公开(公告)号：US09524854B2

公开(公告)日：2016-12-20

申请号：US14741109

申请日：2015-06-16

Applicant: Advanced Energy Industries, Inc.

Inventor： Daniel J. Hoffman ,  Daniel Carter ,  Victor Brouk ,  Karen Peterson ,  Randy Grilley

IPC: H01J37/32 ,  H05H1/46

CPC classification number: H01J37/32541 ,  H01J37/32091 ,  H01J37/32183 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32568 ,  H01J2237/327 ,  H05H1/46 ,  H05H2001/4675

Abstract: This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.

Abstract translation: 本公开描述了用于将能量电容耦合到等离子体中以点燃和维持远程等离子体源内的等离子体的系统，方法和装置。 功率由至少部分地围绕或被第二电极围绕的第一电极提供。 第二个电极可以接地或浮动。 可以布置第一和第二介电部件以将电极中的一个或两个与等离子体分开，从而将等离子体与一个或两个电极隔离。

公开(公告)号：US20150279631A1

公开(公告)日：2015-10-01

申请号：US14741109

申请日：2015-06-16

Applicant: Advanced Energy Industries, Inc.

Inventor： Daniel J. Hoffman ,  Daniel Carter ,  Victor Brouk ,  Karen Peterson ,  Randy Grilley

IPC: H01J37/32

CPC classification number: H01J37/32541 ,  H01J37/32091 ,  H01J37/32183 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32568 ,  H01J2237/327 ,  H05H1/46 ,  H05H2001/4675

Abstract: This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.

Abstract translation: 本公开描述了用于将能量电容耦合到等离子体中以点燃和维持远程等离子体源内的等离子体的系统，方法和装置。 功率由至少部分地围绕或被第二电极围绕的第一电极提供。 第二个电极可以接地或浮动。 可以布置第一和第二介电部件以将电极中的一个或两个与等离子体分开，从而将等离子体与一个或两个电极隔离。

公开(公告)号：US09142388B2

公开(公告)日：2015-09-22

申请号：US14227583

申请日：2014-03-27

Applicant: Advanced Energy Industries, Inc.

Inventor： Daniel J. Hoffman ,  Daniel Carter ,  Victor Brouk ,  Karen Peterson ,  Randy Grilley

IPC: H01J7/24 ,  H01J37/32 ,  H05H1/46

CPC classification number: H01J37/32541 ,  H01J37/32091 ,  H01J37/32183 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32568 ,  H01J2237/327 ,  H05H1/46 ,  H05H2001/4675

Abstract: This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.

Abstract translation: 本公开描述了用于将能量电容耦合到等离子体中以点燃和维持远程等离子体源内的等离子体的系统，方法和装置。 功率由至少部分地围绕或被第二电极围绕的第一电极提供。 第二个电极可以接地或浮动。 可以布置第一和第二介电部件以将电极中的一个或两个与等离子体分开，从而将等离子体与一个或两个电极隔离。