公开(公告)号：US20220213593A1

公开(公告)日：2022-07-07

申请号：US17600493

申请日：2020-03-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Tamara DRUZHININA ,  Jim Vincent OVERKAMP ,  Alexey Olegovich POLYAKOV ,  Teis Johan COENEN ,  Evgenia KURGANOVA ,  Ionel Mugurel CIOBICA ,  Alexander Ludwig KLEIN ,  Albertus Victor Gerardus MANGNUS ,  Marijke SCOTUZZI ,  Bastiaan Maurice VAN DEN BROEK

IPC: C23C16/26 ,  C23C16/48 ,  C23C16/56 ,  G03F7/20 ,  G03F1/22

Abstract: Methods and apparatus for forming a patterned layer of material are disclosed. In one arrangement, a selected portion of a surface of a substrate is irradiated during a deposition process, the irradiation being such as to locally drive the deposition process in the selected portion to form a layer of deposited material in a pattern defined by the selected portion. The deposited material is annealed to modify the deposited material.

公开(公告)号：US20240111221A1

公开(公告)日：2024-04-04

申请号：US18275663

申请日：2022-01-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Hendrik Adriaan VAN LAARHOVEN ,  Bastiaan Maurice VAN DEN BROEK ,  Vito Daniele RUTIGLIANI

IPC: G03F7/00

CPC classification number: G03F7/706841 ,  G03F7/70633 ,  G03F7/706831

Abstract: A method of determining a measurement recipe for measurement of in-die targets located within one or more die areas of an exposure field. The method includes obtaining first measurement data relating to measurement of a plurality of reference targets and second measurement data relating to measurement of a plurality of in-die targets, the targets having respective different overlay biases and measured using a plurality of different acquisition settings for acquiring the measurement data. One or more machine learning models are trained using the first measurement data to obtain a plurality of candidate measurement recipes, wherein the candidate measurement recipes include a plurality of combinations of a trained machine learned model and a corresponding acquisition setting; and a preferred measurement recipe is determined from the candidate measurement recipes using the second measurement data.

公开(公告)号：US20230280662A1

公开(公告)日：2023-09-07

申请号：US18023708

申请日：2021-08-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Evgenia KURGANOVA ,  Marijke SCOTUZZI ,  Vina FARAMARZI ,  Bastiaan Maurice VAN DEN BROEK

IPC: G03F7/00 ,  G03F7/20

CPC classification number: G03F7/706841 ,  G03F7/70133

Abstract: Methods of performing metrology. In one arrangement a substrate has a layer. The layer comprises a two-dimensional material. A target portion of the layer is illuminated with a beam of radiation and a distribution of radiation in a pupil plane is detected to obtain measurement data. The measurement data is processed to obtain metrology information about the target portion of the layer. The illuminating, detecting and processing are performed for plural different target portions of the layer to obtain metrology information for the plural target portions of the layer.