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公开(公告)号：US5541481A
公开(公告)日：1996-07-30
申请号：US282267
申请日：1994-07-29
CPC分类号： H01J61/86 , H01J61/12 , H01J61/18 , H01J61/302
摘要： A cadmium rare gas discharge lamp of the short arc type that has a high power of the spectra in a wavelength range of 210 nm to 230 nm and a stable lamp voltage in lighting operation for a long period. An arc tube 1 is provided within which are disposed opposed, spaced apart electrodes 2, 3 and thermal insulation films 6, 7. A rare gas is encapsulated together with metal cadmium and a quartz glass is used for the material of the arc tube whose OH radical has a weight content of no more than 200 ppm. Electrodes 4 and 5 are spaced apart no more than 10 mm, so that with a lamp current at least 20 amperes, an arc of the electrode-stable type is formed and radiant light of Cd ions obtained. For the encapsulated rare gas, in one embodiment at least one of the rare gases neon, argon or krypton, are used and are encapsulated at a gas pressure of 35 kPa to 2.5 MPa at a standard temperature of 25.degree. C. The arc tube 1 is formed of quartz glass, electrodes 2 and 3 are placed opposite one another. In another embodiment, a halogen gas is encapsulated in the arc to in an amount from 4.5.times.10.sup.-10 mol/cm.sup.3 of arc tube volume to 2.1.times.10.sup.-7 mol/cm.sup.3 of are tube volume.
摘要翻译： 一种短弧型的镉稀释气体放电灯，其在210nm至230nm的波长范围内具有高功率的光谱，并且在长时间的照明操作中具有稳定的灯电压。 设置有电弧管1，其中设置相对的间隔开的电极2,3和绝热膜6,7，稀有气体与金属镉一起被密封，并且石英玻璃用于电弧管的材料，其OH 自由基的重量含量不超过200ppm。 电极4和5的间隔不超过10毫米，使得灯电流至少为20安培，形成电极稳定型弧，并获得Cd离子的辐射光。 对于包封的稀有气体，在一个实施方案中，使用至少一种稀有气体氖，氩或氪，并在25℃的标准温度下以35kPa至2.5MPa的气体压力包封。电弧管1 由石英玻璃形成，电极2和3彼此相对放置。 在另一个实施方案中，将卤素气体以弧形管体积的4.5×10 -10 mol / cm 3封装到管体积的2.1×10 -7 mol / cm 3的量。
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公开(公告)号：US5481159A
公开(公告)日：1996-01-02
申请号：US237906
申请日：1994-05-04
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/82 , H01J61/86
摘要： A discharge lamp uses resonance lines which are emitted by ions in an excitation state and has a high short wave ultraviolet ray output. The lamp is provided with a pair of electrodes, having a reciprocal spacing of equal to or smaller than 12 mm, and is of the electrode-stable type. As the major emission material, cadmium is encapsulated in a quantity permitting a partial pressure P in operation of 3.times.10.sup.3 Pa to 1.3.times.10.sup.5 Pa. The lighting operation is performed in a state in which a lamp current J.sub.L fulfills the following condition (a):0.7
摘要翻译： 放电灯使用由激发状态的离子发射并具有高短波紫外线输出的谐振线。 该灯具有一对电极，具有等于或小于12mm的往复间隔，并且是电极稳定型的。 作为主要的发光材料，镉以3×10 3 Pa〜1.3×10 5 Pa的运转状态下的分压P被包封，在灯电流JL满足以下条件（a）的状态下进行点亮操作：0.7
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公开(公告)号：US5589735A
公开(公告)日：1996-12-31
申请号：US506829
申请日：1995-07-25
申请人： Akiyasu Yamaguchi , Yukio Yasuda , Tsuneo Okanuma , Tatsushi Igarashi , Hiromitsu Matsuno , Tatsumi Hiramoto
发明人： Akiyasu Yamaguchi , Yukio Yasuda , Tsuneo Okanuma , Tatsushi Igarashi , Hiromitsu Matsuno , Tatsumi Hiramoto
CPC分类号： G03F7/70016 , H01J61/30 , H01J61/74
摘要： An emission device which operates a cadmium lamp with a light intensity sufficient for used in industrial applications is achieved by an emission device having a cadmium lamp with a fluorescent tube within which a cathode and an anode are space a small distance apart and a buffer gas for easier initiation of luminous operation and metallic cadmium in an amount per unit volume of the fluorescent tube of 1.times.10.sup.-4 g/cm.sup.3 to 3.times.10.sup.-3 g/cm.sup.3 are encapsulated, and a power source device for supplying an electrical input between the cathode and the anode in an electrical input range from 0.5 kW to 5.0 kW with the condition:6.03+2.79 W.ltoreq.r.ltoreq.40being satisfied, where the electrical input of the power source device into the cadmium lamp in steady-state luminous operation is W (kW) and the maximum inside radius of the fluorescent tube is r (mm).
摘要翻译： 操作具有足以用于工业应用的光强度的镉灯的发射装置通过具有镉灯的发射装置来实现，所述镉灯具有荧光管，阴极和阳极间隔开小间隔，并且缓冲气体用于 封装了1×10 -4 g / cm 3〜3×10 -3 g / cm 3的荧光灯的单位体积的发光操作的更容易的起始和金属镉，以及用于在阴极和阴极之间提供电输入的电源装置 在0.5kW至5.0kW的电输入范围内的阳极，条件为：6.03 + 2.79W
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4.发明授权
公开(公告)号：US5739636A
公开(公告)日：1998-04-14
申请号：US589703
申请日：1996-01-22
IPC分类号： G02B21/16 , G03F7/20 , H01J61/16 , H01J61/18 , H01J61/35 , H01J61/52 , H01J61/86 , H01J61/12
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/35 , H01J61/52 , H01J61/86
摘要： A cadmium discharge lamp which can emit line spectra with wavelengths of 214.+-.2 nm with high power is achieved by encapsulating metallic cadmium, in an amount producing a pressure in stationary lighting operation in the range from 2 kPa to 13.7 kPa, together with at least one of the rare gases xenon, krypton, argon and neon, in a temperature-controlled arc tube which is provided with electrodes located adjacently opposite one another, and by operating the lamp such that J/P is in the range from 1.4 to 75, where J is the discharge current in stationary lighting operation in amperes and the P is the cadmium pressure in stationary lighting operation.
摘要翻译： 可以通过在2kPa至13.7kPa的范围内将固定照明操作中产生压力的金属镉密封在一起，可以发射波长为214 +/- 2nm的线光谱的镉放电灯， 至少有一种稀有气体氙气，氪气，氩气和氖气在一个温度控制的电弧管中，其中设置有彼此相邻的电极，并通过操作灯使得J / P在1.4〜 75，其中J是静止照明中的放电电流，以安培为单位，P是静止照明操作中的镉压力。
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5.发明授权Cadmium/rare gas discharge lamp of the short arc type, as well as projection exposure device using the same 失效短弧型的镉/稀有气体放电灯，以及使用其的投影曝光装置
公开(公告)号：US5471278A
公开(公告)日：1995-11-28
申请号：US154404
申请日：1993-11-19
申请人： Yukio Yasuda , Akiyasu Yamaguchi , Tatsushi Igarashi , Yasuo Oonishi , Kenzo Kai , Masanori Sugihara , Takashi Mori , Akira Miyaji
发明人： Yukio Yasuda , Akiyasu Yamaguchi , Tatsushi Igarashi , Yasuo Oonishi , Kenzo Kai , Masanori Sugihara , Takashi Mori , Akira Miyaji
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/86
摘要： A cadmium/inert gas discharge lamp of the short arc type, which suppresses an unnecessary emission upstream and downstream of the necessary emission spectra in a wavelength range of 210 to 230 nm, achieves a high efficiency of the emission spectra in the range 210 to 230 nm and can be used in very satisfactory manner for industrial applications. Also, a highly efficient projection exposure device through the incorporation of a cadmium/rare gas discharge lamp of the short arc type having good emission spectrum characteristics in the wavelength range 210 to 230 nm, which can transmit in projecting manner fine image patterns with a large depth of focus. The cadmium/rare gas discharge lamp of the short arc type is arranged within a temperature-regulated quartz bulb, and is provided with a pair of adjacently facing electrodes, together with inert gas selected from xenon, krypton, argon, neon or mixtures of them. Metal cadmium with a pressure of 14 to 200 kPa is encapsulated in the tube in a stationary lighting operation. The lamp is operated in such a way that J/P, i.e. the ratio between a discharge current in a stationary lighting operation J (A) and a cadmium pressure in a stationary lighting operation P (kPa) is in a range 0.13 to 15. Also, a projection exposure device, which has the above-described discharge lamp and a power supply for carrying out the lighting operation of the discharge lamp under the above-described condtions.
摘要翻译： 短波型的镉/惰性气体放电灯在210〜230nm的波长范围内抑制必要的发射光谱的上游和下游的不必要的发光，实现了210〜230的发射光谱的高效率 nm，可以以非常满意的方式用于工业应用。 另外，通过并入具有210〜230nm的波长范围内的发射光谱特性良好的短弧型镉/稀有气体放电灯的高效投影曝光装置，能以突出的方式突出显示具有大的图像的精细图像图案 焦点深度。 短弧型的镉/稀有气体放电灯布置在温度调节的石英灯泡内，并且设置有一对相邻的电极以及选自氙气，氪气，氩气，氖气或它们的混合物的惰性气体 。 压力为14至200kPa的金属镉在静止照明操作中封装在管中。 灯的操作方式是J / P，即静止点亮操作J（A）中的放电电流与静止点亮操作P（kPa）中的镉压力之比在0.13至15的范围内。 此外，具有上述放电灯的投影曝光装置和用于在上述条件下进行放电灯的点亮操作的电源。
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6.发明申请公开(公告)号：US20110095683A1
公开(公告)日：2011-04-28
申请号：US12926067
申请日：2010-10-25
申请人： Toshio Yokota , Yukio Yasuda , Hiroyuki Daido , Hiromitsu Kiriyama , Hajime Okada , Masayuki Suzuki , Izuru Daito
发明人： Toshio Yokota , Yukio Yasuda , Hiroyuki Daido , Hiromitsu Kiriyama , Hajime Okada , Masayuki Suzuki , Izuru Daito
CPC分类号： H01J61/368 , H01J9/326 , H01J61/86
摘要： A high pressure discharge lamp has a sealing portion that is made of glass and a sealing metal piece. In a method of manufacturing the high pressure discharge lamp, the sealing metal piece is irradiated with laser beam whose pulse width is 1×10−9 seconds or less, so as to carry out a surface treatment of the sealing metal piece. The sealing metal piece may have a groove that is 120 to 600 nm in depth and 450 to 1,200 nm in width.
摘要翻译： 高压放电灯具有由玻璃和密封金属片制成的密封部分。 在制造高压放电灯的方法中，用脉冲宽度为1×10-9秒以下的激光束照射密封金属片，以进行密封金属片的表面处理。 密封金属片可以具有深度为120至600nm且宽度为450至1,200nm的凹槽。
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公开(公告)号：US20100264820A1
公开(公告)日：2010-10-21
申请号：US12662352
申请日：2010-04-13
申请人： Taku Sumitomo , Yukio Yasuda , Toshio Yokota
发明人： Taku Sumitomo , Yukio Yasuda , Toshio Yokota
CPC分类号： H01J65/04 , H01J61/025 , H01J61/18
摘要： An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a discharge, and a beam shield element that is provided in the bulb to shield peripheral devices from the laser beam, which passes through the discharge generated in the bulb.
摘要翻译： 激光驱动光源包括封装放电介质的灯泡，用于发射激光束的激光束单元，其中激光束聚焦在用于产生放电的灯泡中，以及设置在灯泡中的光束屏蔽元件 屏蔽通过在灯泡中产生的放电的激光束的外围设备。
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公开(公告)号：US20090183719A1
公开(公告)日：2009-07-23
申请号：US12139110
申请日：2008-06-13
申请人： Futoshi AIDA , Yukio Yasuda , Yusuke Naruse
发明人： Futoshi AIDA , Yukio Yasuda , Yusuke Naruse
IPC分类号： F02P3/05
CPC分类号： F02P17/12 , F02P2017/125
摘要： An internal combustion engine ignition device is provided in which an ECU (200) includes a pulse generation circuit (201) that outputs pulse signals (Igt1 and Igt2) and an ion-signal detection/control circuit (300), and a coil driver (400) includes a pulse detection circuit (7) that recognizes a signal received from the pulse generation circuit (201) and an ion-current detection circuit (9); when the pulse signals are not outputted, an ion current is detected and a signal is outputted at the same line as a coil-driver input signal line.
摘要翻译： 提供一种内燃机点火装置，其中ECU（200）包括输出脉冲信号（Igt1和Igt2）的脉冲发生电路（201）和离子信号检测/控制电路（300），以及线圈驱动器 400）包括识别从脉冲发生电路（201）接收的信号的脉冲检测电路（7）和离子电流检测电路（9）。 当不输出脉冲信号时，检测离子电流，并且在与线圈驱动器输入信号线相同的线处输出信号。
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公开(公告)号：US20090039785A1
公开(公告)日：2009-02-12
申请号：US12222197
申请日：2008-08-05
申请人： Yukio Yasuda , Takehito Senga
发明人： Yukio Yasuda , Takehito Senga
IPC分类号： H01J17/16
CPC分类号： H01J61/86 , H01J61/20 , H01J61/36 , H01J61/366
摘要： A discharge lamp comprises a discharge container in which a sealing tube is connected to each end of an arc tube, electrodes arranged inside the arc tube, a glass member provided in the sealing tube, a metallic foil provided on an outer circumference face of the glass member, an external lead which is electrically connected to the metallic foil and which is inserted in a through hole of an external quartz tube, a low melting point glass which is formed in a gap between an inner circumference face of the through hole of the external quartz glass tube and an external circumference face of the external lead, wherein a concave portion is formed at an outer end of the through hole.
摘要翻译： 放电灯包括放电容器，其中密封管连接到电弧管的每一端，设置在电弧管内的电极，设置在密封管中的玻璃构件，设置在玻璃的外周面上的金属箔 元件，与金属箔电连接并插入外部石英管的通孔中的外部引线，形成在外部通孔的内周面之间的间隙中的间隙中的低熔点玻璃 石英玻璃管和外部引线的外周面，其中在通孔的外端形成凹部。
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公开(公告)号：US06928177B2
公开(公告)日：2005-08-09
申请号：US10257728
申请日：2002-02-21
申请人： Ikuo Chatani , Yukio Yasuda
发明人： Ikuo Chatani , Yukio Yasuda
摘要： A loudspeaker protective unit for protecting a loudspeaker device against an excessive input current includes a lamp connected in series with the loudspeaker unit. The lamp is housed in a casing exhibiting light-sealing properties formed of an electrically conductive material, and is sealed with a sealant exhibiting a predetermined electrical conductivity. The spacing between lead lines of the lamp housed in the casing is of a preset value. An inert gas is sealed within a main lamp body unit and a preset voltage is applied to the main lamp body unit. When the voltage is applied across the lead lines, an electrical discharge is produced to interrupt the current flowing through the filament so as to prohibit a temperature rise in the lamp.
摘要翻译： 用于保护扬声器装置免受过大输入电流的扬声器保护单元包括与扬声器单元串联连接的灯。 灯被容纳在显示由导电材料形成的光密封特性的壳体中，并且用表现出预定导电性的密封剂密封。 容纳在壳体中的灯的引线之间的间隔是预设值。 惰性气体被密封在主灯体单元内，并且将预设电压施加到主灯体单元。 当跨导线施加电压时，产生放电以中断流过灯丝的电流，以防止灯中的温度上升。
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