Optical metrology target design for simultaneous measurement of multiple periodic structures
    1.
    发明申请
    Optical metrology target design for simultaneous measurement of multiple periodic structures 审中-公开
    用于同时测量多个周期性结构的光学计量目标设计

    公开(公告)号:US20050173634A1

    公开(公告)日:2005-08-11

    申请号:US11071800

    申请日:2005-03-02

    IPC分类号: G02B27/46 G01N23/00

    摘要: An optical metrology target is provided and has a first periodic structure and a second periodic structure. The first periodic structure has at least two features and a first pitch, and the second periodic structure has at least two features and a second pitch. The optical metrology target is illuminated with a light source, and an optical signal from the optical metrology target is received and analyzed.

    摘要翻译: 提供光学测量目标并具有第一周期性结构和第二周期性结构。 第一周期结构具有至少两个特征和第一间距,并且第二周期结构具有至少两个特征和第二间距。 用光源照射光学测量目标,并且接收并分析来自光学计量学目标的光学信号。

    Enhanced uniqueness for pattern recognition
    2.
    发明申请
    Enhanced uniqueness for pattern recognition 失效
    增强模式识别的唯一性

    公开(公告)号:US20050105792A1

    公开(公告)日:2005-05-19

    申请号:US11005997

    申请日:2004-12-06

    申请人: Gary Cao Alan Wong

    发明人: Gary Cao Alan Wong

    IPC分类号: G06T7/00 H01L23/544 G06K9/00

    摘要: The present invention describes a test structure with a first set of features which is a subset of product features; and a second set of features adjacent to the first set of features, the second set occupying a smaller area than the first set and the second set being similar to the first set yet being distinguishable from surrounding structures.

    摘要翻译: 本发明描述了具有第一组特征的测试结构,其是产品特征的子集; 以及与所述第一组特征相邻的第二组特征,所述第二组占据比所述第一组更小的面积,并且所述第二组与第一组相似,但是与周围结构可区分。

    Method of determining post-etch offset in exposed-to-embedded overlay
    3.
    发明授权
    Method of determining post-etch offset in exposed-to-embedded overlay 失效
    在暴露于嵌入式叠层中确定蚀刻后偏移的方法

    公开(公告)号:US06784004B2

    公开(公告)日:2004-08-31

    申请号:US10662021

    申请日:2003-09-11

    申请人: Alan Wong

    发明人: Alan Wong

    IPC分类号: H01L2166

    摘要: The present invention describes a structure for and a method of forming a first set and a second set of features in a substrate; covering the first and second set of features with a material; forming a third set of features in the material and removing the material to expose the first set of features, leaving the second set of features embedded below the material; measuring post-etch overlay between the first set and the third set of features; and measuring post-develop overlay between the second set and the third set of features.

    摘要翻译: 本发明描述了在衬底中形成第一组和第二组特征的结构和方法; 用材料覆盖第一和第二组特征; 在所述材料中形成第三组特征并移除所述材料以暴露所述第一组特征,将所述第二组特征嵌入所述材料的下方; 测量第一组和第三组特征之间的蚀刻后覆盖; 并测量第二组和第三组特征之间的后开发覆盖。

    Tracking jump compensator for optical disc reproducing apparatus
    5.
    发明授权
    Tracking jump compensator for optical disc reproducing apparatus 失效
    用于光盘再现设备的跟踪补偿器

    公开(公告)号:US5148417A

    公开(公告)日:1992-09-15

    申请号:US513224

    申请日:1990-04-23

    摘要: The present invention is concerned with an optical disk reproducing apparatus for reproducing digital data from an optical disk, such as an audio compact disk and, above all, with such apparatus in which a continuous playback output may be produced even when track jump should occur due to vibrations or the like. With the optical disk reproducing apparatus according to the present invention, digital data detected from an optical disk are sequentially written in a RAM for subsequent reading so that data stored in the RAM continue to be read even on the occurrence of the track jump to provide a continuous playback output. On the other hand, the optical disk is reproduced at an increased speed for a predetermined time period after the light spot irradiating the optical disk resets to its original position from track jump to replenish digital data to the RAM.

    System and method for monitoring the security of computing resources
    6.
    发明授权
    System and method for monitoring the security of computing resources 有权
    监控计算资源安全的系统和方法

    公开(公告)号:US08732837B1

    公开(公告)日:2014-05-20

    申请号:US11535744

    申请日:2006-09-27

    摘要: System and method for monitoring the security of computing resources. A server agent and client agents can be deployed to provide a method and a means for monitoring security-related settings for a plurality of computing systems deployed throughout an enterprise. The status of each setting can be recorded, and these results can be used to produce a compliance report for the computing system, as well as reports for groups of computing system or the entire enterprise. The reports or portions of a report or reports can be provide to users of the system via a Web site, Email alerts, or any other suitable mechanism. A compliance score for a system or collection of systems can be calculated and used and/or displayed as part of the reports that are generated.

    摘要翻译: 监控计算资源安全的系统和方法。 可以部署服务器代理和客户端代理以提供用于监视部署在整个企业中的多个计算系统的安全性相关设置的方法和手段。 可以记录每个设置的状态,这些结果可用于为计算系统生成符合性报告,以及计算系统组或整个企业的报告。 报告或报告的一部分可以通过网站,电子邮件警报或任何其他合适的机制提供给系统的用户。 可以计算系统或系统集合的合规分数,并将其用作和/或显示为生成的报告的一部分。

    Dental Tools for Photo-Curing of Dental Filings
    7.
    发明申请
    Dental Tools for Photo-Curing of Dental Filings 审中-公开
    用于牙科护理照片的牙科工具

    公开(公告)号:US20120264077A1

    公开(公告)日:2012-10-18

    申请号:US13293948

    申请日:2011-11-10

    IPC分类号: A61C5/04

    摘要: A dental tool for use in photo-cured filling processes. The dental tool includes a tool tip formed from a material that allows the transmission of ultraviolet and visible light wavelengths through the tool tip without significant distortion or reflection. The material is also relatively high strength so not to shatter or break during use. The fill material will also not easily adhere to the tool. The material of a preferred embodiment is sapphire. The tool is able to continue to compact and shape the fill material while the composite polymer fill material is undergoing photo-curing. The light beam used for photo-curing is able to safely pass through the tool without the risk of damage to the surrounding tissue from reflection or distortion of the light beam.

    摘要翻译: 用于光固化灌装工艺的牙科工具。 该牙科工具包括由能够透过工具尖端的紫外线和可见光波长透过而不会发生明显变形或反射的材料形成的工具尖端。 该材料的强度也相对较高,因此在使用过程中不会破裂或破裂。 填充材料也不会轻易粘附在工具上。 优选实施例的材料是蓝宝石。 当复合聚合物填充材料经历光固化时,该工具能够继续压缩和成形填充材料。 用于光固化的光束能够安全地通过工具,而不会有损坏周围组织的风险,防止光束的反射或变形。

    Enhanced uniqueness for pattern recognition
    8.
    发明授权
    Enhanced uniqueness for pattern recognition 有权
    增强模式识别的唯一性

    公开(公告)号:US07211449B2

    公开(公告)日:2007-05-01

    申请号:US10697825

    申请日:2003-10-29

    申请人: Gary Cao Alan Wong

    发明人: Gary Cao Alan Wong

    IPC分类号: H01L21/66

    摘要: The present invention describes a test structure with a first set of features which is a subset of product features; and a second set of features adjacent to the first set of features, the second set occupying a smaller area than the first set and the second set being similar to the first set yet being distinguishable from surrounding structures.

    摘要翻译: 本发明描述了具有第一组特征的测试结构,其是产品特征的子集; 以及与所述第一组特征相邻的第二组特征,所述第二组占据比所述第一组更小的面积,并且所述第二组与第一组相似,但是与周围结构可区分。

    Optimization of sample plan for overlay
    9.
    发明申请
    Optimization of sample plan for overlay 失效
    优化覆盖样本计划

    公开(公告)号:US20060074611A1

    公开(公告)日:2006-04-06

    申请号:US10956608

    申请日:2004-09-30

    CPC分类号: G03F7/70633

    摘要: The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.

    摘要翻译: 本发明描述了一种方法,包括:确定场聚类方案; 选择初始样本计划; 建立覆盖的初始模型,包含组件的覆盖的初始模型; 并从覆盖的初始模型建立覆盖层的有效模型,包括:构造矩阵; 识别冗余组件并消除冗余组件; 并识别高度相关的组件并确定是否消除高度相关的组件。

    Dental Tools for Photo-Curing of Dental Fillings
    10.
    发明申请
    Dental Tools for Photo-Curing of Dental Fillings 有权
    用于牙科填充物的光固化牙科工具

    公开(公告)号:US20130137058A1

    公开(公告)日:2013-05-30

    申请号:US13751033

    申请日:2013-01-25

    IPC分类号: A61C5/04 A61C13/15

    摘要: A dental tool for use in photo-cured filling processes. The dental tool includes a tool tip formed from a material that allows the transmission of ultraviolet and visible light wavelengths through the tool tip without significant distortion or reflection. The material is also relatively high strength so not to shatter or break during use. The fill material will also not easily adhere to the tool. The material of a preferred embodiment is sapphire. The tool is able to continue to compact and shape the fill material while the composite polymer fill material is undergoing photo-curing. The light beam used for photo-curing is able to safely pass through the tool without the risk of damage to the surrounding tissue from reflection or distortion of the light beam.

    摘要翻译: 用于光固化灌装工艺的牙科工具。 该牙科工具包括由能够透过工具尖端的紫外线和可见光波长透过而不会发生明显变形或反射的材料形成的工具尖端。 该材料的强度也相对较高,因此在使用过程中不会破裂或破裂。 填充材料也不会轻易粘附在工具上。 优选实施例的材料是蓝宝石。 当复合聚合物填充材料经历光固化时,该工具能够继续压缩和成形填充材料。 用于光固化的光束能够安全地通过工具,而不会损坏周围组织以避免光束的反射或变形。