摘要:
A semiconductor device having an SOI FET comprising a silicon body on an insulating layer on a conductive substrate. A gate dielectric and a gate are provided on a surface of the silicon body, and a source and a drain are provided on two sides of the gate. A buried body contact to the substrate conductor is provided below a third side of the gate. The buried body contact does not extend to the top surface of the silicon body. The body contact is separated from the gate by a second dielectric having a thickness typically greater than that of the gate dielectric. The body contact is a plug of conductive material, and the second dielectric coats the body contact under the gate. The FET can be used in an SRAM circuit or other type of circuit having a silicon-on-insulator (SOI) construction.
摘要:
A buried butted contact and method for its fabrication are provided which includes a substrate having dopants of a first conductivity type and having shallow trench isolation. Dopants of a second conductivity type are located in the bottom of an opening in said substrate. Ohmic contact is provided between the dopants in the substrate and the low diffusivity dopants that is located on a side wall of the opening. The contact is a metal silicide, metal and/or metal alloy.
摘要:
The present invention provides a process for fabricating a metal oxide semiconductor field effect transistor (MOSFET) having a double-gate and a double-channel wherein the gate region is self-aligned to the channel regions and the source/drain diffusion junctions. The present invention also relates to the FIN MOSFFET structure which is formed using method of the present invention.
摘要:
The present invention provides a process for fabricating a metal oxide semiconductor field effect transistor (MOSFET) having a double-gate and a double-channel wherein the gate region is self-aligned to the channel regions and the source/drain diffusion junctions. The present invention also relates to the FIN MOSFFET structure which is formed using method of the present invention.
摘要:
A method and apparatus for conditioning an integrated circuit to always enter a desired operating state when actuated by permanently altering at least one component device. An integrated circuit is provided with at least one component transistor wherein a constant high voltage is applied only once to the drain electrode of the transistor for one predetermined period of time while concurrently a constant voltage lower than the high voltage is applied only once to the gate electrode of the transistor, thus causing a permanent channel hot-electron alteration of a gate oxide of the transistor. The integrated circuit may include a plurality of programmable circuits, each capable of assuming a plurality of readable data states when powered up, and each including a plurality of programmable devices for permanently biasing its corresponding programmable circuit to assume one of the readable states upon subsequent power ups.
摘要:
A buried butted contact and method for its fabrication are provided which includes a substrate having dopants of a first conductivity type and having shallow trench isolation. Dopants of a second conductivity type are located in the bottom of an opening in said substrate. Ohmic contact is provided between the dopants in the substrate and the low diffusivity dopants that is located on a side wall of the opening. The contact is a metal silicide, metal and/or metal alloy.
摘要:
A double gated silicon-on-insulator (SOI) MOSFET is fabricated by using a mandrel shallow trench isolation formation process, followed by a damascene gate. The double gated MOSFET features narrow diffusion lines defined sublithographically or lithographically and shrunk, damascene process defined by an STI-like mandrel process. The double gated SOI MOSFET increases current drive per layout width and provides low out conductance.
摘要:
A double gated silicon-on-insulator (SOI) MOSFET is fabricated by using a mandrel shallow trench isolation formation process, followed by a damascene gate. The double gated MOSFET features narrow diffusion lines defined sublithographically or lithographically and shrunk, damascene process defined by an STI-like mandrel process. The double gated SOI MOSFET increases current drive per layout width and provides low out conductance.
摘要:
Oxygen implantation can be used to form a buried oxide layer in a substrate. A dielectric masking material is used to shape the buried oxide layer by changing the depth at which ions can implant based on the shape of the dielectric masking layer.
摘要:
An SOI semiconductor design methodology enables the implementation of simplified STI processes by the design and formation of a shallow trench isolation frame around an electrically active semiconductor region. The simplified STI processes include the fabrication of a trench by phase edge etching, trench sidewall oxidation, TEOS fill, and, finally a chemical or mechanical polish. The attribute which enables the simple process is that all isolation images can be current minimum or near minimum size, specifically no wider than twice the over-lay tolerance of the technology.