摘要:
An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second periodic structure has at least two features and a second pitch. The optical metrology target is illuminated with a light source, and an optical signal from the optical metrology target is received and analyzed.
摘要:
The present invention describes a test structure with a first set of features which is a subset of product features; and a second set of features adjacent to the first set of features, the second set occupying a smaller area than the first set and the second set being similar to the first set yet being distinguishable from surrounding structures.
摘要:
The present invention describes a structure for and a method of forming a first set and a second set of features in a substrate; covering the first and second set of features with a material; forming a third set of features in the material and removing the material to expose the first set of features, leaving the second set of features embedded below the material; measuring post-etch overlay between the first set and the third set of features; and measuring post-develop overlay between the second set and the third set of features.
摘要:
The present invention describes a structure for and a method of forming a first set and a second set of features in a substrate; covering the first and second set of features with a material; forming a third set of features in the material and removing the material to expose the first set of features, leaving the second set of features embedded below the material; measuring post-etch overlay between the first set and the third set of features; and measuring post-develop overlay between the second set and the third set of features.
摘要:
The present invention is concerned with an optical disk reproducing apparatus for reproducing digital data from an optical disk, such as an audio compact disk and, above all, with such apparatus in which a continuous playback output may be produced even when track jump should occur due to vibrations or the like. With the optical disk reproducing apparatus according to the present invention, digital data detected from an optical disk are sequentially written in a RAM for subsequent reading so that data stored in the RAM continue to be read even on the occurrence of the track jump to provide a continuous playback output. On the other hand, the optical disk is reproduced at an increased speed for a predetermined time period after the light spot irradiating the optical disk resets to its original position from track jump to replenish digital data to the RAM.
摘要:
System and method for monitoring the security of computing resources. A server agent and client agents can be deployed to provide a method and a means for monitoring security-related settings for a plurality of computing systems deployed throughout an enterprise. The status of each setting can be recorded, and these results can be used to produce a compliance report for the computing system, as well as reports for groups of computing system or the entire enterprise. The reports or portions of a report or reports can be provide to users of the system via a Web site, Email alerts, or any other suitable mechanism. A compliance score for a system or collection of systems can be calculated and used and/or displayed as part of the reports that are generated.
摘要:
A dental tool for use in photo-cured filling processes. The dental tool includes a tool tip formed from a material that allows the transmission of ultraviolet and visible light wavelengths through the tool tip without significant distortion or reflection. The material is also relatively high strength so not to shatter or break during use. The fill material will also not easily adhere to the tool. The material of a preferred embodiment is sapphire. The tool is able to continue to compact and shape the fill material while the composite polymer fill material is undergoing photo-curing. The light beam used for photo-curing is able to safely pass through the tool without the risk of damage to the surrounding tissue from reflection or distortion of the light beam.
摘要:
The present invention describes a test structure with a first set of features which is a subset of product features; and a second set of features adjacent to the first set of features, the second set occupying a smaller area than the first set and the second set being similar to the first set yet being distinguishable from surrounding structures.
摘要:
The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
摘要:
A dental tool for use in photo-cured filling processes. The dental tool includes a tool tip formed from a material that allows the transmission of ultraviolet and visible light wavelengths through the tool tip without significant distortion or reflection. The material is also relatively high strength so not to shatter or break during use. The fill material will also not easily adhere to the tool. The material of a preferred embodiment is sapphire. The tool is able to continue to compact and shape the fill material while the composite polymer fill material is undergoing photo-curing. The light beam used for photo-curing is able to safely pass through the tool without the risk of damage to the surrounding tissue from reflection or distortion of the light beam.