公开(公告)号：US20190011838A1

公开(公告)日：2019-01-10

申请号：US16068211

申请日：2016-12-07

申请人： ASML NETHERLANDS B.V.

发明人： Hans BUTLER ,  Cornelius Adrianus Lambertus DE HOON ,  Fransiscus Mathijs JACOBS ,  Pavel KAGAN ,  Jeroen Pieter STARREVELD ,  Maurice Willem Jozef Etiënne WIJCKMANS

IPC分类号： G03F7/20

摘要： A lithographic apparatus is described, the lithographic apparatus comprising: an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a projection system configured to project the patterned radiation beam onto a target portion of a substrate, a stage assembly comprising: a substrate table constructed to hold the substrate; and a positioning device configured to displace the substrate table relative to the projection system; a base frame onto which stage assembly and the projection system are mounted; the base frame comprising a first portion configured to support the stage assembly and a second portion configured to support the projection system, the first portion and the second portion being connected to each other via a compliant portion of the base frame.

公开(公告)号：US20180059555A1

公开(公告)日：2018-03-01

申请号：US15558552

申请日：2016-02-22

申请人： ASML Netherlands B.V.

发明人： Jan Steven Christiaan WESTERLAKEN ,  Marcel Koenraad Marie BAGGEN ,  Fransiscus Mathijs JACOBS ,  Jeroen Arnoldus Leonardus Johannes RAAYMAKERS ,  Frank Pieter Albert VAN DEN BERKMORTEL ,  Marc Wilhelmus Maria VAN DER WIJST

IPC分类号： G03F7/20 ,  G03F9/00

CPC分类号： G03F7/70775 ,  G03F7/70633 ,  G03F7/70641 ,  G03F7/7085 ,  G03F7/70858 ,  G03F7/709 ,  G03F9/70 ,  G03F9/7046

摘要： A measurement system for a lithographic apparatus includes a sub-frame compliantly mounted on a reference frame. A measurement device, e.g. an alignment sensor, is mounted on the sub-frame. Soft mounting of the sub-frame isolates the alignment sensor from high-frequency disturbances, e.g. acoustic noise, by acting as a low-pass filter with a cut-off frequency, e.g. in the range of from 100 to 200 Hz.