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公开(公告)号：US08186410B2
公开(公告)日：2012-05-29
申请号：US12326340
申请日：2008-12-02
IPC分类号： B32B38/00
CPC分类号： B32B43/006 , B32B37/12 , B32B2038/1891 , B32B2457/14 , H01L21/67173 , H01L21/67346 , Y10S156/93 , Y10S156/941 , Y10T156/11 , Y10T156/1111 , Y10T156/19 , Y10T156/195 , Y10T156/1978 , Y10T279/11
摘要： A separating device according to the present invention separates a support plate (14) from a substrate (12) of a laminate (10) including the substrate (12) and the support plate (14) bonded to each other. The separating device includes: a first storing section (20) for storing the laminate (10); a plurality of first processing sections (30) for reducing adhesive force of an adhesive (13) applied between the substrate (12) and the support plate (14); and a first carrying section (50) which is capable of moving in the first direction and carries the laminate (10) from the first storing section (20) to the first processing section (30) while holding the laminate (10). With the first carrying section (50), it is possible to provide a separating device (100) which moves straightly so as to carry the laminate (10). This provides a separating device for (i) processing a laminate including a substrate and a support plate and (ii) separating the support plate from the substrate, which separating device performs the separating process efficiently.
摘要翻译： 根据本发明的分离装置将支撑板（14）与包括彼此结合的基板（12）和支撑板（14）的层叠体（10）的基板（12）分离。 分离装置包括：用于储存层压板（10）的第一储存部分（20）。 多个第一处理部（30），用于降低施加在所述基板（12）和所述支撑板（14）之间的粘合剂（13）的粘合力; 以及第一承载部（50），其能够在保持层叠体（10）的同时沿第一方向移动并将层压体（10）从第一收纳部（20）运送到第一处理部（30）。 利用第一承载部分（50），可以提供一个分离装置（100），该分离装置（100）直线移动以便承载层压板（10）。 这提供了一种分离装置，用于（i）处理包括基板和支撑板的层压板，以及（ii）将支撑板与基板分离，该分离装置有效地执行分离过程。
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公开(公告)号：US20090139662A1
公开(公告)日：2009-06-04
申请号：US12326340
申请日：2008-12-02
IPC分类号： B29C63/00
CPC分类号： B32B43/006 , B32B37/12 , B32B2038/1891 , B32B2457/14 , H01L21/67173 , H01L21/67346 , Y10S156/93 , Y10S156/941 , Y10T156/11 , Y10T156/1111 , Y10T156/19 , Y10T156/195 , Y10T156/1978 , Y10T279/11
摘要： A separating device according to the present invention separates a support plate (14) from a substrate (12) of a laminate (10) including the substrate (12) and the support plate (14) bonded to each other. The separating device includes: a first storing section (20) for storing the laminate (10); a plurality of first processing sections (30) for reducing adhesive force of an adhesive (13) applied between the substrate (12) and the support plate (14); and a first carrying section (50) which is capable of moving in the first direction and carries the laminate (10) from the first storing section (20) to the first processing section (30) while holding the laminate (10). With the first carrying section (50), it is possible to provide a separating device (100) which moves straightly so as to carry the laminate (10). This provides a separating device for (i) processing a laminate including a substrate and a support plate and (ii) separating the support plate from the substrate, which separating device performs the separating process efficiently.
摘要翻译： 根据本发明的分离装置将支撑板（14）与包括彼此结合的基板（12）和支撑板（14）的层叠体（10）的基板（12）分离。 分离装置包括：用于储存层压板（10）的第一储存部分（20）。 多个第一处理部（30），用于降低施加在所述基板（12）和所述支撑板（14）之间的粘合剂（13）的粘合力; 以及第一承载部（50），其能够在保持层叠体（10）的同时沿第一方向移动并将层压体（10）从第一收纳部（20）运送到第一处理部（30）。 利用第一承载部分（50），可以提供一个分离装置（100），该分离装置（100）直线移动以便承载层压板（10）。 这提供了一种分离装置，用于（i）处理包括基板和支撑板的层压板，以及（ii）将支撑板与基板分离，该分离装置有效地执行分离过程。
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公开(公告)号：US08181660B2
公开(公告)日：2012-05-22
申请号：US12322156
申请日：2009-01-29
CPC分类号： H01L21/67092 , H01L21/67017 , H01L21/67132 , Y10T156/1111 , Y10T156/1126 , Y10T156/1922
摘要： A treatment liquid permeation unit comprises: at least one vibration unit; and a vibration transmission unit for transmitting a vibration from the vibration unit. The vibration transmission unit is positioned between an adhesive with which a wafer is combined to a supporting plate or an adhesive adhered to a surface of the wafer and the vibration unit. A vibration from the vibration unit is transmitted via the vibration transmission unit. This promotes the treatment liquid for dissolving the adhesive to permeate the adhesive to which the treatment liquid is supplied. Therefore, the treatment liquid can more uniformly permeate the adhesive in a shorter time. This allows the treatment liquid for dissolving the adhesive to permeate the adhesive with which the wafer is combined to the supporting plate or to permeate the adhesive adhered to the surface of the wafer in a shorter time.
摘要翻译： 处理液体渗透单元包括：至少一个振动单元; 以及用于从振动单元传递振动的振动传递单元。 振动传递单元位于与晶片组合的粘合剂与粘合到晶片表面的粘合剂和振动单元之间。 来自振动单元的振动经由振动传递单元传递。 这促进了用于溶解粘合剂的处理液渗透到供应处理液的粘合剂。 因此，处理液可以在更短的时间内更均匀地渗透粘合剂。 这使得用于溶解粘合剂的处理液渗透到晶片与支撑板组合的粘合剂上，或者在更短的时间内渗透粘附到晶片表面的粘合剂。
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公开(公告)号：US20090218050A1
公开(公告)日：2009-09-03
申请号：US12322156
申请日：2009-01-29
IPC分类号： B32B38/10
CPC分类号： H01L21/67092 , H01L21/67017 , H01L21/67132 , Y10T156/1111 , Y10T156/1126 , Y10T156/1922
摘要： A treatment liquid permeation unit (10) of the present invention comprises: at least one vibration unit (11); and a vibration transmission unit (12) for transmitting a vibration from the vibration unit (11). The vibration transmission unit (12) is positioned between an adhesive with which a wafer (20) is combined to a supporting plate (21) or an adhesive adhered to a surface of the wafer (20) and the vibration unit (11). A vibration from the vibration unit (11) is transmitted via the vibration transmission unit (12). This promotes the treatment liquid for dissolving the adhesive to permeate the adhesive to which the treatment liquid is supplied. Therefore, the treatment liquid can more uniformly permeate the adhesive in a shorter time. This allows the treatment liquid for dissolving the adhesive to permeate the adhesive with which the wafer is combined to the supporting plate or to permeate the adhesive adhered to the surface of the wafer in a shorter time.
摘要翻译： 本发明的处理液渗透单元（10）包括：至少一个振动单元（11）; 以及用于从振动单元（11）传递振动的振动传递单元（12）。 振动传递单元（12）位于与晶片（20）组合到支撑板（21）的粘合剂或粘合到晶片（20）表面的粘合剂和振动单元（11）之间。 来自振动单元（11）的振动经由振动传递单元（12）传递。 这促进了用于溶解粘合剂的处理液渗透到供应处理液的粘合剂。 因此，处理液可以在更短的时间内更均匀地渗透粘合剂。 这使得用于溶解粘合剂的处理液渗透到晶片与支撑板组合的粘合剂上，或者在更短的时间内渗透粘附到晶片表面的粘合剂。
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公开(公告)号：US08297568B2
公开(公告)日：2012-10-30
申请号：US12379703
申请日：2009-02-26
IPC分类号： A47F5/00
CPC分类号： H01L21/6838
摘要： A sucking and holding device includes: a vacuum chuck for vacuum-sucking a substrate; and a suction assisting device for sandwiching the object between it and the vacuum chuck. The suction assisting device includes a substrate-facing surface. The substrate-facing surface seals a through hole provided in the substrate. With this configuration, the sucking and holding device can vacuum-suck and hold the substrate having a through hole. This leads to an accomplishment of a device which can hold various objects without positional displacement.
摘要翻译： 抽吸保持装置包括：真空吸附基板的真空吸盘; 以及用于将物体夹在其与真空卡盘之间的吸引辅助装置。 吸引辅助装置包括面向基板的表面。 面向基板的表面密封设置在基板中的通孔。 利用该构造，吸引保持装置能够真空吸附并保持具有通孔的基板。 这导致了能够保持各种物体而没有位置偏移的装置的实现。
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公开(公告)号：US08205349B2
公开(公告)日：2012-06-26
申请号：US12818518
申请日：2010-06-18
IPC分类号： G01D21/00
摘要： Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
摘要翻译： 本发明提供了一种对准装置，包括用于保持对准物体并旋转对准物体的保持和旋转装置，该对准装置包括支撑装置，用于支撑被旋转的对准物体的部分与被保持的对准物体的部分不同的部分 通过握持和旋转手段。 这使得可以通过防止对准物体变形而高度准确地对准对准物体，例如， 弯曲，由于自己的重量。
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公开(公告)号：US20090218460A1
公开(公告)日：2009-09-03
申请号：US12379703
申请日：2009-02-26
CPC分类号： H01L21/6838
摘要： A sucking and holding device includes: a vacuum chuck for vacuum-sucking a substrate; and a suction assisting device for sandwiching the object between it and the vacuum chuck. The suction assisting device includes a substrate-facing surface. The substrate-facing surface seals a through hole provided in the substrate. With this configuration, the sucking and holding device can vacuum-suck and hold the substrate having a through hole. This leads to an accomplishment of a device which can hold various objects without positional displacement.
摘要翻译： 抽吸保持装置包括：真空吸附基板的真空吸盘; 以及用于将物体夹在其与真空卡盘之间的吸引辅助装置。 吸引辅助装置包括面向基板的表面。 面向基板的表面密封设置在基板中的通孔。 利用该构造，吸引保持装置能够真空吸附并保持具有通孔的基板。 这导致了能够保持各种物体而没有位置偏移的装置的实现。
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公开(公告)号：US20100319209A1
公开(公告)日：2010-12-23
申请号：US12818518
申请日：2010-06-18
IPC分类号： G01D21/00
摘要： Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
摘要翻译： 本发明提供了一种对准装置，包括用于保持对准物体并旋转对准物体的保持和旋转装置，该对准装置包括支撑装置，用于支撑被旋转的对准物体的部分与被保持的对准物体的部分不同的部分 通过握持和旋转手段。 这使得可以通过防止对准物体变形而高度准确地对准对准物体，例如， 弯曲，由于自己的重量。
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公开(公告)号：US20130104584A1
公开(公告)日：2013-05-02
申请号：US13808185
申请日：2011-07-06
IPC分类号： F25B49/02
CPC分类号： F25B49/022 , F25B1/10 , F25B49/025 , F25B2400/13 , F25B2600/0253 , F25B2600/11 , F25B2700/21161 , F25B2700/21172 , Y02B30/741
摘要： A refrigerant discharge capacity of a high-pressure side compression mechanism and a refrigerant discharge capacity of a low-pressure side compression mechanism can be independently controlled, in a two-stage pressurizing refrigeration cycle device. The refrigerant discharge capacity of the low-pressure side compression mechanism is determined based on an outside air temperature, an air temperature at the evaporator, and a preset temperature. Furthermore, the refrigerant discharge capacity of the high-pressure side compression mechanism is determined based on the determined refrigerant discharge capacity of the low-pressure side compression mechanism such that an effective capacity ratio is not less than 1 nor more than 3. Therefore, in the two-stage pressurizing refrigeration cycle device, COP can be improved with a simple structure and control.
摘要翻译： 在两级加压制冷循环装置中，可以独立地控制高压侧压缩机构的制冷剂排出容量和低压侧压缩机构的制冷剂排出容量。 基于外部空气温度，蒸发器的空气温度和预设温度来确定低压侧压缩机构的制冷剂排出容量。 此外，基于所确定的低压侧压缩机构的制冷剂排出容量确定高压侧压缩机构的制冷剂排出容量，使得有效容量比不小于1，但不大于3.因此，在 两级加压制冷循环装置，COP可以通过简单的结构和控制进行改进。
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