公开(公告)号：US6060697A

公开(公告)日：2000-05-09

申请号：US39141

申请日：1998-03-13

申请人： Akihiko Morita ,  Masami Ohtani ,  Yasuo Imanishi ,  Masao Tsuji ,  Masaki Iwami ,  Joichi Nishimura ,  Kazuhiro Nishimura ,  Tetsuya Hamada ,  Satoshi Yamamoto ,  Kenji Kamei

发明人： Akihiko Morita ,  Masami Ohtani ,  Yasuo Imanishi ,  Masao Tsuji ,  Masaki Iwami ,  Joichi Nishimura ,  Kazuhiro Nishimura ,  Tetsuya Hamada ,  Satoshi Yamamoto ,  Kenji Kamei

IPC分类号： H01L21/02 ,  G05D23/19 ,  H02J3/00 ,  H02J13/00 ,  H05B1/02

CPC分类号： G05D23/1951

摘要： A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.

摘要翻译： 基板处理装置降低开启时的瞬时最大功耗。 多个处理单元的受电部分分别通过开关连接到导通开关的一端。 导通开关的另一端通过断路器连接到外部电源。 定时器值分别在定时器中设置。 当接通开关接通时，定时器分别在由定时器值定义的时间之后分别关闭相应的开关，由此处理单元被提供电力，每个具有恒定时间的延迟。

公开(公告)号：US06837632B2

公开(公告)日：2005-01-04

申请号：US10646902

申请日：2003-08-22

申请人： Yasufumi Koyama ,  Kenji Kamei ,  Toru Kitamoto ,  Kenji Hashinoki ,  Satoshi Yamamoto ,  Toshiaki Dainin

发明人： Yasufumi Koyama ,  Kenji Kamei ,  Toru Kitamoto ,  Kenji Hashinoki ,  Satoshi Yamamoto ,  Toshiaki Dainin

IPC分类号： B65G49/07 ,  H01L21/00 ,  H01L21/027 ,  H01L21/677 ,  H01L21/68 ,  G03D5/00 ,  B05C13/00

CPC分类号： H01L21/67173 ,  H01L21/67178 ,  H01L21/67184 ,  Y10S414/135

摘要： A substrate treating apparatus has an antireflection film forming block, a resist film forming block and a developing block arranged in juxtaposition, each of these blocks including treating modules and a single main transport mechanism. The main transport mechanism transports substrates within each block, and transfers the substrates between the blocks through inlet substrate rests and outlet substrate rests provided as separate components. This construction realizes improved throughput of the substrate treating apparatus.

公开(公告)号：US5982474A

公开(公告)日：1999-11-09

申请号：US868382

申请日：1997-06-03

申请人： Kazuya Akiyama ,  Kenji Kamei ,  Satoshi Yamamoto

发明人： Kazuya Akiyama ,  Kenji Kamei ,  Satoshi Yamamoto

IPC分类号： G03F7/20 ,  G03B27/42 ,  G03B27/48

CPC分类号： G03F7/2026

摘要： A method and apparatus for exposing a substrate to light perform the steps of inputting position data of a peripheral region along an outline of a chip region on a substrate, which has been placed on a spin chuck, detecting a reference position at an outer edge of the substrate inputting axial directions of the position data and aligning axial directions of an orthogonal shifting mechanism. Based on the position data inputted, light of an irradiator is shifted along the peripheral region to expose the peripheral region in a staggered way along the outline of the chip region. The method and apparatus may also perform the steps of inputting a shape of the chip region on the substrate as image information, deriving position data of the peripheral region along the outline of the chip region from the image information, and exposing the peripheral region to light based on the position data derived. The method and apparatus may also perform the steps of inputting shape information of the substrate, the chip region, and an area around a crossing point of scribe lines in the chip region on the substrate as image information, computing the positions of the peripheral region from the image information and the shape information of the substrate and the chip region; and exposing the peripheral region to light based on the positions of the computed peripheral region.

摘要翻译： 用于将基板曝光的方法和装置执行以下步骤：沿着已经放置在旋转卡盘上的基板上沿着芯片区域的轮廓输入周边区域的位置数据，检测在外部边缘处的基准位置 基板输入位置数据的轴向和正交变换机构的对准轴向。 基于输入的位置数据，照射器的光沿着周边区域移动，沿着芯片区域的轮廓以交错的方式露出周边区域。 该方法和装置还可以执行以下步骤：在基板上输入芯片区域的形状作为图像信息，从图像信息导出沿着芯片区域轮廓的外围区域的位置数据，并将外围区域曝光 基于导出的位置数据。 该方法和装置还可以执行以下步骤：输入衬底的形状信息，芯片区域和衬底上的芯片区域中的划线的交叉点周围的区域作为图像信息，计算外围区域的位置 基板和芯片区域的图像信息和形状信息; 并且基于所计算的周边区域的位置将外围区域曝光。

公开(公告)号：US5438209A

公开(公告)日：1995-08-01

申请号：US12346

申请日：1993-02-02

申请人： Satoshi Yamamoto ,  Kenji Kamei

发明人： Satoshi Yamamoto ,  Kenji Kamei

IPC分类号： G01D5/34 ,  H01L21/68 ,  G01N21/86

CPC分类号： H01L21/681 ,  G01D5/342

摘要： A semiconductor wafer placed on a table is rotated by a stepper motor stepwise by a broad pitch. At this time, a CCD line sensor transmits output signals to comparators. A CPU monitors output signals of the comparators and detects a notch formed in the wafer. After the notch is detected, the wafer is rotated stepwise by a fine pitch, and outer peripheral positional data of a notched region (outputs of an analog-to-digital converter) are sampled and stored in a RAM. The CPU computes a notch position from the outer peripheral positional data stored in the RAM. In this way, a V-shaped notch formed in a semiconductor wafer is detected speedily and with high precision.

摘要翻译： 放置在桌子上的半导体晶片由步进电机逐步旋转宽间距。 此时，CCD线传感器将输出信号发送到比较器。 CPU监视比较器的输出信号并检测在晶片中形成的凹口。 在检测到缺口之后，晶片以微细的间距逐步旋转，并且将缺口区域（模拟 - 数字转换器的输出）的外围位置数据采样并存储在RAM中。 CPU从存储在RAM中的外围位置数据计算切口位置。 以这种方式，快速且高精度地检测形成在半导体晶片中的V形缺口。

公开(公告)号：US11167637B2

公开(公告)日：2021-11-09

申请号：US14390693

申请日：2012-04-12

申请人： Satoshi Yamamoto ,  Chiaki Kataoka ,  Masaki Akagi

发明人： Satoshi Yamamoto ,  Chiaki Kataoka ,  Masaki Akagi

IPC分类号： B60K15/04

摘要： To obtain a fuel filler structure for a fuel tank wherein when causing an opening and closing valve to close, it can be ensured that the opening and closing valve does not rapidly rotate to a closed position in which it closes a fuel fill inlet, and when causing the opening and closing valve to open, the opening and closing valve can be opened with a small force. A fuel filler structure is equipped with a damper on the near side of a flapper valve in the insertion direction of a fuel nozzle. When the flapper valve rotates to an open position, the damper does not act on the flapper valve, and when the flapper valve rotates to a closed position, the damper acts on the flapper valve.

公开(公告)号：US10534236B2

公开(公告)日：2020-01-14

申请号：US15737115

申请日：2016-06-17

申请人： Satoshi Yamamoto ,  Daisuke Goto ,  Toshiya Sagisaka ,  Masato Shinoda ,  Mamiko Inoue ,  Fuminari Kaneko ,  Tohru Yashiro

发明人： Satoshi Yamamoto ,  Daisuke Goto ,  Toshiya Sagisaka ,  Masato Shinoda ,  Mamiko Inoue ,  Fuminari Kaneko ,  Tohru Yashiro

IPC分类号： G02F1/15 ,  C07D265/28 ,  G09F9/30 ,  C09K9/02 ,  C08F20/36 ,  C07D265/38 ,  G02F1/1516

摘要： Provided is an electrochromic compound represented by the following general formula (I) or (II) where R1 to R13 are each independently a hydrogen atom, a halogen atom, a monovalent organic group, or a polymerizable functional group, and at least one of the R1 to the R13 is a polymerizable functional group.

公开(公告)号：US09869918B2

公开(公告)日：2018-01-16

申请号：US14988992

申请日：2016-01-06

申请人： Takahiko Matsumoto ,  Keiichiroh Yutani ,  Hidekazu Yaginuma ,  Koh Fujimura ,  Fuminari Kaneko ,  Mamiko Inoue ,  Sukchan Kim ,  Satoshi Yamamoto ,  Tohru Yashiro

发明人： Takahiko Matsumoto ,  Keiichiroh Yutani ,  Hidekazu Yaginuma ,  Koh Fujimura ,  Fuminari Kaneko ,  Mamiko Inoue ,  Sukchan Kim ,  Satoshi Yamamoto ,  Tohru Yashiro

IPC分类号： G02F1/155 ,  G02F1/1343

CPC分类号： G02F1/155 ,  G02F1/13439 ,  G02F2001/1552

摘要： An electrochromic apparatus including a first support, a first electrode, a first transparent conductive layer, an electrochromic layer, a second support, a second electrode, a second transparent conductive layer, and an electrolyte layer is provided. The first and second supports have first and second surfaces, respectively, on each of which a plurality of grooves is formed. The grooves on the second surface are facing the grooves on the first surface. The first and second electrodes are disposed at each one of the plurality of grooves of the first and second supports, respectively. The first and second transparent conductive layers are in contact with the first and second surfaces, respectively. The electrochromic layer is in contact with the first transparent conductive layer. The electrolyte layer is between the electrochromic layer and the second transparent conductive layer.

公开(公告)号：US09312036B2

公开(公告)日：2016-04-12

申请号：US13315887

申请日：2011-12-09

申请人： Yuki Minato ,  Toshihiro Yasuda ,  Kunihiko Kinugasa ,  Hajime Mori ,  Satoshi Yamamoto ,  Jun Suzuki ,  Tadahiro Mitsuhashi

发明人： Yuki Minato ,  Toshihiro Yasuda ,  Kunihiko Kinugasa ,  Hajime Mori ,  Satoshi Yamamoto ,  Jun Suzuki ,  Tadahiro Mitsuhashi

IPC分类号： G21C15/25 ,  F04F5/54 ,  G21C17/017 ,  G21C19/14 ,  G21C17/10

CPC分类号： G21C15/25 ,  F04F5/54 ,  G21C17/017 ,  G21C17/10 ,  G21C19/14 ,  Y02E30/40 ,  Y10T29/49735

摘要： In a jet pump measurement pipe repair method according to the present embodiment, a breakage part of a measurement pipe horizontally fixed to a lower part of a jet pump provided in reactor water in a reactor pressure vessel is repaired. The method has: a step of cutting and removing the measurement pipe including the breakage part; a step of retaining a connection pipe for connecting the remaining measurement pipe on the jet pump by means of a clamp; and a step of connecting ends of the remaining measurement pipe by means of the connection pipe.

摘要翻译： 在根据本实施例的喷射泵测量管道修复方法中，修复水平固定到设置在反应堆压力容器中的反应器水中的喷射泵的下部的测量管的断裂部分。 该方法具有：切断除去包含断裂部的测量管的步骤; 保持用于通过夹具连接喷射泵上的剩余测量管的连接管的步骤; 以及通过连接管连接剩余测量管的端部的步骤。

公开(公告)号：US09291893B2

公开(公告)日：2016-03-22

申请号：US13281145

申请日：2011-10-25

申请人： Tatsuro Masuyama ,  Satoshi Yamamoto ,  Koji Ichikawa

发明人： Tatsuro Masuyama ,  Satoshi Yamamoto ,  Koji Ichikawa

IPC分类号： G03F7/004 ,  G03F7/039 ,  G03F7/20

CPC分类号： G03F7/0046 ,  G03F7/0045 ,  G03F7/0397 ,  G03F7/2041

摘要： A resist composition contains; a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C24 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.

摘要翻译： 抗蚀剂组合物含有 具有由式（aa）表示的结构单元的树脂和由式（ab）表示的结构单元; 和酸产生剂，其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键，任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C24脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。

公开(公告)号：US09229320B2

公开(公告)日：2016-01-05

申请号：US13196446

申请日：2011-08-02

申请人： Koji Ichikawa ,  Satoshi Yamamoto

发明人： Koji Ichikawa ,  Satoshi Yamamoto

IPC分类号： G03F7/004 ,  G03F7/039 ,  G03F7/20

CPC分类号： G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  G03F7/2041 ,  G03F7/2059

摘要： A resist composition contains; a resin having a structural unit derived from a compound represented by the formula (a); and an acid generator represented by the formula (B1). wherein R1 represents a hydrogen atom or a methyl group; A10 represents a single bond, an optionally substituted C1 to C6 alkanediyl group or a group represented by formula (a-1) defined in the specification; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; A20 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; R2 in each occurrence independently represents a C1 to C12 perfluoroalkyl group; n represents 1 or 2; Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; Lb1 represents an optionally substituted C1 to C17 divalent aliphatic hydrocarbon group; Y represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; and Z+ represents an organic cation.

摘要翻译： 抗蚀剂组合物含有 具有衍生自由式（a）表示的化合物的结构单元的树脂; 和由式（B1）表示的酸发生剂。 其中R1表示氢原子或甲基; A10表示单键，可以具有取代基的C1〜C6烷二基或由说明书中定义的式（a-1）表示的基团; W1表示任选取代的C4至C36脂环族烃基; A20每次独立地表示任选取代的C 1至C 6脂族烃基; R2各自独立地表示C1〜C12全氟烷基; n表示1或2; Q1和Q2独立地表示氟原子或C1〜C6全氟烷基; Lb1表示任选取代的C 1至C 17二价脂族烃基; Y表示任选取代的C 1至C 18脂族烃基; Z +表示有机阳离子。