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公开(公告)号：US20230298850A1
公开(公告)日：2023-09-21
申请号：US18320157
申请日：2023-05-18
IPC分类号： H01J37/22 , H01J37/28 , H01J37/244
CPC分类号： H01J37/222 , H01J37/28 , H01J37/244 , H01J2237/2817 , H01J2237/24592 , H01J2237/1534
摘要： Disclosed herein is an inspection tool and a method for identifying defects in a sample. The method includes steps of scanning a first area of a sample with a first detector-beam and scanning a second area of the sample with a second detector-beam, then receiving first and second signals that are derived from the first and second detector-beams. The first and second signals are compared to determine whether a defect is present in the sample.
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公开(公告)号：US20220213593A1
公开(公告)日：2022-07-07
申请号：US17600493
申请日：2020-03-20
发明人： Tamara DRUZHININA , Jim Vincent OVERKAMP , Alexey Olegovich POLYAKOV , Teis Johan COENEN , Evgenia KURGANOVA , Ionel Mugurel CIOBICA , Alexander Ludwig KLEIN , Albertus Victor Gerardus MANGNUS , Marijke SCOTUZZI , Bastiaan Maurice VAN DEN BROEK
摘要： Methods and apparatus for forming a patterned layer of material are disclosed. In one arrangement, a selected portion of a surface of a substrate is irradiated during a deposition process, the irradiation being such as to locally drive the deposition process in the selected portion to form a layer of deposited material in a pattern defined by the selected portion. The deposited material is annealed to modify the deposited material.
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公开(公告)号：US20230324318A1
公开(公告)日：2023-10-12
申请号：US18327847
申请日：2023-06-01
发明人： Yan REN , Erwin SLOT , Albertus Victor, Gerardus MANGNUS , Marijke SCOTUZZI , Erwin Paul SMAKMAN
IPC分类号： G01N23/2251 , H01J37/244 , H01J37/09 , H01J37/12 , H01J37/147
CPC分类号： G01N23/2251 , H01J37/244 , H01J37/09 , H01J37/12 , H01J37/1472 , G01N2223/303 , H01J2237/2448 , H01J2237/0453 , H01J37/20
摘要： A charged-particle tool configured to generate a plurality of sub-beams from a beam of charged particles and direct the sub-beams downbeam toward a sample position, the tool charged-particle tool comprising at least three charged-particle-optical components; a detector module; and a controller. Thea detector module is configured to generate a detection signal in response to charged particles that propagate upbeam from the direction of the sample position. The controller is configured to operate the tool in a calibration mode. The charged-particle-optical components include: a charged-particle source configured to emit a beam of charged particles and a beam generator configured to generate the sub-beams. The detection signal contains information about alignment of at least two of the charged-particle-optical components. The charged-particle optical components comprise two or more charged-particle optical elements comprising an array of apertures for which the charged particles may be monitored.
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公开(公告)号：US20230280662A1
公开(公告)日：2023-09-07
申请号：US18023708
申请日：2021-08-17
CPC分类号： G03F7/706841 , G03F7/70133
摘要： Methods of performing metrology. In one arrangement a substrate has a layer. The layer comprises a two-dimensional material. A target portion of the layer is illuminated with a beam of radiation and a distribution of radiation in a pupil plane is detected to obtain measurement data. The measurement data is processed to obtain metrology information about the target portion of the layer. The illuminating, detecting and processing are performed for plural different target portions of the layer to obtain metrology information for the plural target portions of the layer.
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