pipe system includes a first pipe directly connected to the valve assembly and a second pipe downstream from the first pipe and connected between the first pipe and the source valve. The second pipe is heated with a heating system that surrounds the second pipe, and the second pipe has a larger diameter than that of the first pipe.

公开(公告)号：US12224190B2

公开(公告)日：2025-02-11

申请号：US18539754

申请日：2023-12-14

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: H01L21/67 ,  F16K3/24 ,  F16K27/12 ,  F16L55/132

Abstract: A valve assembly may provide a body comprising a bottom portion and a top portion having a threaded region, a closing mechanism situated above the top portion of the body, an actuator in communication with the closing mechanism, a nut configured to attach to the threaded region, and a threaded hole extending into at least one of the bottom portion of the body or the nut.

公开(公告)号：US11988316B2

公开(公告)日：2024-05-21

申请号：US17944296

申请日：2022-09-14

Applicant: ASM IP Holding B.V.

Inventor： Andrew Michael Yednak, III

IPC: H01L21/67 ,  F16L53/38 ,  C23C16/455

CPC classification number: F16L53/38 ,  H01L21/67023 ,  C23C16/45561 ,  Y10T137/6416

Abstract: An apparatus capable of heating a liquid may provide a valve assembly configured to receive an incoming liquid from a bulk source. The valve assembly may control the flow of the liquid to a source vessel via a pipe system. The pipe system includes a first pipe directly connected to the valve assembly and a second pipe downstream from the first pipe and connected between the first pipe and the source valve. The second pipe is heated with a heating system that surrounds the second pipe, and the second pipe has a larger diameter than that of the first pipe.