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公开(公告)号：US20230254589A1
公开(公告)日：2023-08-10
申请号：US17650024
申请日：2022-02-04
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER
CPC classification number: H04N5/2354 , H04N5/2256 , H04N7/015 , G06T7/001 , G06T2207/30108 , G06T2207/10152 , B65G2201/0235 , B65G47/22
Abstract: Embodiments described herein provide for a method and system for the inspection of fluids for defects. A plurality of containers with fluids disposed therein are inspected for defects in an inspection system. A timing sequence is used to control the timing of light pulses directed to the fluid residing in the plurality of containers. A high-resolution camera is utilized to obtain images of the fluid disposed in the plurality of containers. An illumination time of pulses of light in the inspection zone is less than an exposure time of each frame of a plurality of frames of the high-resolution camera. As such, the inspection system and method of utilizing the inspection system allows for high-resolution images of the fluid to be captured without smearing of the defects in the captured images.
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公开(公告)号：US20230075394A1
公开(公告)日：2023-03-09
申请号：US17799251
申请日：2021-03-02
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER , Markus J. STOPPER
IPC: H01L21/67 , B65G49/06 , H01L21/677
Abstract: Embodiments herein generally relate to inspection systems for substrates or wafers for solar cell applications. The inspection system is configured to analyze substrates or wafers for chips, cracks, and other defects. The system includes conveyor apparatuses, and the conveyor apparatuses include one or more conveyor elements. The conveyor elements are configured to transport rectangular wafers having a width between about 175 mm to about 250 mm. The conveyor elements include a first conveyor belt and second conveyor belt to transport the substrates. The spacing of the belts reduces vibrations of the substrate edge.
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公开(公告)号：US20250121411A1
公开(公告)日：2025-04-17
申请号：US18929282
申请日：2024-10-28
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER , Markus J. STOPPER
Abstract: Disclosed herein are a substrate sorter, an inspection and sorting system having the substrate sorter, and a method for the inspection and sorting system. The substrate sorter includes an annular gripper comprising a rotator and a plurality of vacuum applicators concyclically disposed around an axis, a carrier operable to move a substrate towards the rotator and into a loading region below the rotator, and an actuator coupled with the annular gripper and operable to rotate the rotator about the axis relative to the plurality of vacuum applicators while one or more of the plurality of vacuum applicators hold the substrate against the rotator.
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公开(公告)号：US20210096169A1
公开(公告)日：2021-04-01
申请号：US16712970
申请日：2019-12-12
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER , Markus J. STOPPER
Abstract: Embodiments disclosed herein include a substrate rotator, a substrate edge metrology system, and a method of performing metrology on a substrate. The substrate rotator includes a body, a body actuator coupled to the body and configured to rotate the body, and a first and second gripper coupled to the body. The substrate rotator is configured to rotate one or more substrates. The substrate edge metrology system includes two metrology systems and the substrate rotator. The substrate edge metrology system measures side chips or other defects on all sides of the substrate. The method includes performing metrology on a first set of sides of the first substrate, rotating the first substrate by a first angle, and performing metrology on the second set of sides of the first substrate. The method allows for measuring side chips or other defects on all sides of the substrate.
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公开(公告)号：US20150377796A1
公开(公告)日：2015-12-31
申请号：US14493824
申请日：2014-09-23
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER , Shengde ZHONG
CPC classification number: G01N21/9501 , G01N21/64 , G01N21/6489 , G01N21/95 , G01N2201/0612 , G01R31/2601 , G01R31/44 , H02S50/00 , H02S50/10 , H02S50/15
Abstract: Embodiments of the disclosure generally relate to comprehensive, expandable substrate inspection systems. The inspection systems include multiple metrology units adapted to inspect, detect, or measure one or more characteristics of a substrate, including thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, crystal fraction, and photoluminescence. The inspection systems may be utilized to identify defects on substrates and estimate solar cell efficiency of a solar cell produced with the substrate, prior to processing a substrate into a solar cell. Substrates may be transferred through the inspection system between metrology units on a track or conveyor, and then sorted based upon inspection data.
Abstract translation: 本公开的实施例一般涉及综合的，可扩展的基板检查系统。 检查系统包括适于检查，检测或测量衬底的一个或多个特性的多个测量单元，包括厚度，电阻率，锯痕，几何形状，污渍，芯片，微裂纹，晶体分数和光致发光。 在将衬底加工成太阳能电池之前，可以使用检查系统来识别衬底上的缺陷并估计由衬底制造的太阳能电池的太阳能电池效率。 基板可以通过轨道或传送带上的计量单元之间的检查系统传送，然后根据检查数据进行分类。
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Patent Agency Ranking
公开(公告)号：US20230349838A1
公开(公告)日：2023-11-02
申请号：US17661299
申请日：2022-04-29
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER
CPC classification number: G01N21/9503 , G06T1/0007
Abstract: Embodiments described herein provide for a defect detection system and method suitable for detecting defects on an edge of a wafer. The method includes placing at least two wafers sequentially on a conveyor. Images of at least the edges of each wafer placed on the conveyor are captured and sent to a controller. A defect detection software combines the images to show the edges of the wafers in a virtual stack. The virtual stack allows for a pattern of defects to be identified. The pattern of defects in close proximity will allow for identification of the defects in the edges of the wafers.
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公开(公告)号：US20230038811A1
公开(公告)日：2023-02-09
申请号：US17396933
申请日：2021-08-09
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER
Abstract: Embodiments of the present disclosure generally relate an apparatus for inspecting and sorting a plurality of substrates. The apparatus includes a sorting unit, a first conveyor lane disposed within the sorting unit in a first direction and a first plane, and at least a second conveyor lane disposed within the sorting unit, the second conveyor lane positioned in a second direction at an angle of greater than about 45 degrees relative to the first direction, wherein the second conveyor lane is positioned in a second plane that is different than the first plane.
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公开(公告)号：US20220189808A1
公开(公告)日：2022-06-16
申请号：US17118277
申请日：2020-12-10
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER , Markus J. STOPPER
IPC: H01L21/677 , G01N21/95
Abstract: A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module is disclosed that includes a loading station for two or more substrate cassettes, a first lane comprising a first conveyor that is substantially aligned with one of the two or more substrate cassettes and a conveyor system, a second lane comprising a second conveyor that is substantially aligned with another of the two or more substrate cassettes and positioned in a spaced-apart relation relative to the first lane, and a lateral transfer module positioned between the first lane and the second lane that is adapted to move substrates from the second lane to the first lane.
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公开(公告)号：US20190337734A1
公开(公告)日：2019-11-07
申请号：US16358478
申请日：2019-03-19
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER , Markus J. STOPPER
IPC: B65G47/91 , B25J15/06 , H01L21/67 , H01L21/683
Abstract: An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.
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公开(公告)号：US20250039556A1
公开(公告)日：2025-01-30
申请号：US18909102
申请日：2024-10-08
Applicant: Applied Materials, Inc.
Inventor： Asaf SCHLEZINGER
Abstract: Embodiments described herein provide for a method and system for the inspection of fluids for defects. A plurality of containers with fluids disposed therein are inspected for defects in an inspection system. A timing sequence is used to control the timing of light pulses directed to the fluid residing in the plurality of containers. A high-resolution camera is utilized to obtain images of the fluid disposed in the plurality of containers. An illumination time of pulses of light in the inspection zone is less than an exposure time of each frame of a plurality of frames of the high-resolution camera. As such, the inspection system and method of utilizing the inspection system allows for high-resolution images of the fluid to be captured without smearing of the defects in the captured images.
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