公开(公告)号：US20230350301A1

公开(公告)日：2023-11-02

申请号：US17800649

申请日：2021-02-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Evgenia KURGANOVA ,  Gosse Charles DE VRIES ,  Alexey Olegovich POLYAKOV ,  Jim Vincent OVERKAMP ,  Teis Johan COENEN ,  Tamara DRUZHININA ,  Sonia CASTELLANOS ORTEGA ,  Olivier Christian Maurice LUGIER

IPC: G03F7/16 ,  G03F7/36 ,  H01L21/027

CPC classification number: G03F7/167 ,  G03F7/36 ,  H01L21/027

Abstract: Methods and apparatus for forming a patterned layer of material are disclosed. In one arrangement, a deposition-process material is provided in gaseous form. A layer of the deposition-process material is formed on the substrate by causing condensation or deposition of the gaseous deposition-process material. A selected portion of the layer of deposition-process material is irradiated to modify the deposition-process material in the selected portion.

公开(公告)号：US20240011150A1

公开(公告)日：2024-01-11

申请号：US18475068

申请日：2023-09-26

Applicant: ASML Netherlands B.V.

Inventor： Sonia CASTELLANOS ORTEGA ,  Jan VERHOEVEN ,  Joost Wilhelmus Maria FRENKEN ,  Pavlo ANTONOV ,  Nicolaas TEN KATE ,  Olivier Christian Maurice LUGIER

IPC: C23C16/04 ,  C23C16/26 ,  C23C16/48

CPC classification number: C23C16/047 ,  C23C16/26 ,  C23C16/482 ,  C23C16/483 ,  H01L21/02527

Abstract: Methods and apparatus for forming a patterned layer of carbon are disclosed. In one arrangement, a selected portion of a surface of a solid structure is irradiated with extreme ultraviolet radiation in the presence of a carbon-containing precursor. The radiation interacts with the solid structure in the selected portion to cause formation of a layer of carbon in the selected portion from the carbon-containing precursor. The layer of carbon is formed in a pattern defined by the selected portion.

公开(公告)号：US20210032743A1

公开(公告)日：2021-02-04

申请号：US16969088

申请日：2019-02-26

Applicant: ASML Netherlands B.V.

Inventor： Sonia CASTELLANOS ORTEGA ,  Jan VERHOEVEN ,  Joost Wilhelmus Maria FRENKEN ,  Pavlo ANTONOV ,  Nicolaas TEN KATE ,  Olivier Christian Maurice LUGIER

IPC: C23C16/04 ,  H01L21/02 ,  C23C16/26 ,  C23C16/48

Abstract: Methods and apparatus for forming a patterned layer of carbon are disclosed. In one arrangement, a selected portion of a surface of a solid structure is irradiated with extreme ultraviolet radiation in the presence of a carbon-containing precursor. The radiation interacts with the solid structure in the selected portion to cause formation of a layer of carbon in the selected portion from the carbon-containing precursor. The layer of carbon is formed in a pattern defined by the selected portion.