公开(公告)号：US20190221458A1

公开(公告)日：2019-07-18

申请号：US16247026

申请日：2019-01-14

Applicant: Applied Materials, Inc.

Inventor： Xuesong LU ,  Lin ZHANG ,  Joseph C. WERNER ,  Jang Seok OH ,  Balaji PASUPATHY ,  Michael W. JOHNSON

IPC: H01L21/67 ,  H01J37/32 ,  G01K3/10 ,  G01K3/00 ,  C23C16/50 ,  C23C16/455 ,  C23C16/52

CPC classification number: H01L21/67248 ,  C23C16/45544 ,  C23C16/50 ,  C23C16/52 ,  G01K3/005 ,  G01K3/10 ,  H01J37/3244 ,  H01J37/32899 ,  H01J2237/24585 ,  H01J2237/3321 ,  H01L21/67017 ,  H01L21/67167 ,  H01L21/67207

Abstract: Embodiments herein provide methods of monitoring temperatures of fluid delivery conduits for delivering fluids to, and other components external to, a processing volume of a processing chamber used in electronic device fabrication manufacturing, and monitoring systems related thereto. In one embodiment, a method of monitoring a processing system includes receiving, through a data acquisition device, temperature information from one or more temperature sensors and receiving context information from a system controller coupled to a processing system comprising the processing chamber. Here, the one or more temperature sensors are disposed in one or more locations external to a processing volume of a processing chamber. The context information relates to instructions executed by the system controller to control one or more operations of the processing system.